A5092542654- Advanced MEMS and NEMS Technologies
- Piezoelectric Actuators and Control
- Advanced Measurement and Metrology Techniques
- Surface Roughness and Optical Measurements
- Adaptive optics and wavefront sensing
- Advanced Surface Polishing Techniques
- Force Microscopy Techniques and Applications
- Sensor Technology and Measurement Systems
- Metal and Thin Film Mechanics
- Digital Image Processing Techniques
- Industrial Vision Systems and Defect Detection
- Optical measurement and interference techniques
- Optical Systems and Laser Technology
- Advanced Vision and Imaging
- 3D Surveying and Cultural Heritage
- Robotics and Sensor-Based Localization
TU Wien
2023-2025
This article presents the design, manufacturing, and evaluation of a scanning mirror system based on novel resonant rotational reluctance actuator. The comprises ferromagnetic mover with 15-mm aperture, which is actuated by force generated an actuator coil, whose magnetic flux guided via yoke. An integrated angular position sensor optical proximity sensors enables feedback control amplitude. design locates yoke side mover, allowing for large range <inline-formula...
This paper describes the development and implementation of three driving strategies for oscillation amplitude control a resonant rotational reluctance actuated scanning mirror system. The exploit current input amplitude, pulse duration, phase between mover angle. Linear PI-controllers are developed each strategy linearized plant around an operating point highly nonlinear implemented compared over wide range system, regarding their closed-loop dynamics in time-domain, revealing fundamental...