A5052979189- Plasma Diagnostics and Applications
- Plasma Applications and Diagnostics
- Electrohydrodynamics and Fluid Dynamics
- Diamond and Carbon-based Materials Research
- Metal and Thin Film Mechanics
- Particle accelerators and beam dynamics
- Advanced Data Storage Technologies
- Catalytic Processes in Materials Science
- Magnetic confinement fusion research
- Semiconductor materials and devices
- Magnetic Field Sensors Techniques
- Laser-induced spectroscopy and plasma
- Dust and Plasma Wave Phenomena
- Cryptographic Implementations and Security
- Carbon Nanotubes in Composites
- Gas Sensing Nanomaterials and Sensors
- Nanofabrication and Lithography Techniques
- Copper Interconnects and Reliability
- Advancements in Photolithography Techniques
- Surface Modification and Superhydrophobicity
- Ion-surface interactions and analysis
- Aerosol Filtration and Electrostatic Precipitation
- Analytical chemistry methods development
- nanoparticles nucleation surface interactions
- Mass Spectrometry Techniques and Applications
Laboratoire Plasma et Conversion d'Energie
2016-2025
Institut National Polytechnique de Toulouse
2011-2025
Université Toulouse III - Paul Sabatier
2011-2025
Centre National de la Recherche Scientifique
2010-2025
Université de Toulouse
2011-2025
École Nationale Supérieure d'Électrotechnique, d'Électronique, d'Informatique, d'Hydraulique et des Télécommunications
2024
Institut Pierre-Simon Laplace
2023
Technology International Incorporated of Virginia (United States)
2009-2014
Nantes Université
2000-2005
Institut des Matériaux Jean Rouxel
2000-2005
The dissociation of nitrogen molecules in an Ar–N2 inductively coupled plasma (ICP) discharge is studied both experimentally and theoretically. To measure the absolute N atom density emission intensity Ar N2 excited levels, two-photon absorption laser-induced fluorescence (TALIF) spectroscopy optical are used. We observe increase with increasing pressure whereas decreases for pressures higher than 100 mTorr a pure discharge. On adding argon to mixture, we that rate enhanced when going from...
Radiation emitted from Hall thrusters in the GHz range has been observed to occur as short pulses. The origin of this emission is still unclear and raises questions both physical understanding electromagnetic compatibility between thruster spacecraft. In work, experimental investigations a connection pulses appearance characteristics, low frequency oscillations discharge, are performed. They provide first evidence for existence such connection, especially on spectral level. A dependency...
We have investigated new aromatic polymers for nanoimprint and subsequent dry etching, namely thermoset thermoplastic compounds. They were tested in a SiO2 patterning process under low pressure high plasma density conditions feature selectivity about twice as poly(methylmethacrylate) (PMMA). The imprint behavior is comparable to PMMA and, particular, the show excellent quality. This was demonstrated by replication of large arrays lines down 50 nm width. showed etch stability Teflon-like...
Abstract The role of the active species involved in superficial modification natural and manmade fibers is discussed for example wool PA6 fabrics treated by means post‐discharge plasmas (N 2 , N + 23% O ) to avoid UV radiation, ions, electrons other present direct plasma discharges. have been quantitatively qualitatively evaluated optical emission spectroscopy. Their action on surface has analyzed dynamic contact angle, revealing an improved wettability that attributed generation new...
Hall thrusters are E×B plasma devices characterised by a large azimuthal electron current, which is involved in the formation of wide variety instabilities on different frequency scales (from kilohertz to gigahertz) and propagating directions. We have focused limited number low-frequency that could be experimentally observed, such as breathing mode (BM) ion transit time oscillations (ITTO). There still gray areas understanding mechanisms behind these instabilities, often described...
SiO 2 is a well suited material for integrated optic applications and also attractive microelectromechanical system micro-optical electromechanical fabrication. Such optical components require deep oxide etching (several microns) subsequent high selectivity with respect to the mask. In this article, we describe influence of various process parameters (gas mixture, pressure, plasma power, residence time) on selective SiO2 Si in inductively coupled (ICP) fluorocarbon aim finding best...
