In order to compensate for the loss of performance when scaling resonant sensors down NEMS, it proves extremely useful study behavior resonators up very high displacements and hence nonlinearities. This work describes a comprehensive nonlinear multiphysics model based on Euler–Bernoulli equation which includes both mechanical electrostatic nonlinearities valid comparable gap in case an electrostatically actuated doubly clamped beam. Moreover, takes into account fringing field effects,...

This paper describes a comprehensive nonlinear multiphysics model based on the Euler–Bernoulli equation that remains valid up to large displacements in case of electrostatically actuated nanocantilevers. purely analytical takes into account fringing field effects which are significant for thin resonators. Analytical simulations show very good agreement with experimental electrical measurements silicon nanodevices using wafer-scale nanostencil lithography (nSL), monolithically integrated CMOS...

A multiphysics model of a hybrid piezoelectric–electromagnetic vibration energy harvester (VEH), including the main sources nonlinearities, is developed. The continuum problem derived on basis extended Hamilton principle, and modal Galerkin decomposition method used in order to obtain reduced-order consisting nonlinear Duffing equation motion coupled with two transduction equations. resulting system solved analytically using multiple time scales numerically by means harmonic balance...

We propose a multi-modal vibration energy harvesting approach based on arrays of coupled levitated magnets. The equations motion which include the magnetic nonlinearity and electromagnetic damping are solved using harmonic balance method with asymptotic numerical method. A multi-objective optimization procedure is introduced performed non-dominated sorting genetic algorithm for cases small magnet in order to select optimal solutions term performances by bringing eigenmodes close each other...

We report the experimental observation of a four-bifurcation-point (or five possible amplitudes for given frequency) behavior electrostatically actuated micromechanical resonators, called mixed (first hardening then softening) behavior. also demonstrate both analytically and experimentally tuning bifurcation topology this via an electrostatic mechanism. An analytical model allows qualitative as well quantitative explanation experiments serves simple tool design nonlinear devices under high drive.

In order to overcome mode aliasing limitation in linear mode-localized sensors, we demonstrate this Letter both theoretically and experimentally how tune the electrostatic nonlinearity exceed ultimate sensitivity reachable regime. A mass sensor composed of two coupled micro-cantilevers with different lengths is considered results show that can be significantly enhanced up 67%. By performing experiments on fabricated device depositing perturbation a focused ion beam, same phenomenon was...

In this paper, we propose a nonlinear multimodal vibration energy harvesting method using an array of coupled levitated magnets. This approach is validated with experimental prototype two The advantage device the combination benefits nonlinearities and modal interactions in order to enlarge bandwidth increase harvested power. At first, the governing equations are derived while considering magnetic nonlinearity electromagnetic damping. model includes also identified stiffness thanks specific...

Abstract A general model of a mode-localized mass sensor incorporating two weakly coupled clamped-clamped microbeams under electrostatic excitation is presented, and reduced-order considering quadratic cubic nonlinearities established. The multiple time scales method used to solve the dynamic characteristics resonators primary resonance, simultaneous superharmonic excitations, one-third resonance respectively, analyze contribution each harmonic term. It shown that can display softening,...

Dynamic stabilization by simultaneous primary and superharmonic resonances for high order nonlinearity cancellation is demonstrated with an electrostatically actuated, piezoresistively transduced nanomechanical resonator. We prove experimentally how the combination of both third-order can be used to linearly drive a nanocantilever up very large amplitudes compared fundamental limits like pull-in occurrence, opening way towards resonators frequency stability high-performance sensing or time reference.

The present paper investigates the implementation of energy localization phenomenon for enhancing output harvesting performance. Also in this paper, a linear electromagnetic vibration harvester with weakly-magnetic coupling is proposed. designed device two degree-of-freedom oscillators, which functionalizes via spring-magnet array. proposed concept made up moving magnets held by elastic springs and coupled repulsive magnetic force very low mechanical damping. achieved mistuning mass one...

A novel mode-localized acceleration sensor employing an electrostatically coupled resonator and integrating a lever with proof mass is micromachined using standard silicon on insulator (SOI) technology. In order to determine the linear dynamic range of sensor, reduced model developed while assuming that resonators vibrate below critical amplitude. Then, open-loop closed-loop testing platforms are established measure performance linearly operating accelerometer in vacuum environment (less...

Periodic chains of nonlinear oscillators are known to support solitonic solutions within a specific range physical parameters when damping effect is considered. This Letter investigates the dynamics stationary solitons in damped lattices under external excitation, focusing on influence impurities related natural frequency oscillators. We demonstrate experimentally and numerically that incorporating into externally driven periodic can expand stability diagram high-damping areas near Hopf...

Fast effects of a slow excitation on the main resonance nonlinear micromechanical resonator are analytically and experimentally investigated. We show, in particular, how bifurcation topology an undesirable unstable behavior is modified when simultaneously actuated at its primary superharmonic resonances. A stabilization mechanism proposed demonstrated by increasing excitation.