Evidence of the matrix effect on a compositionally graded oxide thin film

• DOI: 10.48550/arxiv.2502.09382
• Publication Date: 2025-02-13
• Authors: J. Scola; François Jomard; Estelle Loire; J. Wolfman; B. Négulescu; G. Z. Liu; M.A. Pinault-Thaury
• Keywords: Matrix (chemical analysis)

A heterostructure of Ba$_{1-x}$Sr$_x$TiO$_3$/La$_{1.1}$Sr$_{0.9}$NiO$_3$ /SrTiO$_3$ has been analysed by magnetic sector secondary ion mass spectrometry (SIMS). The stoichiometry parameter $x$ the top layer was made varying continuously from 0 to 1 along width sample combinatorial pulsed laser deposition. Prior SIMS analysis, composition gradient Ba$_{1-x}$Sr$_x$TiO$_3$ quantitatively characterized chemical characterizations including wavelength and energy dispersive X-ray spectroscopies. Even if Ti content is constant into Ba$_{1-x}$Sr$_x$TiO$_3${}, its ionic yield exhibits an increasing trend as Ba substituted Sr. Such a phenomenon can be explained variation neighbouring atoms chemistry which affects ionization probability titanium during sputtering process. In addition composition, oxide multilayer features sharp interfaces hence in-depth resolution under our analysing conditions investigated too. modelling interface crossing profiles reveals that instrumental contribution profile broadening low 5 nm.