K. Murakami

ORCID: 0000-0001-5999-5581
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About
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Research Areas
  • Semiconductor materials and devices
  • Silicon Nanostructures and Photoluminescence
  • Graphene research and applications
  • Ion-surface interactions and analysis
  • Electron and X-Ray Spectroscopy Techniques
  • Carbon Nanotubes in Composites
  • Diamond and Carbon-based Materials Research
  • Nanowire Synthesis and Applications
  • Silicon and Solar Cell Technologies
  • Advanced Electron Microscopy Techniques and Applications
  • Semiconductor materials and interfaces
  • Laser Material Processing Techniques
  • Thin-Film Transistor Technologies
  • Photocathodes and Microchannel Plates
  • Radiation Effects in Electronics
  • Integrated Circuits and Semiconductor Failure Analysis
  • Electrohydrodynamics and Fluid Dynamics
  • Molecular Junctions and Nanostructures
  • GaN-based semiconductor devices and materials
  • Laser-induced spectroscopy and plasma
  • Advanced Materials Characterization Techniques
  • Plasma Diagnostics and Applications
  • Advancements in Semiconductor Devices and Circuit Design
  • Force Microscopy Techniques and Applications
  • Mechanical and Optical Resonators

National Institute for Japanese Language and Linguistics
2025

National Institute of Advanced Industrial Science and Technology
2016-2024

Hachinohe Institute of Technology
1992-2023

Shizuoka University
2017-2023

University of Tsukuba
2010-2021

Friedrich-Alexander-Universität Erlangen-Nürnberg
2011-2020

National Institute for Materials Science
2018

Fraunhofer Institute for Integrated Systems and Device Technology
2015

Schott (Germany)
2015

Osaka University
2001-2011

Point sources exhibit low threshold electron emission due to local field enhancement at the tip. The development and implementation of tip emitters have been hampered by need position them sufficiently apart achieve enhancement, limiting number sites therefore overall current. Here we report (< 0.1 V/μm) multiple beams from atomically thin edges reduced graphene oxide (rGO). Field microscopy measurements show evidence for interference that are separated a few nanometers, suggesting emitted...

10.1021/nn201043a article EN ACS Nano 2011-05-27

We report the first observation of vibrational Raman spectrum hydrogen molecules ${\mathrm{H}}_{2}$ in crystalline silicon treated with atoms at 400 \ifmmode^\circ\else\textdegree\fi{}C. The observed room temperature exhibits a frequency shift around $4158{\mathrm{cm}}^{\ensuremath{-}1}$ and very broad half-width approximately $34{\mathrm{cm}}^{\ensuremath{-}1}$. An isotope was also detected $2990{\mathrm{cm}}^{\ensuremath{-}1}$ deuterium shifts lines are close agreement those reported for...

10.1103/physrevlett.77.3161 article EN Physical Review Letters 1996-10-07

Low-temperature direct synthesis of thick multilayered hexagonal-boron nitride (h-BN) on semiconducting and insulating substrates is required to produce high-performance electronic devices based two-dimensional (2D) materials. In this study, h-BN with a thickness exceeding 5 nm was directly synthesized quartz Si at low temperatures, between 400 500 °C, by inductively coupled plasma-enhanced chemical vapor deposition using borazine as the precursor material. The quality crystals were...

10.1021/acsomega.2c06757 article EN cc-by-nc-nd ACS Omega 2023-01-31

A single layer of graphene with dimensions 20 mm × was grown directly on an insulating substrate by chemical vapor deposition using Ga catalysts. The showed highly homogeneous crystal quality over a large area the substrate. measured Raman spectroscopy and found to improve increasing density reaction area. High-resolution transmission electron microscopy observations that synthesized had perfect atomic-scale structure within its grains, which ranged in size from 50 nm 200 nm.

