For patterning organic resists, optical and electron beam lithography are the most established methods; however, at resolutions below 30 nanometers, inherent problems result from unwanted exposure of resist in nearby areas. We present a scanning probe method based on local desorption glassy by heatable probe. demonstrate half pitch down to 15 nanometers without proximity corrections with throughputs approaching those Gaussian similar resolution. These patterns can be transferred other...

Using friction to guide fabrication Ultralow found in certain layered materials such as graphite is important the construction of nanomechanical devices. Koren et al. combined measurements and modeling characterize interaction sliding planes (see Perspective by Liechti). This helped them make small devices that featured rotational pivots multiple locking positions. Science , this issue p. 679

3D patterning by means of probe-assisted thermal decomposition has been achieved on phthalaldehyde polymer films with 1 nm vertical resolution and 40 lateral resolution. Highly efficient is enabled a self-amplified depolymerization mechanism. Pixel writing speeds the order microseconds are demonstrated.

Thermal scanning probe lithography is used for creating lithographic patterns with 27.5 nm half-pitch line density in a 50 thick high carbon content organic resist on Si substrate. The as-written the poly phthaladehyde thermal layer have depth of 8 nm, and they are transformed into high-aspect ratio binary using SiO2 hard-mask thickness merely 4 sequence selective reactive ion etching steps. Using this process, line-edge roughness after transfer 2.7 (3σ) has been achieved. also transferred...

The unique atomic positions in quasicrystals lead to peculiar self-similarity and fractal-like structural morphology. Accordingly, many of the material properties are supposed manifest exceptional characteristics. In this Rapid Communication, we explain through numerical simulations fundamental aspects wearless friction manifested a 30\ifmmode^\circ\else\textdegree\fi{} twisted bilayer graphene system. particular, sliding force exhibits fractal structure with distinct area correlations due...

Abstract Reversibly crosslinked polymer films have properties that are beneficial to scanned‐probe data storage and lithographic applications use thermomechanical nanoindentation as a write or expose mechanism. The novel under study contains linkages based on thermally reversible Diels–Alder crosslinking. Thermomechanical the nanometer scale analyzed by indentation experiments thin using heated tips. underlying mechanism is studied at varying tip temperatures times, revealing Arrhenius...

ADVERTISEMENT RETURN TO ISSUEPREVNoteNEXTProbe-Based Nanolithography: Self-Amplified Depolymerization Media for Dry LithographyOlivier Coulembier†, Armin Knoll‡*, David Pires‡, Bernd Gotsmann‡, Urs Duerig‡, Jane Frommer§, Robert D. Miller§, Philippe Dubois†, and James L. Hedrick§*View Author Information† Laboratory of Polymeric Composite Materials, Center Innovation Research in Materials Polymers (CIRMAP), University Mons, Place du Parc 23, 7000 Belgium‡ IBM Zurich Laboratory, Säumerstrasse...

Scanning probe nanolithography (SPL) has demonstrated its potential in a variety of applications like 3D nanopatterning, 'direct development' lithography, dip-pen deposition or patterning self-assembled monolayers. One the main issues holding back SPL been limited throughput for and imaging. Here we present complete lithography metrology system based on thermomechanical writing into organic resists. Metrology is carried out using thermoelectric topography sensing method. More specifically,...

We have used a temperature sensitive polymer film as removable template to position, and align, gold nanorods onto an underlying target substrate. Shape-matching guiding structures for the assembly of size 80 nm × 25 been written by thermal scanning probe lithography. The were assembled into structures, which determine both position orientation single nanorods, means capillary interactions. Following particle assembly, was removed cleanly decomposition are transferred thus demonstrated...

The weak interlayer binding in two-dimensional layered materials such as graphite gives rise to distinguished low-friction properties if the atomic lattices at interface are rotated with respect one another. lack of crystal symmetry leads poorly understood correlations and cancelations forces. Here we report on a powerful tiling method based moir\'e superstructure which allows us study intricate interplay forces systematic manner. Based numerical simulation data for circular graphene flake...

The interlayer relative dielectric constant, εr, of 2-dimensional (2D) materials in general and graphitic particular is one their most important physical properties, especially for electronic applications. In this work, we study the electromechanical actuation nano-scale contacts. We find that beside adhesive forces there are capacitive scale parabolically with potential drop across sheared interface. use phenomena to measure intrinsic constant bilayer graphene interface i.e. εr = 6 ± 2,...

