We investigated low-hydrogen SiN films prepared by a low temperature (350 degrees C) PECVD method. The impact of SiH(4)/N(2) flow ratio and radio frequency power on the hydrogen content in was studied. In this work, we demonstrated low-loss sub-micron waveguide using corresponding optimal films. propagation loss found to be as -2.1+/-0.2 dB/cm at 1550 nm with cross-section 700 x 400 nm. results suggest that grown can used photonics integrated circuits for new generation communications applications.

We propose a concept of high-order mode (HOM) pass filter based on the inverse-designed mode-routing, which enables an ultra-compact footprint and broad bandwidth. To validate concept, we experimentally demonstrate two types HOM filters using direct-binary search topology optimization algorithm. In first filter, mode-routing region is constructed adiabatic coupler, while second utilizes tapered asymmetric directional coupler. The subwavelength units functional regions both have 4 µm × 800...

A broadband silicon four-mode (de)multiplexer [(De)MUX] is proposed and experimentally demonstrated based on subwavelength gratings (SWGs)-assisted triple-waveguide couplers (TWCs), which can (de)multiplex TE <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0</sub> , xmlns:xlink="http://www.w3.org/1999/xlink">1</sub> xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> modes. The mode interaction...

To improve the flexibility of mode division multiplexing (MDM) system, we propose and experimentally demonstrate a splitter by using inverse design method. The proposed has an ultra-compact footprint 5 × 3 µm 2 , functional region occupies only 1 . optimized can separate TE 0 modes without changing order. When transmitting mode, measured insertion loss crosstalk are 2.14 dB −13.34 dB, respectively, at operating wavelength 1550 nm. 3-dB bandwidth is &gt;66 nm, lower than −12.37 over C + L...

We propose a relay ring resonator structure which comprises multiple cascaded microring resonators, in the drop waveguide of is also input subsequent resonator, and so forth. Thus, transmission response has sharp peaks, high out-of-band rejection ratios, long group delays. A comprising 90 microrings fabricated on silicon nitride wire waveguides. The simulation experimental results are good agreement.

A mode multiplexer/demultiplexer (MUX/DeMUX) is a crucial component for constructing mode-division multiplexing (MDM) systems. In this paper, we propose and experimentally demonstrate wide-bandwidth highly-integrated MUX/DeMUX based on an inverse-designed counter-tapered coupler. By introducing functional region composed of subunits, efficient conversion evolution can be achieved, greatly improving the efficiency. The optimized has size only 4 µm × 2.2 µm. An MDM-link consisting MUX DeMUX...

A broadband three-dimensional (3D) mode (de) multiplexer [(De)MUX] is proposed based on the subwavelength grating (SWG) for 3D photonic integrated circuits (PICs). The (De)MUX consists of three SWG waveguides two vertical layers. coupling strength and operating bandwidth can be increased benefitting from both structure offset between bus access SWGs. optimized full-vectorial finite difference time domain method. 1-dB bandwidths device are over <mml:math...

A compact vertical coupler is proposed and optimized based on the multi-phase matching for three-dimensional (3D) mode (de)multiplexing [(De)MUX]. The conditions can be achieved operating TE2, TE1, TE0 modes of subwavelength grating-based waveguide. coupling strength significantly increased due to structure. 3D (De)MUX by utilizing full-vectorial finite difference time domain method. achieve lengths only 0.25 1.75 μm demultiplexing TE1 TE2 modes. insertion losses are 0.25, 0.27, 0.13 dB,...

To satisfy the demand for communication capacity, Mode Division Multiplexing (MDM) technique has been proposed as an emerging and promising technique. Silicon-based MDM system attracted more attention due to high contrast refractive index between silicon silica. We have a mode converter, which is significant system. The direct binary search (DBS) algorithm 3D full-vectorial finite difference time domain (3D-FV-FDTD) used optimize converter. also fabricated converter with compact footprint of...

A higher-order mode (HOM) pass filter is a key component in on-chip mode-division multiplexing (MDM) systems, enabling mode-selective transmission. In this study, highly integrated silicon-based HOM proposed based on "mode-scattering evolution." The consists of functional region and input/output waveguides, with compact footprint only 2 µm × 9 achieved through an inverse design. Experimental results demonstrate that the fabricated exhibits insertion loss 2.11 dB crosstalk -10.63 at 1550 nm....

Silicon-based mode (de)multiplexer [(De)MUX] is a key component in on-chip mode-division multiplexing (MDM) systems. Here, we propose an ultra-compact (De)MUX based on the inverse-designed adiabatic coupler with footprint of only 4 μm × 1.25 μm. By combining mode-evolution and subunit array, strength interaction can be greatly enhanced, device length achieved. Using direct binary search (DBS) algorithm, two types (De)MUXs are circular square arrays, respectively. Experimental results show...

This work reports a detailed study of hydrogen bonds in the silicon nitride (SiN <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> :H) thin films. Plasma-enhanced chemical vapor deposition was used to produce films under different values gas flow ratio and radio frequency power, which SiH xmlns:xlink="http://www.w3.org/1999/xlink">4</sub> N xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> as precursors. Hydrogen content have been...

With the need for further increase in communication capacity, mode division multiplexing (MDM) technology has become a more promising technical approach. In this paper, we perform an experimental demonstration of subwavelength grating assisted on-chip silicon MDM-link. The device is fabricated on silicon-on-insulator with 220-nm thick and silica cladding. length entire MDM-link less than <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML"...

An on-chip silicon polarization-division multiplexing link assisted with triple-waveguide couplers is proposed and experimentally demonstrated on a silicon-on-insulator platform. It consists of polarization beam splitter, trunk waveguide, combiner. The coupling strength can be reinforced the help middle waveguide. device optimized 7 µm length, insertion losses 0.12 0.64 dB, extinction ratios 31.2 15 dB for TM TE polarizations, respectively, at 1550 nm. fabrication tolerances are also...

High-sensitivity silicon few-mode microring resonators (MRRs) are proposed and designed for temperature sensing. The structures consist of a single-mode bus waveguide multimode ring waveguide. According to the phase-matching condition, MRRs with three different radii high-order TE <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1</inf> mode operating. large free spectral range (FSR) 24.9 nm, 15.6 7.76 nm achieved at 3, 5, 10 µm, respectively....

Hydrogen component in SiN films synthesized using plasma enhanced chemical vapor deposition at low temperature (350°C) silane and nitrogen was studied by Fourier transform infrared spectrum. The effects of the SiH <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> /N xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> flow ratio radio frequency power on hydrogen components were investigated. Some sub-micron (400nm×700nm) waveguides...