Fabrication of periodic micro-structures by holographic lithography

• DOI: 10.3952/physics.v53i4.2765
• Publication Date: 2014-01-22T23:44:22Z
• Authors: Evaldas Stankevičius; Mindaugas Gedvilas; Bogdan Voisiat; Mangirdas Malinau...; Gediminas Račiuka...
• Keywords: Interference lithography; Maskless lithography; Next-generation lithography

The principles of the holographic lithography technique are reviewed, and ability in formation structures with different periods by SZ2080 is demonstrated. influence laser exposure, phase shift between interfering beams, used wavelength on fabricated four-beam interference has been studied. It shown that using − beams a it possible to reduce period structure √2 times compared four same phase. Fabrication micro-structures can be realized via multi-photon single-photon polymerization processes. created these two techniques compared. Finally, experiments five-beam interference, doubleperiod effect was observed adding zero-order beam low intensity. periodic microstructures have potential as scaffold for cell growth micro-optics.