A5022725595- Advancements in Photolithography Techniques
- Analytical Chemistry and Sensors
- Electron and X-Ray Spectroscopy Techniques
- Biosensors and Analytical Detection
- Semiconductor materials and devices
- Innovative concrete reinforcement materials
- Integrated Circuits and Semiconductor Failure Analysis
- Heat Transfer and Boiling Studies
- Nanofluid Flow and Heat Transfer
- Advanced Surface Polishing Techniques
- Advanced Semiconductor Detectors and Materials
- Advanced Fiber Optic Sensors
- Phase Equilibria and Thermodynamics
- Nanopore and Nanochannel Transport Studies
- Advanced biosensing and bioanalysis techniques
- Heat Transfer Mechanisms
- Nanowire Synthesis and Applications
- Photonic and Optical Devices
- Microbial Applications in Construction Materials
- Fluid Dynamics and Thin Films
- Advanced X-ray and CT Imaging
- Heat Transfer and Optimization
- GaN-based semiconductor devices and materials
- Advanced Measurement and Metrology Techniques
- Radiation Detection and Scintillator Technologies
Chang'an University
2017-2022
Dalian University of Technology
2012-2021
Xi'an University of Architecture and Technology
2009-2011
Synopsys (United States)
2005-2006
Stanford University
1998-2004
Pattern placement imprecision due to charging of the workpiece is believed be a significant contribution total positional error in electron beam lithography. In an earlier work, Liu et al. [J. Vac. Sci. Technol. B 13, 1979 (1995)] reported that surface potential exposed resist could negative or positive according thickness and energy. work authors were constrained use flood beam. this study, we report new independent approach using Kelvin probe electrometer measure after exposure by focused...
An all glass optofludic biosensor with high quality-factor Fabry-Perot cavity (FPC) channel was reported. The sandwich structure can completely eliminate the etching roughness of surface, and extend operating wavelength to visible ultraviolet regions compared that Si-based sensor. FPC is 875, system noise be reduced 1.2 nV by combining optical differential detection phase lock-in detection. A limit 15ng/mL for glucose solution, which corresponds a refractive index unit 2.0 × 10-9,...
Abstract A high sensitive fiber-optic strain sensor, which consists of a cantilever, tandem rod and fiber collimator, was proposed. The rod, transfer the applied to used for tuning temperature sensitivity from −0.15 0.19 dB/°C via changing length ratio rods. Moreover, due small beam divergence can be realized incident-angle detection-mechanism. detection-range 1.1 × 10 3 με (with sensing 21.5 mm), detection limit 5.7 −3 με, maximum operating frequency 1.18 KHz were demonstrated. This sensor...
Abstract Trace analysis of liquid samples has wide applications in life science and environmental monitor. In this paper, a compact low-cost photometer based on metal-waveguide-capillary (MWC) was developed for ultra-sensitive absorbance detection. The optical-path can be greatly enhanced much longer than the physical length MWC, because light scattered by rippled smooth metal sidewall confined inside capillary regardless incident-angle. For with 7 cm long detection limit is improved ~3000...
Electron beam induced conductivity (EBIC) is one sensitive parameter that controls the charging of insulating materials under electron irradiation. In an earlier work [J. Vac. Sci. Technol. B 21, 2638 (2003)], we reported measurement EBIC in polymethyl methacrylate (PMMA) and thermal SiO2 thin films using external bias method. The test were sandwiched between a silicon substrate metal electrode. One important observation exposed region PMMA resist ohmic regardless polarity. However,...
Bandgap engineering is important for realizing high-performance semiconductor devices. In this paper, an investigation on the nanowire diode with a tapered InAs/InP core–shell structure was carried out. The strain distribution along can be changed via shell thickness and gradient of tapering. Due to misfit-strain between InAs/InP, strain-induced bandgap variation 0.21 eV InAs wire, which results in rectifying I–V characteristic diode, realized InP 6.5 nm. Moreover, due optimized built-in...