10.1063/1.4914114 article EN Applied Physics Letters 2015-03-02

A gradual downshift and asymmetric broadening of the Si optical phonon peak were observed by Raman scattering measurements continuously thermally oxidized silicon nanowires (SiNWs) synthesized laser ablation. This can be interpreted confinement effect. Further thermal oxidation produced a reverse change; namely, an upshift peak. is considered to due compressive stress since this was relieved removing oxide layers formed around SiNW cores, resulting in

10.1063/1.1931055 article EN Applied Physics Letters 2005-05-18

A graphene-oxide-semiconductor (GOS) planar-type electron source was fabricated by direct synthesis of graphene on an oxide layer via low-pressure chemical vapor deposition. It achieved a maximum emission efficiency 32.1% suppressing the inelastic scattering within topmost gate electrode using electrode. In addition, current density 100 mA/cm2 observed at 16.2%. The energy spread well fitted to Maxwell-Boltzmann distribution, which indicates that emitted electrons are thermally equilibrium...

10.1063/1.5091585 article EN Applied Physics Letters 2019-05-27

Abstract A method to measure the electrical resistivity of materials using magnetic- force microscopy (MFM) is discussed, where MFM detects magnetic field caused by tip-oscillation-induced eddy current. To achieve high sensitivity, a cantilever oscillation frequency preferable, because it induces large currents in material. Higher-order resonance modes lead higher frequency. discuss such high-order-mode oscillation, differential equation governing high-order mode formulated, and an...

10.35848/1347-4065/adbfa0 article EN Japanese Journal of Applied Physics 2025-03-12

From the analysis of ratio D peak intensity to G in Raman spectroscopy, electron beam irradiation with energies 100 eV was found induce damage single-layer graphene. The becomes larger decreasing energy. Internal strain graphene induced by under is further evaluated based on shifts. dose-dependent internal approximately 2.22% cm2/mC at and 2.65 × 10−2% 500 eV. showed strong dependence

10.1063/1.4790388 article EN Applied Physics Letters 2013-01-28

Highly efficient electron emission of 48.5% was demonstrated by a graphene/oxide/semiconductor (GOS) structure. The main factors contributing to this performance were investigated analyzing the energy distributions emitted electrons and current conduction mechanism through oxide layer. level lower tail distribution 2.4–2.6 eV above work function graphene electrode, indicating that gate electrode does not affect efficiency. In addition, Fowler–Nordheim (FN) tunneling dominant in layer when...

10.1021/acsaelm.0c00449 article EN ACS Applied Electronic Materials 2020-07-06

We have found that hydrogen exists in molecular form crystalline silicon treated with atoms the downstream of a plasma. The vibrational Raman line molecules is observed at $4158{\mathrm{cm}}^{\mathrm{\ensuremath{-}}1}$ for samples hydrogenated between 180 and 500 \ifmmode^\circ\else\textdegree\fi{}C. assignment confirmed by its isotope shift to $2990{\mathrm{cm}}^{\mathrm{\ensuremath{-}}1}$ deuterium atoms. intensity has maximum hydrogenation 400 broad asymmetric. It consists least two...

10.1103/physrevb.56.6642 article EN Physical review. B, Condensed matter 1997-09-15

Local vibrational modes of boron (B) in silicon nanowires (SiNWs) synthesized by laser ablation were observed at about 618 and 640cm−1 Raman scattering measurements. Boron doping was performed during the growth SiNWs. Fano [Phys. Rev. 124, 1866 (1961)] broadening also Si optical phonon peak. These results prove that B atoms doped Hydrogen (H) passivation acceptors SiNWs investigated. A broad peak around 650–680cm−1 after hydrogenation, demonstrating dopants passivated formation well-known...

10.1063/1.2372698 article EN Applied Physics Letters 2006-11-13

The phonon confinement and self-limiting oxidation effects of silicon nanowires (SiNWs) synthesized by laser ablation were investigated. size SiNWs was controlled the synthesis parameters during subsequent thermal oxidation. Thermal increases thickness SiNWs’ surface oxide layer, resulting in a decrease their crystalline Si core diameter. This effect causes downshift asymmetric broadening optical peak due to confinement, while excess an upshift compressive stress. stress retarded effect....

10.1063/1.2218386 article EN Journal of Applied Physics 2006-07-15

Phosphorus (P) doping was performed during the synthesis of silicon nanowires (SiNWs) by laser ablation. At least three types signals were observed electron spin resonance (ESR) at 4.2K. into substitutional sites crystalline Si in SiNWs demonstrated detection an ESR signal with a g value 1.998, which corresponds to conduction electrons Si, and energy-dispersive x-ray spectroscopy spectrum PKα line. The results also revealed presence defects. These defects partially passivated hydrogen oxygen atoms.

