A5025017993- Advanced Measurement and Metrology Techniques
- Scientific Measurement and Uncertainty Evaluation
- Optical measurement and interference techniques
- Advanced Sensor Technologies Research
- Surface Roughness and Optical Measurements
- Sensor Technology and Measurement Systems
- Advancements in Photolithography Techniques
- Advanced Surface Polishing Techniques
- Industrial Vision Systems and Defect Detection
- Advanced Fiber Optic Sensors
- Thin-Film Transistor Technologies
- Optical Coatings and Gratings
- Calibration and Measurement Techniques
- Nuclear Physics and Applications
- Silicon and Solar Cell Technologies
- Electromagnetic Compatibility and Measurements
- Advanced X-ray and CT Imaging
- Integrated Circuits and Semiconductor Failure Analysis
- Photonic and Optical Devices
- Flow Measurement and Analysis
- Gas Dynamics and Kinetic Theory
- Microwave Engineering and Waveguides
- Image Processing Techniques and Applications
- Microwave and Dielectric Measurement Techniques
- Electron and X-Ray Spectroscopy Techniques
National Institute of Standards and Technology
2003-2024
Physical Measurement Laboratory
2020-2023
Communications Technology Laboratory
2020-2023
National Institute of Standards
2005-2023
The calculation of uncertainty for a measurement is an effort to set reasonable bounds the result according standardized rules.Since every produces only estimate answer, primary requisite statement inform reader how sure writer that answer in certain range.This report explains we have implemented these rules dimensional calibrations nine different types gages: gage blocks, wires, ring gages, balls, roundness standards, optical flats indexing tables, angle and sieves.
The tip of a traditional coordinate measuring machine (CMM) probe used for measurements macro-scale artifacts is generally sphere excellent geometry. Its known diameter (from prior calibration) and form, along with the approach direction (which normal to surface), facilitate radius compensation in straightforward manner. Neither these conditions valid micro-scale made flexible fiber on CMM. This presents two challenges. first involves calibration probe's true size shape. second developing...
The results obtained by five laboratories in the determination from dimensional measurements of effective areas two gas-operated 10 cm2 piston-cylinder assemblies are presented. These were carried out as phase A1 a key comparison pressure range 0.05 MPa to 1 under auspices Consultative Committee for Mass and Related Quantities (CCM) Comité International des Poids et Mesures. participants performed diameter, straightness roundness on each piston cylinder bore calculated area assembly using...
We report on performance of a new form fiber probe, which can be used in conjunction with coordinate measuring machine (CMM) for microfeature measurement. The probe stylus is glass small ball (≈75 μm diameter) glued to the end. When brought into contact surface, bends, and this bending measured optically. acts as cylindrical lens, focusing transmitted light narrow stripe that magnified by microscope detected camera, providing position resolution under 10 nm. In addition high resolution,...
The Moore M48 coordinate measuring machine (CMM) has provided the National Institute of Standards and Technology (NIST) with flexible measurement capabilities for many years. machine's state of...
The NIST M48 coordinate measuring machine (CMM) was used to measure the average diameter of two precision, silicon spheres nominal near 93.6mm. A measurement technique devised that took advantage specific strengths and artifacts while restricting influences derived from machine's few weaknesses. This effort resulted in measurements with unprecedented accuracy uncertainty levels for CMM style instruments. results were confirmed through a blind comparison another national institute (NMI)...
The Geometry Measuring Machine (GEMM) of the National Institute Standards and Technology (NIST) is a profilometer for free-form surfaces. A profile reconstructed from local curvature test part surface, measured at several locations along line. For measurements surfaces, methods based on sensing have strong appeal. Unlike full-aperture interferometry they do not require customized null optics. uncertainty critically dependent upon measurement sensor positioning. an instrument GEMM type, we...
Several radiometric and photometric measurements depend on high accuracy area measurement of precision apertures. Some apertures have sharp edges are generally measured optically. At the Precision Engineering Division National Institute Standards Technology (NIST), we developed a contact fibre (fiber) probe for diameter form micro-holes (holes size 100 µm or larger). This exerts extremely small forces, under 5 µN, can therefore be used knife-edge without causing edge damage. We roundness...
In this paper we present both the design details and uncertainty budget for a National Institute of Standards Technology (NIST)-developed high-accuracy Fizeau-type interferometer specifically adapted to measurement sphere diameter. To do this, provide some historic instrument's origins, an explanation clever accuracy-improving enhancements integrated into over past several decades, detailed discussion role automation has played in achieving its current world-class accuracy. With utmost...
