Progress in single-photon avalanche diode image sensors in standard CMOS: From two-dimensional monolithic to three-dimensional-stacked technology

• DOI: 10.7567/jjap.57.1002a3
• Publication Date: 2018-09-10T09:13:45Z
• Authors: Myung-Jae Lee; Edoardo Charbon
• Keywords: Single-photon avalanche diode; Avalanche diode; Photon Counting

Single-photon detection and photon counting are useful tools in many fields, from light ranging (LiDAR) to biomedical imaging time-resolved Raman spectroscopy quantum applications. In this context, recently, single-photon avalanche diode (SPAD) sensors standard CMOS technology have been receiving considerable attention both scientific industrial communities since they can provide photon-counting capabilities along with some functionalities such as time-of-arrival evaluation histogram processing a cost-effective manner. review, we comprehensive view of the SPAD technology: fundamentals cutting-edge technologies including three-dimensional (3D)-stacked sensors.