- Transition Metal Oxide Nanomaterials
- X-ray Spectroscopy and Fluorescence Analysis
- Magnetic and transport properties of perovskites and related materials
- Advanced X-ray Imaging Techniques
- Electron and X-Ray Spectroscopy Techniques
- Photonic and Optical Devices
- ZnO doping and properties
- Gas Sensing Nanomaterials and Sensors
- Electronic and Structural Properties of Oxides
- Ga2O3 and related materials
- Advanced Statistical Process Monitoring
- Industrial Vision Systems and Defect Detection
- Advanced Electron Microscopy Techniques and Applications
- Quantum Information and Cryptography
- Manufacturing Process and Optimization
- Advanced Control Systems Optimization
- Advancements in Solid Oxide Fuel Cells
- nanoparticles nucleation surface interactions
- X-ray Diffraction in Crystallography
- Fault Detection and Control Systems
- Semiconductor Lasers and Optical Devices
- Advancements in Photolithography Techniques
- Nonlinear Optical Materials Studies
- Scientific Measurement and Uncertainty Evaluation
- Context-Aware Activity Recognition Systems
Gwangju Institute of Science and Technology
2016-2025
Sogang University
2025
Massachusetts Institute of Technology
1990-2015
Harbin Engineering University
2008
A modular framework for the implementation of process control in VLSI fabrication is described. The system integrates existing approaches to with new methodologies order achieve online optimization and unit processes consideration preceding following steps. based on three core modules. flexible recipe generator determines an initial operating point response a product design. run-by-run controller tunes between runs feedback from postprocess situ measurements. real-time further modifies...
Strontium titanate is a classic quantum paraelectric oxide material that has been widely studied in bulk and thin films. It exhibits well-known cubic-to-tetragonal antiferrodistortive phase transition at 105 K, characterized by the rotation of oxygen octahedra. A possible second lower temperature suppressed fluctuations, preventing onset ferroelectric order. However, recent studies have shown order can be established low temperatures inducing strain other means. Here, we used multireflection...
We present a 3D reciprocal-space mapping (RSM) method using pink self-amplified spontaneous emission (SASE) X-ray free-electron laser beam. The energy of each specific pulse in SASE beam can be determined the diffraction pattern specimen excited by pumping itself as spectroscopic reference. A thin slab RSM, whose thickness corresponds to bandwidth beam, is successfully reconstructed proposed method. By rocking sample few steps, we obtained RSM covering both diffuse scattering and Bragg rod...
2D nanoelectronics based on single-layer (SL) MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> offers great advantages for ubiquitous electronics. With new device technology, highly uniform E-mode FETs using SL CVD with positive VT, large mobility, excellent subthreshold swing are achieved. The integrated inverter shows voltage transfer characteristic, close to rail-to-rail operation, high noise margin, gain (~45) and small static...
The thermal conductivity (k) of poly(acrylic acid) (PAA) nanofibers, which were electrospun at various electrospinning voltages, was measured using suspended microdevices. While the conductivities as-spun PAA nanofibers varied depending on most pronounced 3.1-fold increase in comparison to that bulk observed voltage 14 kV. On other hand, a reduction when either thermally annealed glass transition temperature or crosslinked. It is notable crosslinked comparable PAA. Polarized Raman...
Single-crystal VO2 wires have gained tremendous popularity for enabling the study of fundamental properties metal–insulator transition (MIT); however, it remains tricky to precisely measure intrinsic transitional phases with controlled wire-growth properties, such as diameter. Here, we report a facile method growing diameters by separating formation liquidus V2O5 seed droplets from evolution wire using oxygen gas. The kinetic analyses suggest that growth proceeds via VS (vapor–solid)...
We report the observation of multiple laser thresholds in many-atom cavity QED microlaser. Traveling-wave coupling and a supersonic atom beam are used to create well-defined atom-cavity interaction. Multiple observed as jumps photon number due oscillatory gain. Although intracavity atoms is large, up $N\ensuremath{\sim}{10}^{3}$, dynamics microlaser agree with single-atom theory. This agreement supported by quantum trajectory simulations semiclassical discuss relation micromaser conventional lasers.
Free-standing thin nanoplates of Bi2Te3 and Bi2Se3 were synthesized by solvothermal method. It was demonstrated that the thickness can be controlled introducing a amount polyvinylpyrrolidone (PVP) in synthesis reaction. PVP bonds to polar basal planes hexagonal crystal structure Bi2Se3, they suppress growth (speed) crystals c-axis direction. Highly anisotropic yielded formation 2-dimensional nanostructures nanoplates. The plates examined directly with transmission electron microscopy (TEM)...
A modular framework is being used for the implementation of process control in VLSI fabrication. The function has been divided into three core modules: flexible recipe generator, run by controller and real-time controller. These modules act to divide up on basis time scale response range operating space encompassed. generator task taking best first guess about where begin operations, resulting a use new product. starts from provided then updates between product runs based post-process...
Summary form only given. The authors present an approach to process control in VLSI processing where the recipe is modified between every product run, based on measured results, order compensate for small drifts and shifts. This implemented run-by-run controller, which part of a system being developed at MIT. controller implements adaptive sequential design experiments. algorithmic basis run discussed with attention implementation statistical (SPC) charting concurrent control. Examples...
Photoinduced nonequilibrium phase transitions have stimulated interest in the dynamic interactions between electrons and crystalline ions, which long been overlooked within Born–Oppenheimer approximation. Ultrafast melting before lattice thermalization prompted researchers to revisit this issue understand ultrafast photoinduced weakening of crystal bonding. However, absence direct evidence demonstrating role orbital dynamics disorder leaves it elusive. By performing time-resolved resonant...
The correlation between the structural phase transition (SPT) and oxygen vacancy in SrRuO3 (SRO) thin films was investigated by situ X-ray diffraction (XRD) ambient pressure photoelectron spectroscopy (AP-XPS). In XRD shows that SPT occurs from a monoclinic SRO to tetragonal near ∼200 °C, regardless of environment. On other hand, significant core level shifts both Ru Sr photoemission spectra are found under ultrahigh vacuum, but not directions behavior shift attributed formation across...
Strontium titanate is a classic quantum paraelectric oxide material that has been widely studied in bulk and thin films. It exhibits well-known cubic-to-tetragonal antiferrodistortive phase transition at 105 K, characterized by the rotation of oxygen octahedra. A possible second lower temperature suppressed fluctuations, preventing onset ferroelectric order. However, recent studies have shown order can be established low temperatures inducing strain other means. Here, we used situ...
An approach to process control called generalized SPC which allows for the diagnosis of a while is being tuned discussed. A module, run by controller, that implements form adaptive based on sequential design experiments Statistical compared controller.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
As part of a system for process control, the run by controller implements form adaptive control based on sequential design experiments. The can be applied to local optimization, feedback and feedforward or processes in which multiple inputs output characteristics. Current work concerns application optimization thickness resistivity uniformity silicon epitaxy. Initial experiments investigate effect noise disturbances an AME 7800 barrel reactor indicate that is good candidate modeling using...
The application of direct inverse system in underwater vehicle's hovering is discussed this paper. dynamics model established based on it's peculiarity. accurate hard to be established, because the uncertainties hydrodynamic coefficients and coupling affects each degree freedom. For these problems, paper use Support Vector Machines (SVM) identify α th-order nonlinear offline static system. a feed-forward controller, it cascaded before original compose right-inverse with And then complex...