A5073372121- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Piezoelectric Actuators and Control
- Acoustic Wave Resonator Technologies
- Geophysics and Sensor Technology
- Force Microscopy Techniques and Applications
- Advanced Algorithms and Applications
- Advanced Fiber Optic Sensors
- Photonic and Optical Devices
- Electronic Packaging and Soldering Technologies
- Advanced Surface Polishing Techniques
- Semiconductor materials and devices
- Traffic control and management
- Synthesis and properties of polymers
- Iterative Learning Control Systems
- Innovative Energy Harvesting Technologies
- Soft Robotics and Applications
- Integrated Circuits and Semiconductor Failure Analysis
- Advanced Sensor and Control Systems
- Luminescence Properties of Advanced Materials
- Mechanical Behavior of Composites
- Industrial Technology and Control Systems
- Vehicle emissions and performance
- Electric Vehicles and Infrastructure
- Epoxy Resin Curing Processes
Xihua University
2018-2025
China University of Geosciences
2024
Southwest Jiaotong University
2011-2016
Beijing University of Chemical Technology
2010
High-quality traveling waves in stators are critical for traveling-wave ultrasonic motors (TUSMs) to achieve good stability and efficiency. However, the modal splitting shape distortion that is induced by anisotropic elasticity induce severe wave distortion. In this study, mode optimization based on kirigami proposed suppress Initially, pattern inner boundary of stator was built linear interpolation. Subsequently, model orthogonal modes with even odd nodal diameters established. An extended...
The low temperature coefficient and high linearity of the input-output characteristics are both required for high-performance microelectromechanical systems (MEMS) capacitive accelerometers. In this work, a structural designing bulk MEMS accelerometer is developed linearity. Firstly, contrary effect wide-narrow gaps ratio (WNGR) on scale factor (TCSF) error discussed. Secondly, ability an improved structure that can avoid illustrated. proposed in our previous work reducing bias (TCB) TCSF....
The piezoelectric thin-film traveling-wave micro-motor based on the microelectromechanical systems (MEMS) process has advantages of compact size, easy integration and batch production. However, still exits a serious shortcoming very small output torque. This paper proposes novel lead zirconate titanate (PZT) motor with stator teeth to improve Firstly, theoretical analysis finite element simulations were performed determine design parameters teeth. device preparation is completed by combining...
The ultrasonic motors (USM) based on microelectromechanical systems (MEMS) technology utilize the inverse piezoelectric effects to drive rotor through friction force realize torque output. Therefore, generation of a stable traveling wave within stator is key USM performance, which heavily depends quality factor (Q) and mode match level resonator. current ring stators micromotor exhibited an apparent mismatch relatively low Q value due displacement constraints anchor loss supporting beams....
In this study, the drift of microelectromechanical system (MEMS) accelerometers stored at room temperature for one year is investigated by both finite-element analysis (FEA) simulation and experiments. simulation, a comprehensive FEA model considering die-attach adhesive viscoelasticity was established to emulate deformation sensor package structure during storage. Then models scale factor bias accelerometer were built according deformed structure. To validate results, several packaged their...
Abstract Adhesive polymer is a common and important material used for packaging of microelectronics microsystem by attaching dies onto shell, its mechanical property plays vital role in isolating from the thermal stress substrate. Therefore, it extremely significant to evaluate specific process. The molecular dynamics (MD) simulation conducted this article investigate properties cross‐linked epoxy resin formed component diglycidyl ether bisphenol A (DGEBA) curing agent 1,6‐Diaminohexane....
This study proposes a high-resolution rotation-measuring system for miniaturized MEMS ultrasonic motors using tunneling magnetoresistance (TMR) sensors the first time. Initially, architecture and principle of are described in detail. Then, finite element simulation is implemented to determine permanent magnet’s residual magnetization, dimensions, TMR sensor position. Finally, experiments evaluate performance. Using calibration based on high-precision servo motor, it found that relationship...
Vibration isolators are utilized to help large-area micromirrors survive in the AEC-Q100 test. The supporting platform of isolator, however, involves a larger area movable silicon sheeting and is hard be fabricated by direct etching due collapse adhesion caused thermal deformation. In this paper, an SOI-on-Glass (SOIOG) process proposed fabricate large with controllable air gap four flexible beams. Six sacrificial pillars introduced prop up center before structure release. Meanwhile, can...
In this work, the drifts of bias and scale factor induced by dielectric charging are studied for micro-electro-mechanical system (MEMS) closed-loop accelerometers. At first, equations feedback electrostatic forces, including built-in voltages resulted from charging, built up two capacitors Then, models both established. Based on experimental data, it is found that drift always negative because decrease factor. However, can be or positive in proportion to voltages' difference capacitors,...
The glass polarization effects were introduced in this paper to study the main cause of turn-on drift phenomenon closed-loop micro-accelerometers. substrate underneath sensitive silicon structure underwent a polarizing process when DC bias voltage was applied. slow induced an additional electrostatic field continually drag movable mass block from one position another so that sensing capacitance changed, which led output This indirectly tested by experiments and could be sharply reduced...