This paper presents the electrical contact behaviors of gold-to-gold thin-film contacts under high current conditions and describes major factors that influence these for radio frequency microelectromechanical system switches. The fundamental phenomena in resistance versus force curve were investigated with a measurement setup, which we devised. Based on experimental results, behavior increasing can be divided into three regions: first, an unstable regime before minimum is reached; second,...

This study explored the design, performance evaluation, and application of two types in-plane motion actuators that were scalable to larger sizes—that is, extension-type electrothermal actuator (ExACT) retraction-type (ReACT). These based on displacement amplification mechanism (DAM) principles regularly arranged structures in mechanical metamaterials. A modular design approach allowed these be easily configured desired size scaled create large-scale actuators. Studies conducted assess ExACT...

A torque sharing function (TSF) method is one of the control methods that drives each phase a switched reluctance motor so overall becomes constant torque. The conventional TSF defined only at positive production region, which causes poor torque-speed performance as speed increases due to delay current rising and falling time. This paper extends definition region negative have enough time raise or decrease region. extended enables increase even in relatively high operation. Optimal...

In this paper, high-temperature position sensors for aerospace applications are proposed and geometric design improvements to enhance the performance of derived. Position comprise a resistive element, conductive brush that moves along electrodes at each end element. conventional sensors, elements exposed atmosphere. This exposure results in oxidation chemical reaction with ambient gas high temperature. Furthermore, can be damaged by brush, which is direct contact surface Materials used...

In this study, we fabricated and characterized a stack actuator made of forty layers 1 mm thick PMN-29PT with cross-sectional area 10 × mm2. From the measurement actuation displacement, confirmed that piezoelectric strain constant in direction thickness material is 2000 pm V−1, as suggested by manufacturer. The blocking forces are measured to be 230 N, 369 478 N for 100 V, 200 300 respectively. showed large discrepancies from estimated calculated using linear models, especially high voltage...

A micro shear-stress sensor (MiSS) for real-time detection of flow separation in unmanned aerial vehicles was presented. The direct method selected the MiSS, and movement its floating element measured using a simple highly reliable piezoresistive scheme. To realize polysilicon strain gauge piezoresistor type with very low temperature coefficient resistivity (TCR) high factor first developed. These two characteristics were adjusted by varying boron concentration during fabrication. also...

One of the major issues introduced by development Extreme Ultra Violet Lithography (EUV) is high level flare and shadowing system. Effect degrades aerial images may introduce unbalanced Critical Dimension Uniformity (CDU) so on. Also due to formation EUV tool, pattern another concern added from EUVL. Shadowing will cause CD variation for directionality position along slit. Therefore, in order acquire resolution wafer result, correction effect inevitable lithography. In this study, we analyze...

Abstract This paper proposes a new design of bimorph-type electrothermal actuators based on flexible Ni-Co substrates and describes the results finite element method (FEM) simulation performance evaluation actuators. In actuators, multilayer structure consisting an adhesion layer, two insulation layers, Pt (platinum) heater layer was formed substrate that patterned in individual shape. The thin-film proposed this study could be detached from Si carrier wafer adhered to other micro or...

A high-volume manufacturing (HVM) actinic blank inspection (ABI) prototype has been developed, of which the capability for a native defect was evaluated. An analysis signal intensity (DSI) showed that DSI varied as result mask surface roughness. Operating ABI under review mode reduced variation by 71 %, and therefore this operation made available precise evaluation. The also indicated capture rate influenced caused inspected three times HVM prototype, impact detected defects on wafer CD...

In this Letter, an implantable hybrid temperature sensor for use in a micro-scale space power MEMS devices is proposed. The developed chrome silicide (CrSi2), which has very high electromotive force, and nickel as base metal. Since thermocouple appropriate device to measure at specific spot, the correlations between junction sizes forces should be verified reduce size of thermocouple. Furthermore, it necessary verify performance implanted microdevice by patterning resistance detector (RTD)...

In this paper, a spin-etching method is proposed for wafer thinning using mixture of hydrofluoric, nitric, and acetic acids (HNA solution), experimental studies are conducted. the apparatus, silicon was rotated in Teflon bath filled with HNA solution. The etch rate can be determined by ratio; mass transfer, both through boundary layer; heat transfer. When Reynolds number flow on rotating disk below 1.8 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML"...

In this paper, we propose the position sensor designs for high-temperature applications. Oxidation and chemical reaction of resistive elements, together with mechanical degradation component materials at high temperatures, limit applications conventional sensors. order to overcome these drawbacks sensors, designed sensors consisting a element, passivation layer, contact pads, conductive brush. The oxidation reactions elements temperatures can be prevented by using layer that has excellent...

We report on the fabrication of a new type probe card that uses porous silicon micromachining technique. Curled cantilever tips are fabricated using surface tension and difference in thermal expansion coefficient between films. The contact resistance with an aluminum pad is basically below 1 Ω there no change after 700,000 contacts.

Position sensors for precision control of actuators operated at a high temperature are needed in aerospace systems. However, oxidation resistive elements and metallization temperatures limit the high-temperature applications conventional position sensors. In this paper, new designs discrete-type proposed their performances evaluated both room temperatures. design sensors, made MoSi <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>...

As the semiconductor industry requires lithography suitable for 32-nm node, extreme ultraviolet (EUVL) has potential to provide this capability mass fabrication of devices. But because an (EUV) exposure system is operated in vacuum, during irradiation by EUV light, hydrocarbons are decomposed vacuum1-3, example, out-gassing from mask, and contaminate surface imaging optics which coated with Mo/Si multi-layers carbon. Thus, contamination not only reduces reflectivity degrades uniformity, but...

Abstract Rapid diagnosis and treatment are required when blood clots build up in a vessel clog the vessel. This study proposes novel smart catheters that can simultaneously diagnose treat disease. quick increases survival probability prevent various complications. In design of catheters, Pt strain gauges be used to measure inside diameter paper new fabrication process based on metal substrates made Ni Co alloy (referred as “Ni-Co” this paper). process, Ni-Co thin film was deposited onto...

Influence of phase defect on printed images mask pattern was experimentally investigated by printing contact hole (CH) hp 32 nm wafer. And the experimental results were compared with simulation results. A test prepared for this experiment contained programmed defects 92 ~ 34.8 in width and around 0.68 1.65 depth. The arrayed a way such that pitch array would differ from absorber pitch. Therefore, placed at different positions relative to those CH patterns. Mask patterns wafer using an...

Summary form only given. A torque sharing function (TSF) method is one of the control methods that drives each phase an SRM so overall becomes a constant torque. The TSF produced in previous works defined at positive production region. This definition leads to good performance low speed. As speed increases, however, near unaligned position reduced and negative aligned increased due delay current rising falling time. paper extends region have enough time raise or decrease extended enables...