A5066250099- Advanced MEMS and NEMS Technologies
- Advanced Thermoelectric Materials and Devices
- Mechanical and Optical Resonators
- Gas Sensing Nanomaterials and Sensors
- Advanced Semiconductor Detectors and Materials
- Advanced Sensor Technologies Research
- Advanced Fiber Optic Sensors
- Advanced Thermodynamics and Statistical Mechanics
- Semiconductor Quantum Structures and Devices
- Geophysics and Sensor Technology
- Chalcogenide Semiconductor Thin Films
- Heat Transfer and Optimization
- Fluid Dynamics and Turbulent Flows
- Heat Transfer and Boiling Studies
- Acoustic Wave Resonator Technologies
- Phase-change materials and chalcogenides
- Advanced Sensor and Energy Harvesting Materials
- Topological Materials and Phenomena
- Nanowire Synthesis and Applications
- Silicon Nanostructures and Photoluminescence
- Semiconductor materials and devices
- Ferroelectric and Piezoelectric Materials
- Photonic and Optical Devices
- Particle Dynamics in Fluid Flows
- Thermal properties of materials
Institut d'Électronique et des Systèmes
2014-2024
Université de Montpellier
2015-2024
Centre des Matériaux
2024
Centre National de la Recherche Scientifique
2003-2023
Laboratoire d'Informatique, de Robotique et de Microélectronique de Montpellier
1998-2005
Centre Occitanie-Montpellier
1997
Abstract This article describes the design, calibration, and testing of new calorimetric microsensors for measurement wall shear stress in low-speed aerodynamic flows. The sensors are made three beams platinum-plated silicon nitride suspended over a small cavity. Their range operation their bandwidth order $$\pm 10$$ <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML"> <mml:mrow> <mml:mo>±</mml:mo> <mml:mn>10</mml:mn> </mml:mrow> </mml:math> Pa 1 kHz, respectively. Results from...
Thin semiconducting thermoelectric films with narrow energy band gaps are considered to be very promising for future microdevice applications (sensors and generators). The polycrystalline BiSbTe alloys (V–VI semiconductors) examples. In this report, the detailed temperature dependence of electrical resistivity [ρ(T)], n- p-type carrier concentration [n(T) p(T)], Hall mobility [μ(T)] n-type Bi2Te3, Sb2Te3, (Bi1−xSbx)2Te3 (x=0.73 0.77) alloy prepared by metalorganic chemical vapor deposition...
This paper describes numerical simulation of a micromachined thermal accelerometer and experimental measurements. The sensor principle consists heating resistor, which creates symmetrical temperature profile, two detectors symmetrically placed on both sides the heater. When an acceleration is applied, free convection modified, profile becomes asymmetric measure differential temperature. sensitivity according to distance heater–detector have been studied using resolution fluid dynamics...