A5077133118- Acoustic Wave Resonator Technologies
- Mechanical and Optical Resonators
- Advanced MEMS and NEMS Technologies
- GaN-based semiconductor devices and materials
- Photonic and Optical Devices
- Ferroelectric and Piezoelectric Materials
- Microwave Engineering and Waveguides
- Industrial Technology and Control Systems
- Gas Sensing Nanomaterials and Sensors
- Full-Duplex Wireless Communications
- Nanofabrication and Lithography Techniques
- Energy Harvesting in Wireless Networks
- Nanotechnology research and applications
- Wireless Body Area Networks
- Radio Frequency Integrated Circuit Design
- Wireless Power Transfer Systems
- Innovative Energy Harvesting Technologies
- Advanced Sensor and Energy Harvesting Materials
- Analytical Chemistry and Sensors
- Nanowire Synthesis and Applications
- Metamaterials and Metasurfaces Applications
- Quantum Chromodynamics and Particle Interactions
- Multiferroics and related materials
- Laser-Ablation Synthesis of Nanoparticles
- Underwater Vehicles and Communication Systems
Northeastern University
2016-2025
Scuola Normale Superiore
2024
Universidad del Noreste
2020-2024
Institute of Electrical and Electronics Engineers
2021-2023
University of Leeds
2021-2023
Ultrasonic Technologies (United States)
2021-2023
University of Waterloo
2021-2023
Drexel University
2021-2023
École Polytechnique Fédérale de Lausanne
2021-2023
Sorbonne Université
2023
Abstract State-of-the-art compact antennas rely on electromagnetic wave resonance, which leads to antenna sizes that are comparable the wavelength. As a result, typically have size greater than one-tenth of wavelength, and further miniaturization has been an open challenge for decades. Here we report acoustically actuated nanomechanical magnetoelectric (ME) with suspended ferromagnetic/piezoelectric thin-film heterostructure. These ME receive transmit waves through effect at their acoustic...
High sensitivity magnetoelectric sensors with their electromechanical resonance frequencies < 200 kHz have been recently demonstrated using magnetostrictive/piezoelectric heterostructures. In this work, we demonstrate a novel nano-electromechanical systems (NEMS) resonator an frequency of 215 MHz based on AlN/(FeGaB/Al2O3) × 10 heterostructure for detecting DC magnetic fields. This NEMS showed high quality factor 735 and strong coupling large voltage tunable sensitivity. The admittance the...
Abstract Over recent years, the surge in mobile communication has deepened global connectivity. With escalating demands for faster data rates, push higher carrier frequencies intensifies. The 7–20 GHz range, located between 5G sub-6 and mm-wave spectra, provides an excellent trade-off network capacity coverage, constitutes a yet-to-be-explored range 6G applications. This work proposes technological platform able to deliver CMOS-compatible, on-chip multi-frequency, low-loss, wide-band,...
This paper reports on the design and experimental verification of a new class thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for fabrication narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in lateral vertical to excite contour-extensional mode vibration nanofeatures an ultra-thin AlN film. In this first demonstration, 2-port vibrating up 4.5 GHz...
Abstract Ultrathin plasmonic metasurfaces have proven their ability to control and manipulate light at unprecedented levels, leading exciting optical functionalities applications. Although date mainly been investigated from an electromagnetic perspective, ultrathin nature may also provide novel useful mechanical properties. Here we propose a thin piezoelectric metasurface forming the resonant body of nanomechanical resonator with simultaneously tailored electromechanical We experimentally...
Abstract Metamaterial perfect absorbers (MPAs) are artificial materials composed of an array subwavelength structures that manipulate electromagnetic waves to achieve extraordinary light absorption properties. Driven by the advent Internet Things, MPAs employed in microelectromechanical systems for development efficient and miniaturized IR detectors, imagers, spectrometers, thanks their lithographically tunable peak absorption, spectral selectivity, ultrathin thickness. characterized high...
This paper demonstrates a new class of AlN-based piezoelectric resonators for operation in the microwave frequency range. These novel devices are identified as cross-sectional-Lamé-mode (CLMRs) they rely on transduction Lamé mode, cross section an AlN plate. Such 2-D mechanical mode vibration, characterized by motion along both lateral and thickness directions, is actuated sensed piezoelectrically through coherent combination e <sub xmlns:mml="http://www.w3.org/1998/Math/MathML"...
We report a highly sensitive NEMS DC/low frequency magnetic field sensor consisting of an AlN/FeGaB resonator, with ΔE effect-based sensing principle. Unlike previously reported detection schemes, such as observing induced magnetoelectric voltage, or monitoring impedance, we designed system to directly measure the reflected output voltage from function field. The resonator shows resonance shift 3.19 MHz (1.44%), which leads high DC sensitivity 2.8 Hz/nT and limit 800pT in unshielded, room...
Abstract In recent years, there has been an increased interest in continuous monitoring of patients and their Implanted Medical Devices (IMDs) with different wireless technologies such as ultrasounds. This paper demonstrates a high data-rate intrabody communication link based on Lithium Niobate (LN) Piezoelectric Micromachined Ultrasonic Transducers (pMUTs). The properties the LN allow to activate multiple flexural mode vibration only top electrodes. When operating materials like human...
This paper reports on the design and experimental verification of super high frequency (SHF) laterally vibrating nanoelctromechanical (NEMS) resonators. For first time, AlN piezoelectric nanoresonators with multiple frequencies operation ranging between 5 10 GHz have been fabricated same chip attained highest f-Q product (~4.6ldr10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">12</sup> Hz) ever reported in contour-mode devices. These NEMS...