10.1063/1.2721377 article EN Applied Physics Letters 2007-04-09

Graphene was used as the topmost electrode for a metal-oxide-semiconductor planar-type electron emission device. With several various layers, graphene gate on thin oxide layer directly deposited by gallium vapor-assisted chemical vapor deposition. The maximum efficiency of emission, defined ratio anode current to cathode current, showed no dependency thickness in range from 1.8 nm 7.0 nm, indicating that scattering inside is practically suppressed. In addition, high density 1–100 mA/cm2...

10.1063/1.4942885 article EN Applied Physics Letters 2016-02-22

In this work, a planar electron emission device based on graphene/hexagonal boron nitride (h-BN)/n-Si heterostructure is fabricated to realize highly monochromatic from flat surface. The h-BN layer used as an insulating suppress inelastic scattering within the device. energy spread of using 0.28 eV full-width at half-maximum (FWHM), which comparable conventional tungsten field emitter. characteristic spectral shape distributions reflected distribution in conduction band n-Si substrate....

10.1021/acsami.9b17468 article EN ACS Applied Materials & Interfaces 2019-12-27

Carbon nanotube (CNT) cathode surfaces have been exposed to Ar plasma and the emission characteristics were measured. When a CNT was for 3 min, improved. The current increased after an treatment min by three orders of magnitude from 9.0×10−5 3.3×10−1 mA/cm2 at 4.0 V/μm with decrease in turn-on voltage 3.3 1.7 V/μm. According scanning electron microscopy images, entangled bundles raveled out treatment.

10.1116/1.1667518 article EN Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena 2004-05-01

Size control of silicon nanowires (SiNWs) synthesized by laser ablation a Si target with iron or nickel as catalysts were investigated changing the synthesis parameters such content catalyst in targets and power during synthesis. The diameter length SiNWs significantly depended on parameters, i.e. size can be controlled parameters. Manipulation was also performed observation scanning electron microscope. By degree charge-up for free-standing adjacent intertwined at an edge substrate,...

10.1016/j.stam.2005.06.015 article EN cc-by-nc Science and Technology of Advanced Materials 2005-01-01

Pt nanowires were fabricated using electron-beam (EB)- and focused-ion-beam (FIB)-induced deposition. The resistance of the EB-deposited was high (≈10 7 Ω) as deposited increased markedly when cooled down. observed temperature dependence wires indicates that electron transport in is dominated by variable range hopping (VRH). Coulomb oscillations at temperatures up to ≈200 K for simultaneously with VRH. Postannealing effective reduce resistance. FIB-deposited nanowires, contrast, hardly...

10.1143/jjap.44.5683 article EN Japanese Journal of Applied Physics 2005-07-01

Codoping of boron (B) and phosphorus (P) atoms was performed during the synthesis silicon nanowires (SiNWs) by laser ablation. The observation a local vibrational mode B clearly showed doping in codoped SiNWs, while Fano broadening due to heavy disappeared, indicating compensation P donors. electrospin resonance signal conduction electrons also disappeared acceptors. These results indicate that codoping achieved SiNWs

10.1063/1.3033226 article EN Applied Physics Letters 2008-11-17

Topography and leakage current maps of TiO2 films grown by atomic layer deposition on RuO2 electrodes using either a TiCl4 or Ti(O-i-C3H7)4 precursor were characterized at nanoscale conductive force microscopy (CAFM). For both films, the flows mainly through elevated grains not along grain boundaries. The overall CAFM is larger more localized for TiCl4-based (0.63 nm capacitance equivalent oxide thickness, CET) compared to Ti(O-i-C3H7)4-based (0.68 CET). Both have physical thickness ∼20 nm....

10.1021/am4049139 article EN publisher-specific-oa ACS Applied Materials & Interfaces 2014-01-31

The electron emission properties of planar-type devices based on a graphene-oxide-semiconductor (GOS) structure before and after vacuum annealing were investigated. fluctuation the current was around 0.07%, which is excellent stability compared to conventional field emitter array. GOS operable in very low 10 Pa without any deterioration their properties. Improvement achieved by at 300 °C. efficiency type reached 2.7% from 0.2% annealing. work function graphene electrode found decrease 0.26...

10.1116/1.5006866 article EN Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena 2018-02-27
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