IC-compatible microelectromechanical intermediate frequency filters using integrated resonators with Q's in the thousands to achieve filter hundreds have been demonstrated a polysilicon surface micromachining technology. These are composed of two clamped-clamped beam micromechanical coupled by soft flexural-mode mechanical spring. The center given is determined resonance constituent resonators, while bandwidth coupling spring dimensions and its location between resonators. Quarter-wavelength...

An overview of recent progress in the research and development micromachined devices for use wireless communication subsystems is presented. Among specific described are tunable capacitors, integrated high-Q inductors, low-loss microwave millimeter-wave filters, micromechanical switches, microscale vibrating mechanical resonators with Q's tens thousands, miniature antennas applications. Specific applications reviewed each these components emphasis on methods miniaturization performance...

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency controlled by polysilicon micromechanical resonator with intent of achieving high stability. The operation and performance resonators are modeled, emphasis on circuit noise modeling multiport resonators. series resonant oscillator design discussed that utilizes unique, gain-controllable transresistance sustaining amplifier. We...

Free-free-beam flexural-mode micromechanical resonators utilizing nonintrusive supports to achieve measured Qs as high 8400 at VHF frequencies from 30 90 MHz are demonstrated in a polysilicon surface micromachining technology. The microresonators feature torsional-mode support springs that effectively isolate the resonator beam its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these high-Q with stiffness frequency range. free-free-beam...

Series-resonant vibrating micromechanical resonator oscillators are demonstrated using a custom-designed single-stage zero-phase-shift sustaining amplifier together with planar-processed variants quality factors Q in the thousands that differ mainly their power-handling capacities. The include two 40-/spl mu/m-long 10-MHz clamped-clamped-beam (CC-beam) resonators, one of them much wider than other so as to allow larger capacity, and 64-/spl mu/m-diameter 60-MHz disk maximizes both power...

A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining polysilicon surface-micromachining and metal electroplating to attain submicron lateral capacitive gaps, has been demonstrated at frequencies as high 829 MHz with Q's 23 000 193 MHz. Furthermore, the resonators have operating in first three radial contour modes, allowing significant frequency increase without scaling device, resonator shown atmospheric pressure Q of 8,880, evidence that vacuum...

A new fabrication methodology that allows self-alignment of a micromechanical structure to its anchor(s) has been used achieve vibrating radial-contour mode polysilicon disk resonators with resonance frequencies up 1.156 GHz and measured Q's at this frequency >2,650 in both vacuum air. In addition, 734.6-MHz version demonstrated 7,890 5,160 air, respectively. For these resonators, the stem exactly center it supports balancing resonator far superior achieved by previous versions (in which...

With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as integrated circuit-compatible tanks for use low phase-noise oscillators and highly selective filters communications subsystems. To date, LF have been fully using merged CMOS/microstructure technologies, bandpass consisting spring-coupled micromechanical demonstrated a frequency range from HF VHF. In particular, two-resonator with frequencies up 35 MHz, percent bandwidths on order 0.2%, insertion...

Microelectromechanical (MEM) filters based on coupled, lateral microresonators are demonstrated. This class of MEM systems has potential signal-processing applications for which require narrow bandwidth (high Q), good signal-to-noise ratio (SNR) and stable temperature aging characteristics. Both series parallel were fabricated tested using an off-chip modulation technique. The frequency range these is from approximately 5 kHz to the order 1 MHz, polysilicon microstructures with suspension...

Low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation. The RF MEMS were fabricated via a surface micromachining process using P12545 polyimide as the sacrificial layer. switch structure was composed of electroplated nickel and had varying number meanders from 1 5. DC...

Third order, high-Q, micromechanical bandpass filters comprised of three ratioed folded-beam resonators coupled by flexural mode springs are demonstrated using an integrated circuit compatible, doped polycrystalline silicon surface-micromachining technology. A complete design procedure for multiresonator is presented and solidified via example design. The use quarter-wavelength coupling beams attached to at velocity-controllable locations shown suppress passband distortion due finite-mass...

A device comprised of interlinked micromechanical resonators with capacitive mixer transducers has been demonstrated to perform both frequency translation (i.e., mixing) and highly selective low-loss filtering applied electrical input signals. In particular, successful downconversion a 200-MHz radio (RF) signal down 37-MHz intermediate (IF) subsequent high-Q bandpass at the IF are using this single, passive, device, all less than 13 dB combined mixing conversion filter insertion loss. The...

A glass vacuum package based on localized aluminum/silicon-to-glass bonding has been successfully demonstrated. constant heat flux model shows that heating can be confined locally in the dielectric layer underneath a microheater as long width of and thickness silicon substrate are much smaller than die size good sink is placed substrate. With 3.4 W power, /spl sim/0.2 MPa applied contact pressure 90 min wait time before bonding, encapsulation at 25 mtorr (/spl sim/3.33 Pa) achieved....