A multi-step annealing method was successfully applied to inclusions reduction and resistivity improvement of CdMnTe:In (CMT:In) single crystals with high resistivity, including a Cd atmosphere step followed by Te step. After the step, density reduced distinctly, it could be also decreased in subsequent re-annealing under atmosphere. Both IR transmittance notably after annealing, whereas they increased tremendously The full-width at-half-maximum (FWHM) increase intensity X-ray rocking curve...
In order to study various factor affecting durability of steel fiber reinforced concrete (SFRC), basic experimental research that combine the action freezing-thawing cycles and deicing salt SFRC was conducted. experiment, volume fraction number freeze-thaw circulation are taken as variable parameter. Based on different numbers circulation, weight losing SFRC, splitting strength dynamic modulus elasticity were measured. Furthermore, mechanism under analysed. The test results show after adding...
Electron beam charging and discharging of insulating samples is greatly influenced by electron induced conductivity (EBIC). Most prior studies on EBIC focused inorganic materials; measuring in organic resist was hampered high extrinsic leakage low conductivity. We describe here thin (1 μm) films poly(methylmethacrylate) (PMMA) thermal SiO2. The measurements were made using the external bias method, with film sandwiched between a metal electrode highly doped silicon substrate. Under same...
As an important resolution enhancement technique (RET), alternating aperture phase shift masks (AAPSM) has been widely adopted in 90 nm technology node and beyond. Mask topographical effect due to the 3D nature of shifter features is becoming increasingly factor lithography modeling. Rigorous modeling PSM very computationally demanding thus impractical for full chip optical proximity correction (OPC). Here we introduce alternative approach employing boundary layers effectively approximate...
In this paper, the mass loss test, relative dynamic elasticity modulus compressive strength thermogravimetric analysis (TGA-DTG), and mercury intrusion porosimetry (MIP) were used to study performance of cement-based materials with low water-binder ratio after sulfate attack, influence microsilica dosage erosion period on was also investigated. The results indicate that mixed can improve macro-properties material as is increased, improvement effect tends decrease an increase, while 15%, all...
Simulation of nanoscale thermo-fluidic transport has attracted considerable attention in recent years owing to rapid advances nanoscience and nanotechnology. The three- dimensional molecular dynamics simulations are performed for the system a liquid layer between two parallel solid walls at different wall temperatures. solid-solid interaction is modeled by embedded atom method. heat flux through solid-liquid interface calculated Green-Kubo effects wettability temperature on interfacial...
A method for synthesizing carbon-encapsulated metal nanoparticles(CEMNPs) is reported. In the proposed method, a composite precursors containing various nitrate dissolved in absolute ethanol ignited by nonelectric detonator nitrogen gas an explosion vessel. Upon completion of detonation reaction, CEMNPs (Fe@C, Ni@C, Co@C) with diameters ranging from few nanometers to about 20 nm are produced vessel.The material characteristics these nanoparticles then examined XRD, TEM, EDX and VSM, which...
In recent years, the concrete material subject to chloride corrosion which impacts greatly on durability of building project in marine or coastal environment has been reported repeatedly. With problems becoming more and serious, much attention paid it gradually. To improve structure environment, author tried add different content steel fiber into research permeability environment. Four volumes were selected prepare concrete. The dates proportion are as follows, 1)0.5%; 2)1%; 3)1.5%; 4)2%....
Immersion lithography has been regarded as the most viable contender to extend resolution capability of optical using 193nm wavelength. In parallel with tremendous effort overcoming engineering challenges in immersion, support from modeling and simulations is strongly needed. Although immersion simulation become available through a number tools, we need investigate model generation its compatibility within context full-chip proximity correction (OPC). this paper, will describe physics full...
Based on the fast freeze-thaw test in 3.5% NaCl solution, frost resistance of steel fiber reinforced concrete (SFRC) was studied this paper. On basis scanning electron microscope (SEM) and mercury intrusion method, microstructure pore structure SFRC analysed. The mechanism under cooperation solution discussed. results show that adding appropriate amount fibers into can reduce porosity improve compactness concrete. effects with proper volume fraction inhibit peeling its damage rate....