A5052658359- Plasmonic and Surface Plasmon Research
- Thermal Radiation and Cooling Technologies
- Graphene research and applications
- Gold and Silver Nanoparticles Synthesis and Applications
- Photonic and Optical Devices
- Photonic Crystals and Applications
- Quantum and electron transport phenomena
- Advancements in Photolithography Techniques
- Metamaterials and Metasurfaces Applications
- Medical Imaging Techniques and Applications
- Integrated Circuits and Semiconductor Failure Analysis
- Strong Light-Matter Interactions
- Electron and X-Ray Spectroscopy Techniques
- Silicon Nanostructures and Photoluminescence
- Terahertz technology and applications
- Neural Networks and Reservoir Computing
- Semiconductor materials and devices
ASML (United States)
2023
ASML (Netherlands)
2022
Institute of Photonic Sciences
2014-2018
The response of an electron system to electromagnetic fields with sharp spatial variations is strongly dependent on quantum electronic properties, even in ambient conditions, but difficult access experimentally. We use propagating graphene plasmons, together engineered dielectric-metallic environment, probe the liquid and unveil its detailed at short wavelengths.The near-field imaging experiments reveal a parameter-free match full theoretical description massless Dirac gas, which we identify...
Opto-electronic devices utilizing graphene have already demonstrated unique capabilities, which are much more difficult to realize with conventional technologies. However, the requirements in terms of material quality and uniformity very demanding. A major roadblock towards high-performance nanoscale variations properties, strongly impact macroscopic device behaviour. Here, we present apply opto-electronic nanoscopy measure locally both optical electronic properties devices. This is achieved...
Graphene sheets encapsulated between hexagonal Boron Nitride (hBN) slabs display superb electronic properties due to very limited scattering from extrinsic disorder sources such as Coulomb impurities and corrugations. Such samples are therefore expected be ideal platforms for highly-tunable low-loss plasmonics in a wide spectral range. In this Article we present theory of collective electron density oscillations graphene sheet two hBN semi-infinite (hBN/G/hBN). plasmons hybridize with...
The photoresponse of graphene at mid-infrared frequencies is high technological interest and governed by fundamentally different underlying physics than the visible frequencies, as energy photons substrate phonons involved have comparable energies. Here, we perform a spectrally resolved study for light measuring spatially photocurrent over broad frequency range (1000–1600 cm–1). We unveil mechanisms that give rise to generation in on polar substrate. In particular, find an enhancement when...
Photoexcitation of graphene leads to an interesting sequence phenomena, some which can be exploited in optoelectronic devices based on graphene. In particular, the efficient and ultrafast generation electron distribution with elevated temperature concomitant a photo-thermoelectric voltage at symmetry-breaking interfaces is interest for photosensing light harvesting. Here, we experimentally study generated photocurrent graphene-metal interface, focusing time-resolved photocurrent, effects...
As a two-dimensional semimetal, graphene offers clear advantages for plasmonic applications over conventional metals, such as stronger optical field confinement, in situ tunability, and relatively low intrinsic losses. However, the operational frequencies at which plasmons can be excited are limited by Fermi energy EF, practice controlled electrostatically only up to few tenths of an electronvolt. Higher energies open door novel devices with unprecedented capabilities, particularly...
Abstract Light properties in the mid-infrared can be controlled at a deep subwavelength scale using hyperbolic phonons-polaritons of hexagonal boron nitride. While propagating as waveguided modes concentrate electric field chosen nano-volume. Such behavior is heart many applications including subdiffraction imaging and sensing. Here we employ HPPs heterostructures nitride graphene new nano-optoelectronic platform by uniting benefits efficient hot-carrier photoconversion nature We demonstrate...
The ultimate limit of control light at the nanoscale is atomic scale. By stacking multiple layers graphene on hexagonal boron nitride (h-BN), heterostructures with unique nanophotonic properties can be constructed, where distance between plasmonic materials controlled atom-scale precision. Here we show how an atomically thick tunable quantum tunnelling device used as a building block for plasmonics. consists two separated by 1 nm (three monolayers) h-BN, and bias voltage generates electron...
Controlling, detecting and generating propagating plasmons by all-electrical means is at the heart of on-chip nano-optical processing. Graphene carries long-lived that are extremely confined controllable electrostatic fields, however electrical detection in graphene has not yet been realized. Here, we present an all-graphene mid-infrared plasmon detector, where a single sheet serves simultaneously as plasmonic medium detector. Rather than achieving via added optoelectronic materials,...
Here, we present novel aspects of infrared photocurrent and plasmonics in graphene, with a focus on understanding the physical mechanisms plasmon damping photovoltage creation [Badioli et al. 2014]. Both far-field near-field microscopy as well mapping are used to study nanoscale interactions between light, hot carriers excitations. We report record-high optical field confinement while maintaing relatively high quality factors (>30) [Woessner
Despite being crucial in an optical lithography process, "dose" has remained a relative concept the computational regime. It usually takes form of percentage deviation from pre-identified "nominal condition" under same illumination shape. Dose comparison between different shapes never been rigorously defined and modeled numerical simulation to date. On other hand, exposure-limited nature EUV throughput demands * shape optimized with physical dose impact consciously taken into consideration....
Improvements on on-cell overlay is necessary to suppress misalign induced defects. Precise and accurate measurements are strongly demanded, however, we facing limitations conventional CD-SEM based measurements, such as unexpected bias. To mitigate drawbacks of top view present voltage contrast (VCBO) which utilize specially designed cell patterns with combinations programmed misalignments scribe lanes, measured by defect inspection equipment, eP5 [1]. We successfully demonstrate the first...