In this paper, we analyse, by the use of different plasma diagnostics, appearance potential mass spectrometry (APMS), optical emission spectroscopy (OES) and Langmuir probe measurements, a commercialized ICP source devoted to etching SiO2 using Si mask. First, influence gas composition (C2F6 mixed with H2 or CH4) residence time (varying flow rate) on rates selectivity is studied optimize process. Second, in order improve understanding mechanisms, characterized according previous discharge...
This paper presents a systematic kinetic characterization of low pressure high power hydrogen plasma. The plasma physics is described with global model coupled to homogeneous for hydrogen. involves reactions which describe the vibrational and electronic excited kinetics H2, positive negative (H−) ion H chemistry. enables estimation particle density electron temperature their evolutions as function (1–100 kW) (0.3–4 Pa). These very specific conditions involve physical phenomena not occurring...
The density of neutral nitrogen atoms in a glass reactor was measured by two absolute methods: two-photon absorption laser induced fluorescence (TALIF) and catalytic probes. source N plasma created quartz tube surfatron microwave generator operating at 2.45 GHz adjustable output power up to 300 W. TALIF measurements were performed using dye which pumped YAG laser. At the exit laser, beam frequency doubled through KDP crystal then mixed BBO crystal. wavelength chosen 206.65 nm so suitable...
Etching mechanisms of silicon and oxide in a fluorocarbon environment are studied an ICP reactor. Optimization the process for deep etching SiO2 with Si mask has been discussed previous article. In this article, adequate plasma conditions chosen both (a) to allow separation parametric variables (b) get appreciable variation different surface experimental results versus parameters. Hence, pressure, source power, ion energy, subsequently flux kept constant. The influences gas composition...
The E–H mode transition and hysteresis in low pressure argon inductively coupled discharges are investigated using a global model transformer model. total absorbed power by the plasma coil current calculated as function of electron density at fixed RF injected rather than previously shown literature. We found that corresponds to difference efficiency between E H mode. calculation results show existence an inaccessible region well threshold minimum for Hysteresis is reproduced this simple can...
Cyclic formation of dust nanoparticles in hexamethyldisiloxane (HMDSO, Si2O(CH3)6)-argon RF discharge with pulsed injection HMDSO was studied using time-resolved mass spectrometry (MS) and optical emission spectroscopy (OES). A large amount C2H2, considered as promoter nucleation hydrocarbon plasmas, found a by-product fragmentation. Although no negative ions were detected the presence C2H2 HMDSO-Ar supports hypothesis growth mechanism based on being trapped plasma. It that at beginning each...
Hall thrusters are known to exhibit a large variety of instabilities. Their physical mechanisms have been identified at low (kHz) and intermediate (MHz) frequencies, even though they still not fully understood. Furthermore, electromagnetic radiations generated by thrusters, named “self-emission” the thruster, measured from kHz MHz as expected instabilities, but also higher frequencies. The origin high frequency (GHz) self-emission remains for now unknown. Assessing this self-emission, that...
Atomic nitrogen recombination probabilities (γN) are presented for different materials. They were obtained under late afterglow conditions through a comparison between local measurements of the atom density with two-photon absorption laser-induced fluorescence (TALIF) and calculations atomic concentration profiles in vicinity substrates. A is also made spatially resolved technique non-spatially one (based on optical emission spectroscopy) measurement N-atom concentration. For each studied...
We perform experiments in the Large Plasma Device at University of California, Los Angeles, studying how different end-electrode biasing schemes modify radial potential profile machine. impose profiles polarities and gradient signs on a set five concentric electrodes placed 12 m downstream from plasma source. find that imposing concave-down (negative gradient) creates halfway up column are comparable to those imposed few electron temperature height, regardless polarity. On other hand,...
Abstract The aim of this study was to evaluate the morphological characteristics and wetting properties polystyrene‐divinylbenzene (PS‐DVB) solid foams their modification through post‐discharge plasmas. low‐density are mainly macroporous, but show a small fraction mesopores; characterization revealed differences in topography between smoother surface rougher bulk, while from chemical point view both regions PS‐DVB hydrophobic. macroporous structure these materials with high pore volume makes...
In the duty-off period of a pulse-modulated inductively coupled plasma at low pressure (200 mTorr), both an increase in argon metastable densities and stronger highly excited state emission are observed by time-resolved optical absorption spectroscopy. To understand behavior Ar afterglow, simple time-dependent volume averaged global model is developed. The particle power balance equations applied to determine time evolution charged particles neutral dynamics. compare pressure-dependent...