Formation of Diamond-Like Carbon Films by Photoemission-Assisted Plasma-Enhanced Chemical Vapor Deposition

• DOI: 10.7567/jjap.52.110123
• Publication Date: 2013-10-23T03:53:22Z
• Authors: Meng Yang; Susumu Takabayashi; Shuichi Ogawa; Hiroyuki Hayashi; Radek Ješko; Taiichi Otsuji; Yuji Takakuwa
• Keywords: Carbon fibers; Amorphous carbon; Diamond-like carbon

Diamond-like carbon (DLC) films, which are an amorphous carbonaceous allotrope composed of sp 2 carbon, 3 and hydrogen, were prepared by photoemission-assisted plasma-enhanced chemical vapor deposition (PA-PECVD). The electrical behavior during film growth monotonically depended on the methane source gas concentration. Raman analysis films suggests that a DLC grown at high concentration condition contains small number graphitic domains, decreasing amorphicity film. In contrast, low concentration, molecules transformed into sufficiently fragmented radicals, forming lot nuclei increasing amorphicity. However, variations relative dielectric constant, breakdown strength, optical bandgap exhibited extreme values intermediate Thus, two modes give different with varying combinations characteristics.