A5015451534- Metal and Thin Film Mechanics
- Diamond and Carbon-based Materials Research
- Plasma Diagnostics and Applications
- Ion-surface interactions and analysis
- Lubricants and Their Additives
- Carbon Nanotubes in Composites
- Advanced Surface Polishing Techniques
- Graphene research and applications
- Hydrogen Storage and Materials
- Electron and X-Ray Spectroscopy Techniques
- Advanced Materials Characterization Techniques
- Semiconductor materials and devices
National Institute for Space Research
2012-2024
Universidade de São Paulo
2009-2014
This paper focuses on diamond-like carbon (DLC) films for space applications. Specifically, it reports the structure, morphology, adhesion, and high-vacuum tribological performance of several DLC with different hydrogen content. have been studied as a promising solid lubricant since liquid lubricants are ineffective undesirable many The were deposited by pulsed Direct Current Plasma Enhanced Chemical Vapor Deposition (DC PECVD) technique an additional cathode. An amorphous silicon interlayer...
A new method of Plasma Immersion Ion Implantation (PIII) and deposition (PIII D) for treating industrial components in the batch mode has been developed. metal tubular fixture is used to allocate inside, around, along tube, exposing only parts each component that are be ion implanted plasma. Hollow cathode-like plasma generated inside tube filled with desired gas, by applying high negative voltage pulses hollow cylindrical which insulated from vacuum chamber walls. This a very convenient...
Because of the problem film peeling, it is generally difficult to obtain thick and well adherent diamond-like carbon (DLC) coatings on metallic substrates with good tribological properties. In this work, we propose apply a plasma immersion ion implantation deposition (PIII&D) process in magnetic bottle configuration using high voltage glow discharge order deposit DLC films directly over 304 stainless steel (SS) alloy. such configuration, two couples coils wound outside vacuum chamber are...
The present work deals with Diamond-like Carbon (DLC) films deposition inside metallic tubes using magnetic field generated in a PIII&D system. Firstly, the features of plasma discharges application were studied different feeding gases as nitrogen, methane and acetylene. experimental results demonstrate that stable hollow cathode discharge can be established is applied. breakdown strongly affected by presence during treatment. Secondly, experiments regarding DLC inner surface are also...
The effect of magnetic field enhanced plasma immersion ion implantation (PIII) in silicon substrate has been investigated at low and high pulsed bias voltages. bottle configuration was generated by two coils installed outside the vacuum chamber. presence both, electric PIII creates a system crossed E × B fields, promoting rotation around target. magnetized electrons drifting fields provide electron-neutral collision. Consequently, efficient background gas ionization augments density target...
Plasma immersion ion implantation (PIII) with low external magnetic field has been investigated both numerically and experimentally. The static considered is essentially nonuniform generated by two coils installed outside the vacuum chamber. Experiments have conducted to investigate effect of most important PIII parameters: target voltage gas pressure. In that context, it was found current density increased when parameters were varied. Later, process analyzed using 2.5-D computer code KARAT....
Tubes of stainless steel (SS) embedded in external magnetic field were used to study the effects plasma immersion ion implantation (PIII) as a function their diameter. The was complemented with and without grounded auxiliary electrode (AE) placed at axis tube. During discharge tests tubes larger diameter (D = 11 cm), AE, nitrogen gas breakdown established inside tube pressures near 2.0 × 10−2 mbar. Under same operation conditions, stable plasmas similar PIII current densities obtained for...
A comparison between experimental measurements and numerical calculations of the ion current distribution in plasma immersion implantation (PIII) with external magnetic field is presented.Later, Silicon samples were implanted nitrogen to analyze effect on them.The considered essentially non-uniform generated by two coils installed vacuum chamber.The presence both, electric PIII create a crossed ExB system, promoting drift velocity around target.The results found shows that magnetized...
Boron-doped Diamond-Like Carbon (B:DLC) films with different concentrations of boron were produced in an Enhanced-PECVD reactor using trimethylborate as the source. An additional cathode system was incorporated inside to confine plasma grow B:DLC film on polished Ti-6Al-4V and Silicon samples. The boron-containing coatings evaluated compared a boron-free coating through several characterization techniques. Raman spectroscopy, Nano-hardness, XPS, RBS, SEM techniques employed study...
Usando o codigo computacional KARAT em geometria cilindrica foi investigado efeito da tensao do alvo no processo de implantacao ionica por imersao plasma com campo magnetico externo. Encontramos que a aplicacao um transversal relacao ao eletrico suprime expansao bainha, gerando uma regiao alta densidade redor alvo. Por outro lado, corrente apre-senta distribuicao nao uniforme, mostrando dose maior centro Esses resultados sao explicados termos ionizacao sistema campos cruzados ExB devido as...