A5001930681- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Sensor Technology and Measurement Systems
- Acoustic Wave Resonator Technologies
- Shape Memory Alloy Transformations
- Advanced Measurement and Metrology Techniques
- Advanced Sensor and Energy Harvesting Materials
- Metal and Thin Film Mechanics
- Gas Sensing Nanomaterials and Sensors
- Geophysics and Sensor Technology
- Semiconductor materials and devices
- ZnO doping and properties
- Innovative Energy Harvesting Technologies
- Diamond and Carbon-based Materials Research
- Seismic Waves and Analysis
- Pulsars and Gravitational Waves Research
- Electrical and Thermal Properties of Materials
- Advanced Nanomaterials in Catalysis
- GaN-based semiconductor devices and materials
- Analytical Chemistry and Sensors
- Nanoplatforms for cancer theranostics
- Ferroelectric and Negative Capacitance Devices
- High Entropy Alloys Studies
- Microfluidic and Capillary Electrophoresis Applications
- Geophysics and Gravity Measurements
National Metallurgical Laboratory
2023-2024
Bhabha Atomic Research Centre
2015-2024
University of Glasgow
2022-2024
Indian Institute of Technology Bombay
2020-2021
Homi Bhabha National Institute
2016-2019
Three types of piezoresistive pressure sensors were designed and fabricated using different process technologies incorporating standard diffused piezoresistors, oxide isolated polysilicon or single crystal silicon piezoresistors. The performance these up to an elevated temperature 200°C 140 bar was investigated by measuring the variation sensitivity, offset voltage hysteresis. At room temperature, piezoresistor based sensor demonstrated sensitivity 0.147 mV/V/bar it observed operate maximum...
Wide band gap materials such as silicon carbide and diamond are considered more suitable compared to for the fabrication of piezoresistive pressure sensors operation at high temperatures. We have carried out extensive FEM simulation study theoretically assessing response incorporating these wide materials. Response micromachined diaphragm with oxide isolated piezoresistors or was studied using simulations. The further extended well carbide. results in both cases were those obtained a single...
We have carried out experimental investigation of the effect gamma radiation on performance piezoresistive pressure sensors realized using different fabrication processes. These processes included standard diffused piezoresistor process, silicon-on-insulator (SOI) wafer based and polysilicon process. The were irradiated in a <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">60</sup> Co chamber up to total dose 30 Mrad(Si). characterized after...
This paper describes a technique for temperature sensitivity or thermal sag measurements of geometric anti-spring based microelectromechanical system (MEMS) gravimeter (Wee-g). The Wee-g MEMS is currently fabricated on (100) silicon wafer using standard micro-nano fabrication techniques. behavior indicates that the Young's modulus decreases with increase in (∼64 ppm/K). leads to softening material, resulting proof mass displacing (or sagging) under influence increasing temperature. It...
Micro Hotplates are extensively used in chemical sensor, flow sensor and other micro systems. In this paper, we have presented the design, modeling simulation results of serpentine, spiral fan shape heaters based on standard Multi User MEMS Process for fabrication a multi product wafer run. The heater structure was optimized to get good temperature homogeneity, low power consumption better thermal isolation. Considering type with non-uniform width observed be best choice among three types geometries.
A single-axis Microelectromechanical system gravimeter has recently been developed at the University of Glasgow. The sensitivity and stability this device was demonstrated by measuring Earth tides. success enabled in part its extremely low resonant frequency. This frequency achieved with a geometric anti-spring design, fabricated using well-established photolithography dry etch techniques. Analytical models can be used to calculate results these non-linear oscillating systems, but power...
This research article presents an atomistic study on the cyclic nanoindentation of equimolar-ratio Co–Mn–Fe–Cr–Ni high-entropy alloy (HEA) using molecular dynamics simulation. The investigated effects indentation depth load versus HEA. results showed that response exhibits a pronounced shift towards plasticity with pile-up formation instead sinking behavior at higher depths. Within realm simulations, simulated hardness value reached up to 16 GPa for initial cycle. A steep drop in...
In this work, the effect of temperature change and fabrication tolerances observed from fabricated devices for a geometric anti-spring (GAS) based Microelectromechanical Systems (MEMS) gravimeter is modelled using Finite Element Analysis (FEA). The temperature-induced effects are analysed in terms coefficient deflection (TCD) GAS flexures varying cross-section profiles. simulated models suggest that maximum TCD at minimum stiffness operating points flexures. also cross-sectional shape...
Finite element analysis study has been carried out to optimize the design parameters for bulk micro-machined silicon membranes piezoresistive pressure sensing applications. The is targeted measurement of up 200 bar nuclear reactor mechanical behavior in terms deflection and stress generation simulated. Based on simulation results, optimization membrane length, width thickness out. Subsequent geometrical parameters, dimensions location high concentration region implantation piezoresistors...
This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is used in variety microsystems, including microphones pressure sensors. It highlights empirical relations can be utilized diaphragm-based microsystems (TDMS). Design developed through Finite Element Analysis (FEA) limit iterative efforts to fabricate TDMS. These are validated analytically, with assumption material properties isotropic, deviation from anisotropic calculated. In FEA simulations,...