A5008155163- Semiconductor materials and devices
- Polymer Surface Interaction Studies
- Electronic and Structural Properties of Oxides
- Advanced ceramic materials synthesis
- Graphene research and applications
- Silicon Nanostructures and Photoluminescence
- Advancements in Semiconductor Devices and Circuit Design
- Advanced Sensor and Energy Harvesting Materials
- Metal and Thin Film Mechanics
- Copper Interconnects and Reliability
- Advanced Memory and Neural Computing
- Silicone and Siloxane Chemistry
- Mesoporous Materials and Catalysis
- Diamond and Carbon-based Materials Research
- Calcium Carbonate Crystallization and Inhibition
CIC nanoGUNE
2022-2025
Dagestan Scientific Center of the Russian Academy of Sciences
2020-2021
Dagestan State University
2020-2021
Inspired by the properties of natural chitin, present work provides first solid foundation for growing conformal ultrathin antibacterial films organic chitin through a solvent-free molecular layer deposition (MLD) process. This establishes initial groundwork biomimetic hybrid cuticles combining sugar-type molecules with vapor-phase metal-organic precursors, which we term metallochitins or, more generally, metallosaccharides. The MLD process, featuring mild temperatures and conditions,...
Molecular layer deposition (MLD) is a powerful vapor phase approach for growing thin polymer films with molecular-level thickness control. We applied the ring-opening MLD process to deposit siloxane-alumina hybrid organic–inorganic film using tetramethyl-tetravinylcyclotetrasiloxane (V4D4) and trimethylaluminum (TMA) as precursors. In situ studies of this quartz crystal microbalance (QCM) showed linear mass increase number cycles within processing temperature window between 120 200 °C. The...
Silicon-based polymers show great promise for various applications in biomedicine, nanotechnology, tissue targeting, and drug delivery. The use of such materials as functional coatings on surfaces requires the development strongly adhering flexible conformal films, which is challenging conventional wet-chemical coating techniques. We have developed a facile, solvent-free molecular layer deposition (MLD) process to grow environmentally stable hybrid alumosilazane thin films. Exceptionally...
The in situ free carbon formation polymer-derived ceramics (PDCs) is essential for its microstructure evolution and resulting unique characteristics. This study advances the phenomenon of surface graphenization with first silicon-based conformal preceramic polymer thin films deposited by molecular layer deposition (MLD). In thermal annealing transmission electron microscopy (TEM) investigation was performed to on nanoscale during high-temperature postprocessing hybrid organic–inorganic...
In this work, we report the first ring opening vapor to solid polymerization of cyclotrisiloxane and N-methyl-aza-2,2,4-trimethylsilacyclopentane by molecular layer deposition (MLD). This process was studied in situ with a quartz crystal microbalance thin film characterized X-ray photoelectron spectroscopy, ATR-FTIR high-resolution transmission electron microscopy.
We developed a thin film growth with radical-initiated cross-linking of vinyl groups in layer-by-layer manner<italic>via</italic>molecular layer deposition (MLD). The cross-linked exhibited improved properties like 12% higher density and enhanced stability compared to the non-cross-linked film.
Abstract Atomic Layer Processing (ALP) techniques have transformed materials engineering by enabling atomic/molecular‐level control over composition, fidelity in structure replication, and properties. Tracing its origins to pioneering molecular layering atomic layer deposition work the mid‐20th century, this multifaceted field has remarkably diversified include (MLD), etching (ALE), area‐selective (ASD), vapor‐phase infiltration (VPI) processes. ALP is making great impacts across diverse...