The NIST Is continuing to develop the ability perform accurate, traceable measurements on a wide range of artifacts using very precise, error-mapped coordinate measuring machine (CMM). M48 CMM has promised accuracy and versatility for many ears. Recently, these promises have been realized in reliable, reproducible way types 1D, 2D, 3D engineering metrology artifacts. permitted state-of-the-art, accurate one meter step gages precision ball plates as well 500 micrometer holes small parts made...
We are developing an instrument, the Geometry Measuring Machine (GEMM), to measure profile errors of aspheric and free form optical surfaces, with measurement uncertainties near 1 nm. Using GEMM, is reconstructed from local curvatures a surface, which measured at points on optic's surface. will describe prototype version its repeatability time, measurements registry practice, calibration practice needed make nanometer resolution comparisons other instruments. Over three months, GEMM 3 nm...
Results of the Stage One portion Inter-American System Metrology (SIM) regional international comparison gauge block calibration by optical interferometry are presented. In this measurement round-robin, short blocks, six made steel and tungsten carbide, in range nominal length from 2 mm to 100 mm, were calibrated five national metrology institutes (NMIs) SIM region, one NMI EUROMET. By employing technique interferometry, each laboratories establishes a direct link their primary standard...
Error sources in gage block mechanical comparisons can range from classical textbook examples to a completely counter- intuitive example of diamond probe tip wear at low applied force. Fortunately, there are methods available metrologists that successfully be minimize these and other effects. Techniques such as statistical process control, use check standards, thermal drift eliminating measurement algorithms, improved sensor calibration, well-tested deformation modeling used the National...
Abstract The dimensional metrology group at the National Institute of Standards and Technology (NIST) has developed an ultra-high accuracy laser micrometer capable external diameter measurements with a targeted expanded uncertainty, U ( k = 2), less than 20 nm. This instrument is advanced iteration design NIST in 1990s been continuously improved since its inception. newest approach takes advantage lessons learned through two decades operation, process control measurement data, performance...
One of the most elusive measurement elements in gage block interferometry is correction for phase change on reflection. Techniques used to quantify this have improved over year, but uncertainty has remained relatively constant because some error sources proven historically difficult reduce. The precision engineering division at National Institute Standards and Technology recently developed a technique that can reflection directly individual blocks eliminates fundamental problems with...
Abstract Recent developments in diameter metrology at NIST have improved the dimensional characterization of piston–cylinder assemblies (PCAs) to unprecedented precision. For newest generation PCAs, standard uncertainty measurement outer is <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:mrow> <mml:mn>12</mml:mn> <mml:mtext> </mml:mtext> <mml:mtext>nm</mml:mtext> </mml:mrow> </mml:math> , while inner <mml:mn>14</mml:mn> . With a high-accuracy dataset hand,...
The results of the inter-RMO key comparison EURAMET.L-K5.2016 on calibration a step gauge are reported. Twenty-two National Metrology Institutes from four different metrological regions all over world participated in this which lasted three years, December 2015 to 2018. Two artefacts were circulated so that varying ranges participants equipment could be accommodated. A 1020 mm ceramic monolithic remained stable throughout comparison. 610 steel changed length, possibly due an impact while...
The results of the APMP key comparison on step gauge (APMP.L-K5.2006) are reported. transfer standard was provided by NMIJ, Japan. This has 620 mm nominal length and 32 measurement faces. Thirteen National Metrology Institutes (10 from APMP, 3 other Regional Organizations) participated in this comparison. started December 2005 finished 2007. Participants have used different techniques, which normally for calibration services. good agreement except three laboratories. For determining...
A varied assortment of forty-seven new and used steel, ceramic, chromium carbide tungsten gauge blocks from nine manufacturers, ranging in length 0.5 mm to 101.6 mm, were calibrated by four laboratories the NORAMET countries using method optical interferometry. Measurements central are compared. The data utilized as a test bed illustrate outcome two different techniques with potential for application comparisons calibration services national metrology institutes (NMIs).
The current definition of the length a gage block is very clever attempt to evade systematic errors associated with wringing layer thickness and optical phase corrections. In practice, most laboratories wring quartz or fused silica reference plates, in addition there are large operator surface effects. We present quantitative data on these effects how that primary source measurement uncertainty.