This paper reports on the first demonstration of a reconfigurable complementary-metal-oxide-semiconductor (CMOS) oscillator based microelectromechanical system (MEMS) resonators operating at four different frequencies (268, 483, 690, and 785 MHz). A bank multifrequency switchable AlN contour-mode MEMS was connected to single CMOS circuit that can be configured selectively operate in states with distinct oscillation frequencies. The phase noise (PN) measured for each operation, showing values...
This paper demonstrates a miniaturized and high resolution (16 nT/Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> ) magnetometer based on frequency (168.1 MHz) magnetoelectric Microelectromechanical Systems-Complementary metal-oxidesemiconductor (MEMSCMOS) oscillator. For the first time, electromechanical performance (quality factor, Q ~ 1084 coupling coefficient, k <sub xmlns:xlink="http://www.w3.org/1999/xlink">t</sub>...
The use of micro-/nanoelectromechanical resonators for the room temperature detection electromagnetic radiation at infrared frequencies has recently been investigated, showing thermal capabilities that could potentially outperform conventional microbolometers. scaling device thickness in nanometer range and achievement high absorption such a subwavelength thickness, without sacrificing electromechanical performance, are two key challenges implementation fast, high-resolution resonant...
This article reports on 30% scandium-doped AlN (ScAlN) lateral field-excited (LFE) cross-sectional Lame' mode resonators (CLMRs) with unprecedented performance in the 6-20 GHz range. By combining high-crystallinity ScAlN piezoelectric thin films, a lithographic tunability of resonance frequency, and simple three-mask post-CMOS compatible fabrication process, we propose technology platform that can enable mass production low-loss, wideband, compact microacoustic filtering devices spanning...
This letter presents a miniaturized, fast, and high resolution thermal detector, in which heat absorbing element temperature sensitive microelectromechanical system (MEMS) resonator are perfectly overlapped but separated by microscale air gap. unique design guarantees efficient fast (∼10s μs) transfer from the to device enables power detection (∼nW), thanks low noise performance of quality factor (Q = 2305) MEMS resonant detector. A prototype was fabricated, its capabilities were...
Designing "ideal electrodes" that simultaneously guarantee low mechanical damping and electrical loss as well high electromechanical coupling in ultralow-volume piezoelectric nanomechanical structures can be considered to a key challenge the NEMS field. We show mechanically transferred graphene, floating at van der Waals proximity, closely mimics for ultrahigh frequency (0.2 GHz < f0 2.6 GHz) nanoelectromechanical resonators with negligible mass interfacial strain perfect radio electric...
This paper presents a new class of monolithic integrated RF passive components based on the recently developed aluminum nitride (AlN) MEMS cross-sectional Lamé-mode resonator (CLMR) technology. First, we experimentally demonstrate 920-MHz CLMR showing values electromechanical coupling coefficient (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) and quality factor (Q...
This paper reports on the first demonstration of a magnetic-free radio-frequency (RF) Microelectromechanical Resonant Circulator (MIRC). For time, non-reciprocity is achieved by imparting an effective angular momentum bias to MEMS resonant circuit. The efficiently realized through spatiotemporal modulation three strongly coupled high-Q (>1000) Aluminum Nitride (AlN) Contour Mode Resonators (CMRs) with signals same magnitude and phase difference 120 <sup...
This work presents a new acoustic MEMS resonator technology, dubbed Aluminum Nitride (AlN) Combined Overtone Resonator (COR), capable of addressing the filter requirements for 5G high frequency bands in 6-40GHz range. The COR exploits multimodal excitation two higher-order Lamb waves (2 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">nd</sup> and 3 xmlns:xlink="http://www.w3.org/1999/xlink">rd</sup> order Asymmetrical Waves) suspended thin-film...
Nano- and micro-electromechanical systems (N/MEMSs) are traditionally based on electrostatic or piezoelectric coupling, which couples electrical mechanical energy through acoustic resonator structures. Most recently, N/MEMS devices magnetoelectrics gaining much attention. Unlike that rely an AC electric field voltage excitation, magnetoelecric the electromechanical resonance of a magnetostrictive/piezoelectric bilayer heterostructure exhibiting strong strain-mediated magnetoelectric coupling...
This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). paper identifies challenges of frequency scaling ScAlN into mmWave and proposes stack new fabrication procedure with Sc0.3 Al0.7 N on Al Si carrier wafer. The achieves electromechanical coupling ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${k} ^{2}$...
This paper presents an experimental comparison of high-performance X-band piezoelectric 30% Sc-doped Aluminum Nitride (ScAlN) Cross-sectional Lamé Mode resonators (CLMRs) for two different thin-film's crystallinity levels. The presented MEMS devices stand out in terms electromechanical coupling $\left( {k_t^2} \right)$ and quality factor (Q) this frequency range, while being fabricated with a low-complexity 3-masks micro-machining process. Nevertheless, the employing higher film feature...
Abstract Optical frequency combs, featuring evenly spaced spectral lines, have been extensively studied and applied to metrology, signal processing, sensing. Recently, comb generation has also extended MHz frequencies by harnessing nonlinearities in microelectromechanical membranes. However, the of combs at radio (RF) less explored, together with their potential application wireless technologies. In this work, we demonstrate an RF system able wirelessly passively generate combs. This...
We present a comprehensive study of dielectric properties including complex permittivity, loss, and leakage high-ScN-fraction ScAlN thin films grown using molecular beam epitaxy (MBE). Dielectric spectroscopy is carried out on (30%-40% ScN fraction) samples from 20 Hz to 10 GHz. find that real permittivity {\epsilon}' increases significantly with increasing fraction; trend confirmed by density functional theory. Further, strongly dispersive frequency fraction, values for Sc0.4Al0.6N varying...