The most direct definition of a patterning process' resolution is the smallest half-pitch feature that capable transferring onto substrate. Here, authors demonstrate thermal scanning probe lithography (t-SPL) fabricating dense line patterns in silicon and metal lift-off features at sub-20 nm size. lines were written half pitch 18.3 to depth 5 into 9 polyphthalaldehyde imaging layer by t-SPL. For processing, used three-layer stack comprising an evaporated SiO2 hardmask, which just 2–3 thick....

Topographic engraving of structures in polymer surfaces attracts widespread interest for application imprint lithography and data storage. We study the nonlinear interaction nanoindents written close proximity, 20−100 nm, to one another a highly cross-linked polystyrene matrix. The indents are created thermomechanically by applying heat force stimuli 10 μs duration tip, thereby raising temperature 250 °C exerting contact pressures up 1 GPa. show that on nanoscale plastic deformation is...

A reversal of the particle current in rocking Brownian motors was predicted more than 20 years ago; however, an experimental verification and a deeper insight into underlying mechanisms remained elusive. Here, we investigate high frequency behaviour motor for charged nanoparticles based on electrostatic interactions 3D shaped nanofluidic slit electro-osmotic forcing particles. sub ms temporal $\approx\,10\,$nm spatial resolution 60 nm gold spheres allows us to measure time-resolved dependent...

A curved design for in-plane micro- and nano-electromechanical switches based on a single clamped cantilever is proposed, optimized with finite-element simulations demonstrated experimentally. The enables precise control of the switch motion closed-state air gap, resulting in uniform electrostatic field increased robustness. size curvature are actuation voltage, energy strength. These optimizations proposed fabrication process amenable to switches. scalability concept nanoscale relays terms...

Detection and precise localization of nanoscale structures buried beneath spin-coated films are highly valuable additions to nanofabrication technology. In principle, the topography final film contains information about location features. However, it is generally believed that relation masked by flow effects, which lead an upstream shift dry film's render impossible. Here we demonstrate, theoretically experimentally, flow-shift paradigm does not apply at submicrometer scale. Specifically,...

This paper reports an amorphous carbon (a-C) contact coating for ultra-low-power curved nanoelectromechanical (NEM) switches. a-C addresses important problems in miniaturization and low-power operation of mechanical relays: i) the surface energy is lower than that metals, ii) active formation highly localized conducting filaments offers a way to form nanoscale contacts, iii) high reliability achieved through excellent wear properties a-C, demonstrated this with more 100 million hot switching...

The fabrication of high-performance solid-state silicon quantum-devices requires high resolution patterning with minimal substrate damage. We have fabricated room temperature (RT) single-electron transistors (SETs) based on point-contact tunnel junctions using a hybrid lithography tool capable both thermal scanning probe and throughput direct laser writing. best focal z-position the offset tip- laser-writing positions were determined in situ probe. demonstrate <100 nm precision registration...

Molecular relaxation of a copolymer designed for nano-electromechanical systems was chemically confined by varying the spacing between cross-links, δc. A critical cross-link 1−3 nm marks transition in nano-mechanical properties evaluated atomic force microscopy. The reveals an interplay and length scale backbone relaxation, ξα, cooperatively rearranging regions. For δc ≫ natural process is relatively unaffected cross-links ductile, low hardness behavior results. < directly interfere with...

Exploiting the spatial resolution of scanning probes presents an attractive approach for novel data storage technologies in particular large-scale repositories because their inherent potential high density. We show that multi-Tbit/in(2) density can be achieved by means thermomechanically embossing information as indentation marks into a polymer film. The is determined nonlinear interaction between closely spaced indents and fundamental scaling relations governing shape size indents. find...

Nanometer scale indents have been written in a cross-linked polystyrene sample, and their relaxation has studied at annealing temperatures well below the glass transition of polymer. The represent highly nonequilibrium state polymer which is subjected to mechanical stress up 0.4 GPa thermal quench rates on order 10{8} K/s during writing. It shown that towards equilibrium evolves logarithmically over more than 10 orders magnitude time. kinetics are accurately described terms thermally...

Archival data storage is predominantly based on magnetic tape technology. An alternative probe multi-level recording scheme proposed which specifically addresses the issue of long term preservation. In a first step, are written as topographic relief in an organic resist. To achieve preservation, structure transferred Si inorganic carrier by means reactive ion etching. Thereby, preserved stone. Using 3-level logic, density 99 Gb/in2 demonstrated and read-back accomplished with error rate 10−3...

Abstract Nanomechanics has been slow in entering nanotechnology because of extreme conditions resulting from scaling. This is an issue particular for polymers, although widely used macroscale applications. Highly repetitive nanoscale deformation cycling combination with excellent shape retention and thermal stability demonstrated. While generic principles described are pertinent to a range applications, this demonstration made on the example polymer media high‐density data storage. The...