Abstract Silicon oxynitride (SiO x N y ) thin films were synthesized via reactive direct current magnetron sputtering under different gas mass flow ratios (O 2 :N and discharge powers. The process was monitored by optical emission spectroscopy (OES), while spectroscopic ellipsometry used to characterize the properties of deposition rates. In this work, plasma generated parameters is analyzed monitoring lines species (Si I, Ar O , these results are then correlated with corresponding target...

The evolution of plasma composition, electron temperature and deposition rates high-power impulse magnetron sputtering (HIPIMS) a titanium target have been studied by optical emission spectroscopy on crystal oscillator, for pulse lengths 50 µs 100 over range voltages. observations indicate strong power dependence the populations Ti1+ ions with respect to Ti neutrals. A clear saturation point is seen, while more highly ionized species increase, even at constant temperature. creation follows...

Orthogonal double pulse laser ablation on aluminum target at atmospheric pressure was studied by time-resolved optical emission spectroscopy, shadowgraphy and two-color interferometry. Studies were realized as a function of the distance from first plasma induced in air to sample surface. The evolution electron neutral particles densities determined Line intensification mechanisms are discussed based interferometry results plumes interaction dynamics. It found that heating preablation could...

Views Icon Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Twitter Facebook Reddit LinkedIn Tools Reprints and Permissions Cite Search Site Citation C. Sánchez Aké, R. Sanginés de Castro, H. Sobral, M. Villagrán-Muniz; Plume dynamics of cross-beam pulsed-laser ablation graphite. Journal Applied Physics 1 September 2006; 100 (5): 053305. https://doi.org/10.1063/1.2337879 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers...

In this work, we present a thorough study on the relation between plasma emission and change of silicon nitride thin films refractive index. Thin were grown by reactive magnetron direct current sputtering technique deposited onto wafers at different fluxes Ar N2 working pressures. This procedure, certain deposition parameters, produced poor quality films, i.e. with index other than pure Si3N4 films. The was interrogated in real time means optical spectroscopy (OES) observing vicinity trget...

A photoacoustic technique was used as an alternative method to monitor the crater volume and its role in emission line intensification double-pulse pre-ablation configuration. The measured using confocal microscopy correlated with changes signal. Laser spectroscopy characterize enhancement a function of delay between lasers first pulse energy. Optimum found be microsecond timescale corresponding maximum largest change single- signals. Only slight detected increasing energy above ablation...

Reactive sputtering is a very useful technique, particularly, for producing inhomogeneous interference filters, where the refractive index changes smoothly during deposition. In such context, precise control of deposition parameters crucial replicating desired optical properties. This study employed pulsed DC power source to investigate influence duty cycle on target poisoning, plasma characteristics, electric signals, and morphological properties synthesized films. magnetron was...

Time resolved optical diagnostic techniques were used to study the production of highly ionized species in aluminum plasma produced by a centered-triggered high-current pulsed cathodic arc. Controlling spacing between cathode spots enabled correlation reduction mean charge state and an increase be observed. As current was increased, distances reduced these states for longer times. Strong spot coupling is proposed as mechanism high states.

A monochromator/Fizeau interferometer/intensified CCD camera system is described that was developed for the measurement of shape spectral lines are rapidly time varying. The most important operating parameter determines performance instrument size entrance aperture as this both light throughput and effective interferometer wavelength resolution. This paper discusses, theoretically experimentally, effect finite source area on instrumental resolution to assist in optimizing choice parameter....

The plasma transport and loss mechanisms in a magnetically filtered pulsed cathodic vacuum arc operating at high currents were studied. system efficiency was determined according to coefficient, defined as the ion saturation substrate current cathode ratio, for comprehensive set of currents, confining magnetic fields filter biases. Microwave interferometry employed obtain time-resolved electron density distributions mid-filter region corresponding all regimes drawn by coil due its...

Lightning activity is typically generated by explosive volcanic activity. In this work we report an experimental simulation of a lightning focusing into basaltic rock the emission pulsed Nd: YAG laser in air at atmospheric pressure (laser ablation). The temporal evolution breakdown ash plume was studied spectroscopy and shadowgraphy. electron temperature exceeds 18 × 10 3 K density reaches about cm −3 . production yield nitric oxide simulated determined gas chromatography coupled to mass...

Fourier transform approximation is used to synthesize continuously changeable refractive index filters on a substrate. Its performance sensitive small variations of the involved deposition parameters. We study this dependence, numerically and experimentally.

Plasma emission produced by Dual Pulsed Laser Ablation (DPLA) on two perpendicular graphite targets, separated 3 mm, was analyzed. carried out in vacuum (10−6 Torr) an excimer (248 nm) and a Nd: YAG (1064 lasers, delayed up to 20 μs. Spatial temporal measurements were performed time resolved optical spectroscopy, fast photography color interferometry. Time of flight studied order determine the kinetic energies from carbon species (C I, C II III). Comparison between dual‐laser single laser...