The embedded ultra-precision displacement measurement is of great interest in developing high-end equipment as well precision metrology. However, conventional interferometers only focus on accuracy neglecting the sensor volume and requirement measurement, thus hindering their broad applications. Here we present a new sensing method for realizing large-range narrow space scenarios based combination fiber microprobe interference-sensing model phase-generated carrier. This achieved by...

In order to further improve the lateral resolution required for ultraprecision measurement of discontinuous surface contours, a new laser heterodyne confocal probe (LHCP) has been proposed use in making bipolar absolute measurements. The follows principle reflection microscopes (RCM), and uses property RCM light intensity curves being almost invariant with offset pinhole. It also path arrangement normalization technique linearity suppress common-mode noise caused by disturbance source...

Lateral resolution in confocal microscope is limited by the size of pinhole. In this paper, we attempt to introduce a new method achieve structured detection through using spatial light modulator (SLM) improve it. SLM modulates Airy disk amplitude distribution according function collection arm. Instead CCD capture spot images and modulate them with numerical analysis virtual (VSD), uses accomplish these aims higher imaging rates. Based on simulation experiment results, it can be found that...

We propose an elliptical mirror-based total-internal-reflection fluorescence (e-TIRF) microscopy with shadowless illumination and adjustable penetration depth. The mirror is used to produce a hollow-cone all azimuthal directions large range of incident angle, so as attenuate the potential shadow effects when utilizing single-direction illumination, such asymmetries low contrast. experiment demonstrates that e-TIRF method can realize imaging symmetric intensity distribution. Meanwhile, depth...

A new scheme of super-resolution optical fluctuation imaging (SOFI) is proposed to broaden its application in the high-order case by separating elimination shot noise from computation cumulant, applying low-pass denoising (LPD) operator SOFI. The cumulants are derived a basic recursion moments with suppression LPD on raw data. SOFI based (LPD-SOFI) demonstrates 10.6-fold lateral resolution enhancement cumulant order 16th and seven-fold three-dimensional 10th experiments performed sparse...

A novel low-nonlinearity Michelson microprobe fiber interferometer against light intensity disturbance for high-precision embedded displacement measurements is introduced. To analyze the influence of on and measurement accuracy integrated interferometer, an equivalent model micro-probe sensing with tilted target established. The proposed PGC demodulation nonlinearity correction method simple principle helps avoid DC component varying intensity. experiments show that residual errors are...

An active negative stiffness regulation and precision micro-vibration isolation technology (ANSVIT) based on composite feedback of acceleration velocity is proposed to realize the low-frequency air floating isolators with heavy loads. Adjustable generated by realizes isolation, absolute combined reduce peak vibration transmissibility improve performance. The effects coefficients in frequency domain are analyzed dynamics model. And relationship that achieves low natural lower than passive...

Vapor cells as the key part of chip-scale atomic clocks determine their volume stability and power consumption. Micro-fabrication, especially cavity packaging, is challenging. In this paper, micro-fabricated rubidium vapor are fabricated Au-In TLP bonding with asymmetric metal configuration proposed designed to package wafer-scale cell chips at a low processing temperature 200 °C. Tests show that intermetallic compounds AuIn2 AuIn uniformly formed in interlayer, indicating bonded interlayer...

To produce a standard ultra-low frequency vibration waveform for calibration with an electromagnetic vibrator is challenging, because of its tiny driving force and low signal-to-noise ratio. This paper presents model-free compensation method the micro-disturbance vibrator, which mainly originates from nonlinear forces generated by bending or tensioning pipes wires. The influence on system analyzed to extract disturbance current without estimating equivalent model compensated in input. Thus...

As process nodes of advanced integrated circuits continue to decrease below 10 nm, the requirement for overlay accuracy is becoming stricter. The alignment sensor measures position mark relative wafer; thus, sub-nanometer vital. Phase Grating Alignment (PGA) method widely used due its high precision and stability. However, error caused by asymmetry key obstacle preventing PGA technology from achieving accuracy. This can be corrected using many methods, such as verification multi-channel...

The axial beam scanning in confocal microscopy has been implemented using liquid crystal spatial light modulator (LC-SLM). A zoom illuminating lens is realized by introducing LC-SLM into the illumination path, and thus it shifts focus of objective axially. optical sectioning a conventional microscope hereby achieved rather than mechanically moving lens. shift changing modulation phase bitmaps LC-SLM. By electrically controlling LC-SLM, demonstrated that can direction continuously over 100μm...

A new method is proposed in this paper to improve transverse resolution of a confocal microscope. By setting up the model microscope system through spatiotemporal modulation with moving gratings or acousto-optical without defocus distance under coherent light illumination and deducing two-dimensional image formula transfer function, simulation tests are run prove effectiveness method. Simulation results indicate can be used system.

To improve the imaging speed of a confocal microscope with virtual structured detection, we have designed an optical system rigid coordination control CCD, galvanometer scanner, and laser diode. In this system, width coherent transfer function expands, which enhances lateral resolution by factor 1.4. Also, temporal image sequence is transformed to spatial one so that multiple images can be acquired during single exposure period CCD. This method increases 25-fold at least, even higher...

The resolution of optical microscopy fundamentally limited by diffraction is at best 200 nm. Super-resolution structured illumination (SR-SIM) provides an elegant way overcoming the limit in conventional widefield microscope superimposing a grid pattern generated through interference orders on specimen while capturing images. use non-uniform field "shift" high frequencies which are out-ofband into pass-band spatial frequency mixing with field. Therefore effective bandwidth SR-SIM...

Linearity and resolution of current drivers are two factors that limit control accuracy dynamic response linear electromagnetic actuators in precision active semi-active micro-vibration isolation systems. In this paper, a high linearity bidirectional driver with resolution, AC ripple stability the order μA is proposed. Complementary power MOSFET used to produce over-current protecting circuit amplitude output prevent from damaging load resistance. Design heat dissipation theoretically...