K. Satō

ORCID: 0000-0003-2252-2785
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About
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Research Areas
  • Advanced MEMS and NEMS Technologies
  • Advanced Surface Polishing Techniques
  • X-ray Diffraction in Crystallography
  • Crystallization and Solubility Studies
  • Nanowire Synthesis and Applications
  • Semiconductor materials and devices
  • Thin-Film Transistor Technologies
  • Carbohydrate Chemistry and Synthesis
  • Metabolism and Genetic Disorders
  • Advanced Sensor and Energy Harvesting Materials
  • Amino Acid Enzymes and Metabolism
  • Electrowetting and Microfluidic Technologies
  • Neuroscience and Neuropharmacology Research
  • Acoustic Wave Resonator Technologies
  • Microfluidic and Capillary Electrophoresis Applications
  • Force Microscopy Techniques and Applications
  • Analytical Chemistry and Sensors
  • Silicon and Solar Cell Technologies
  • Mechanical and Optical Resonators
  • Plasma Diagnostics and Applications
  • Innovative Microfluidic and Catalytic Techniques Innovation
  • Conducting polymers and applications
  • Advancements in Semiconductor Devices and Circuit Design
  • Tactile and Sensory Interactions
  • Microbial Metabolic Engineering and Bioproduction

Kobe University
2023

Okayama University
2017-2021

Shimane University
2020

Tokyo University of Pharmacy and Life Sciences
2017

Aichi Institute of Technology
2013-2014

Chiba University
1996-2014

Nagoya University
2004-2013

Kumamoto University
1999-2013

Kyushu University of Nursing and Social Welfare
2007-2013

Systems Biology Institute
2012

Electrical resistivities of heavily doped polyacetylene and polypyrrole exhibit a wide range temperature variation as function the degree disorder. Thermal activation behavior is found for strongly disordered state, while weak dependence down to mK region weakly state. In intermediate we resistivity represented by logT dependence, in manner similar amorphous metals. As cause possibility scattering via interaction with molecular configurations possessing low-energy internal degrees freedom considered.

10.1103/physrevlett.69.660 article EN Physical Review Letters 1992-07-27

This review-oriented paper presents a simplified model of anisotropic etching crystalline silicon for the three principal orientations (1 1 1), 0) and 0 0), including their vicinal surfaces. The combines pit nucleation step flow with micromasking diffusion phenomena in order to explain major morphologic features changes concentration. It also qualitatively explains orientation concentration dependence etch rate. We conclude that shallow round pits on elongated zigzag structures each which...

10.1088/0960-1317/17/4/s01 article EN Journal of Micromechanics and Microengineering 2007-03-20

10.1016/s0022-3093(97)00241-x article EN Journal of Non-Crystalline Solids 1997-09-01

This paper reports on the results of comparing different types tensile testing methods that are used to evaluate thin-film properties. We tested same material fabricated a single wafer using techniques at five research institutions. The were in way specimen was gripped. Materials single-crystal silicon (SCS), polysilicon, nickel, and titanium films. Specimens with three shapes processed through fabrication steps. strength, fracture strain, Young's modulus films measured compared. values...

10.1109/jmems.2005.851820 article EN Journal of Microelectromechanical Systems 2005-10-01

We combine spectroscopic ellipsometry (SE), Fourier transform infrared spectroscopy (FT-IR), kinetic Monte Carlo simulations (KMC) and convex corner undercutting analysis in order to characterize explain the effect of addition small amounts surfactant alkaline aqueous solutions, such as Triton X-100 tetra methyl ammonium hydroxide (TMAH). propose that is adsorbed at silicon–etchant interface a thin layer, acting filter moderates surface reactivity by reducing amount reactant molecules reach...

10.1088/0960-1317/19/12/125011 article EN Journal of Micromechanics and Microengineering 2009-10-22

This paper focuses on two aspects, <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">macroscopic and microscopic</i> , of pure surfactant-added tetramethylammonium hydroxide (TMAH) wet etching. The macroscopic aspects deal with the technological/engineering applications TMAH for fabrication microelectromechanical systems (MEMS). microscopic view is focused xmlns:xlink="http://www.w3.org/1999/xlink">in situ</i> observation silicon surface during...

