A5032266339- Advanced MEMS and NEMS Technologies
- Geophysics and Sensor Technology
- Inertial Sensor and Navigation
- Advanced Fiber Optic Sensors
- Mechanical and Optical Resonators
- Structural Health Monitoring Techniques
- Advanced Surface Polishing Techniques
- Astronomical Observations and Instrumentation
- Acoustic Wave Resonator Technologies
- Sensor Technology and Measurement Systems
- Optical measurement and interference techniques
- Advanced Measurement and Metrology Techniques
- Gas Sensing Nanomaterials and Sensors
Huzhou University
2023-2024
Zhejiang University
2023
Northwestern Polytechnical University
2015-2019
This paper characterizes the sensitivity of a time domain MEMS accelerometer. The is defined by increment in measured interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced decreasing amplitude frequency. with minor nonlinearity chosen to evaluate sensor. experimental results developed accelerometer demonstrate that span from −68.91 μs/g −124.96 1σ noises 8.59 mg 6.2 (amplitude 626 nm: 10.21 mg; 455 −94.51 7.76 342 6.23 mg), which indicates bigger...
This Letter presents a high accuracy silicon‐on‐insulator (SOI) capacitive accelerometer using backside dry release process. To increase the yield rate of process, deep reactive iron etching (DRIE) process was improved grooved accompany wafer to balance pressure inside back cavity SOI devices. By this method, almost all devices after DRIE will not crack. Thus, is significantly increased. Furthermore, by dividing into four stages decrease tilt angle DRIE. It experimentally demonstrated that...
This paper presents a SOI based capacitive accelerometer using backside dry release process. In order to increase the yield rate of process, deep reactive ion etching (DRIE) process was improved by grooved accompany sheet. Using this method, 64.2% from19.2%. Test results show that sensitivity is 3.5V/g.
This paper reports for the first time a virtual accelerometer array using one device based on domain measurement. The can simultaneously offer multiple acceleration measurements, thus implementing array. is calculated by measuring intervals between triggering events generated when harmonically oscillating mass-on-spring passes set of predefined displacement reference points. measurements are obtained predefining sets points and corresponding intervals. Accuracy improved via combining all...
This work presents an approach to enhance the sensitivity and lower uncertainty of a tilt sensor based on dual‐axis accelerometer. The arctangent function arctan( 2 / 1 ) instead traditional arcsine arcsin( /g or g is used solve for angle. As result, measured angle kept in maximum constant value (17.45 mg/°) measurement minimum (0.033° this work) range −90° +90°. It also experimentally verified that solving method has (the average 17.74 mg/° with root mean square 0.008 0.034° 0.003°)...
This paper presents a novel virtual accelerometer array using one single device. The device can simultaneously offer multiple acceleration measurement results, which improves the accuracy via combining all measurements. is measured based on time intervals by harmonically oscillating mass-on-spring and creating triggering events when proof mass passes set of predefined displacement reference points. And results are obtained sets Compared with conventional sensor array, it lowers volume power...
A top-down design methodology and implementation of a time domain sensor is presented in this paper. The acceleration resolution the equal to time-measurement accuracy divided by sensitivity. Combined with sensitivity formula, proportional vibration amplitude, accuracy, third power resonant frequency. According available desired resolution, parameters including amplitude frequency were theoretically calculated. geometrical configuration device was designed based on calculated parameters....
This paper presents a tilt sensor using two orthogonally arranged micro accelerometers. The arctangent function arctan(a <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /a xmlns:xlink="http://www.w3.org/1999/xlink">1</sub> ) instead of the traditional arcsine arcsin(a /g) or is used to solve for angle. As result, angle measurement kept in maximum value with constant sensitivity (17.45 mg per degree) full range.