The first CVD nanocrystalline diamond micromechanical disk resonator with material-mismatched stem has been demonstrated at a record frequency of 1.51 GHz an impressive Q 11,555, which is more than 7X higher in previous 1.14-GHz polysilicon resonator, and achieves frequency-Q product 1.74/spl times/10/sup 13/ that now exceeds the 1/spl some best quartz crystals. In addition, 1.27-GHz version excess 12,000 exhibits measured motional resistance only 100 k/spl Omega/ dc-bias voltage 20 V, 34X...

A vibrating polysilicon micromechanical "hollow-disk" ring resonator obtained by removing quadrants of material from a solid disk resonator, but purposely leaving intact beams to non-intrusively support the structure, has been demonstrated in several vibration modes spanning frequencies HF (24.4 MHz), VHF (72.1MHz), UHF (1.169 GHz), with Q's as high 67,519, 48,048, and 5,846, respectively. Furthermore, use notched attachments closer actual extensional nodal points raises Q 14,603 at 1.2 GHz,...

Substantial reductions in vibrating micromechanical resonator series motional resistance R <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> have been attained by mechanically coupling and exciting a parallel array of corner-coupled polysilicon square plate resonators. Using this technique with seven resonators, an effective 480 Omega has at 70 MHz, which is more than 5.9X smaller the 2.82 kOmega exhibited stand-alone transverse-mode...

Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-glass-mode shape to achieve lower impedance than previous UHF have been demonstrated at frequencies as high 1.2 GHz with Q of 3,700, and 1.52 2,800. The 1.2-GHz resonator exhibits measured motional resistance 1 MOmega dc-bias voltage 20 V, which is 2.2 times the on radial contour- mode disk counterparts same frequency. use larger rings offers path toward even impedance, provided spurious modes that become...

A micromechanical, laterally vibrating disk resonator, fabricated via a technology that combines polysilicon surface-micromachining and metal electroplating to attain submicron lateral capacitive gaps, has been demonstrated at frequencies approaching 160 MHz with Q's as high 9,400-the highest date for an on-chip resonator in this frequency range. This also represents the electrostatically transduced micromechanical is important step towards reaching required by RF front-ends wireless...

Fully monolithic, high-Q, micromechanical signal processors are described. A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is detailed, for which the oscillation frequency controlled by polysilicon resonator to achieve high stability. The operation and performance of mechanical resonators modelled, with emphasis on circuit noise modelling. Micromechanical filter design described, prototype two-resonator bandpass demonstrated....

Polysilicon /spl mu/mechanical resonators utilizing a novel temperature-dependent electrical stiffness design technique to compensate for temperature-induced frequency shifts have been demonstrated with greatly reduced temperature coefficients (TC/sub f/'s) on the order of -0.24 ppm//spl deg/C, which is 67 times smaller than exhibited by previous uncompensated resonators. With this new resonator design, total excursion over 300 K 380 range has from 1,280 ppm an device only 18 ppm, first...

Polysilicon wine-glass mode micromechanical disk resonators using a stemless, non-intrusive suspension structure have been demonstrated in both vacuum and atmospheric pressure at frequencies around 73.4 MHz with Q's as high 98,000 vacuum, 8,600 atmosphere-the highest ever reported this frequency range these environments for any on-chip micro-scale resonator. The Q of resonator is more than 10X higher measured on radial contour counterparts, 8X exhibited by published free-free beams 70 MHz.

Two novel designs of micromechanical capacitive switches using serpentine and cantilever springs for low actuation voltage applications are reported. Both also incorporate an electrode situated above the switching structure in order to provide system stability. DC measurements indicate pull-in voltages 14 16 V, with RF isolation better than -30 dB up 40 GHz.

Micromechanical RF filters and reference oscillators based on recently demonstrated vibrating on-chip micromechanical resonators with Qs>10,000 at 1.5 GHz, are described as an attractive solution to the increasing count of components (e.g., filters) expected be needed by future multi-band wireless devices. With Qs this high in abundance, such devices might also enable a paradigm-shift transceiver design where advantages high-Q emphasized, rather than suppressed, resulting enhanced robustness...

Clear differences in the phase noise performance of a 10 MHz MEMS-based micromechanical resonator oscillator have been measured using sustaining circuits with and without automatic-level control (ALC), differing mechanisms for ALC. In particular, low output power oscillators referenced to high-Q clamped-clamped beam /spl mu/mechanical resonators exhibit an unexpected 1/f/sup 3/ component ALC, 5/ when ALC circuit based on dc-bias adjustment is used, finally, removal these components amplifier...