10.1109/jmems.2009.2031688 article EN Journal of Microelectromechanical Systems 2009-10-22

Summary YM-60828 was found to potently inhibit human factor Xa following oral administration. showed high affinity for (Ki = 1.3 μM), but did not affect thrombin &gt; 100 μM). doubled clotting time, prothrombin time (PT) and activated partial thromboplastin (APTT) at 0.10, 0.21, 0.24 μM, respectively. Importantly, it prolong μM. also inhibited in the prothrombinase complex with an IC50 value of 7.7 nM. In addition its anticoagulant activity, platelet aggregation induced by various agonists...

10.1055/s-0037-1614941 article EN Thrombosis and Haemostasis 1998-01-01

In order to overcome the limitation of cell area 4F/sup 2/ per bit in conventional NAND flash memory cells, stacked-surrounding gate transistor (S-SGT) structured is proposed. This newly achieves a 2//N bit, where N number stacked cells one silicon pillar, without using multibit technology. The S-SGT consisting two pillar less than 50% smallest reported cell. novel are fabricated by vertical self-aligned processes 0.2 /spl mu/m design rule. can be programmed and erased uniform injection...

10.1109/ted.2003.809429 article EN IEEE Transactions on Electron Devices 2003-04-01

The fabrication of micro- and nanoelectromechanical systems (MEMS/NEMS) is based on a wide variety growth etching technologies sequentially applied throughout process flows which may involve dozen or more steps, their realistic simulation having become an essential part the overall design. By focusing in anisotropic as complex example microfabrication, this paper, we show how to solve analytically time evolution continuous cellular automaton method, thus providing particularly suitable...

10.1109/jmems.2008.916339 article EN Journal of Microelectromechanical Systems 2008-04-01

Ultrafast fluorescence quenching of flavin in flavodoxin from Megasphaera elsdenii was investigated by means a up-conversion method. Fluorescence lifetimes M. were estimated to be τ1 ∼ 165 fs (0.97%) and τ2 10 ps (0.03%). Correlation photoinduced electron-transfer rates (kET) with averaged distances (Dav) between isoalloxazine nearby tryptophan or tyrosine examined obtained an empirical equation ln kET vs Dav nonlinear least-squares method using reported data together elsdenii. The values...

10.1021/jp066450g article EN The Journal of Physical Chemistry B 2007-05-01

We developed a novel catheter-type flow sensor for measuring the aspirated- and inspired-air characteristics trans-bronchially. An on-wall in-tube thermal is mounted inside tube, it used as measurement tool in bronchoscope. The external diameter of tube less than few mm, therefore, can evaluate small bronchial region. newly fabrication process to miniaturize 2.0 mm by using heat shrinkable tube. A film fabricated photolithography was inserted into hand. By applying shrinking process,...

10.1088/0960-1317/19/10/105027 article EN Journal of Micromechanics and Microengineering 2009-09-22

In this work, the orientation-dependent adsorption of surfactant molecules on silicon surface during etching in surfactant-added tetramethylammonium hydroxide (TMAH) is investigated. Triton X-100 (C14H22O(C2H4O)n, n = 9–10) and 25 wt% TMAH are used as main etchant, respectively. The crystallographic planes affected by determined analyzing behavior different mask patterns Si{1 0 0} wafers hemispheres pure TMAH. Taken together, shapes etched profiles analysis hemispherical etch rates confirm...

10.1088/0960-1317/21/1/015008 article EN Journal of Micromechanics and Microengineering 2010-12-15

A new microvalve actuator driven by electrostatic force is described and shown to be suitable for controlling the flow of a rarefied gas. The consists pair planar electrodes sandwiching conductive film that has an S-shaped bend in middle. S-bend moves back forth as voltage alternately applied between each film. manually assembled macromodel having 5 mu m thick 12 mm wide operated separated 2.5 mm. propagation speed 4.0 s-1 at 150 V. large vertical displacement enables valve seat lift...

10.1088/0960-1317/4/4/005 article EN Journal of Micromechanics and Microengineering 1994-12-01

A new type of micro fingerprint sensor was proposed and the sensing principle demonstrated using heaters as elements. The arrayed elements were resistors made sputtered 200 nm thick platinum film on a 50 µm flexible polyimide substrate. temperature coefficient resistance 0.0029 (K−1) showed good linearity. Because small thermal capacity effective isolation, heater high sensitivity short response time to applied power. By applying pulsed voltage 5.4 V at ambient air, could be increased from...

10.1088/0960-1317/15/2/006 article EN Journal of Micromechanics and Microengineering 2004-11-16
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