A5009836609- Micro and Nano Robotics
- Modular Robots and Swarm Intelligence
- Advanced Sensor and Energy Harvesting Materials
- Acoustic Wave Resonator Technologies
- Soft Robotics and Applications
- Mechanical and Optical Resonators
- Advanced Materials and Mechanics
- GaN-based semiconductor devices and materials
- Robotic Locomotion and Control
- Advanced MEMS and NEMS Technologies
- Ferroelectric and Piezoelectric Materials
- CCD and CMOS Imaging Sensors
- Advanced Memory and Neural Computing
- Robotics and Sensor-Based Localization
- Analytical Chemistry and Sensors
- Control and Dynamics of Mobile Robots
- Advanced Fiber Laser Technologies
- Underwater Vehicles and Communication Systems
- Robotic Path Planning Algorithms
Georgia Institute of Technology
2004-2024
This paper demonstrates super high frequency (SHF) Lamb and surface acoustic wave resonators based on single-crystal orientation Aluminum Scandium Nitride (AlScN) thin films grown silicon substrates by molecular beam epitaxy (MBE). We report the experimental response electromechanical properties of 400 nm-thick crystalline AlScN with up to 12% Sc/(Sc+Al) ratio. The film thickness is optimized for operation at SHF range, targeting emerging wireless communication standards, such as 4G LTE/5G....
This work, the second of two parts, reports on implementation and characterization high-quality factor (Q) side-supported single crystal silicon (SCS) disk resonators. The resonators are fabricated SOI substrates using a HARPSS-based fabrication process 3 to 18 /spl mu/m thick. They consist resonant structure trench-refilled polysilicon drive sense electrodes. have self-aligned, ultra-narrow capacitive gaps in order 100 nm. Quality factors up 46 000 mTorr vacuum 26000 at atmospheric pressure...
Robotic autonomy at centimeter scale requires compact and miniaturization-friendly actuation integrated with sensing neural network processing assembly within a tiny form factor. Applications of such systems have witnessed significant advancements in recent years fields as healthcare, manufacturing, post-disaster rescue. The system design this puts stringent constraints on power consumption for both the sensory front-end back-end weight electronic robust operation. In paper, we introduce...
A bristle-bot or vibrobot is a multi-legged robot made of bristles and an oscillating actuator that generates vibrations. This work presents the first demonstration micro-bristle-bot, with 3D-printed legs, fabricated by two-photon polymerization (TPP) lithography. The presented miniaturized has weight only 5 mg, in size 2 mm × 1.87 0.8 mm, can achieve speed up to 4 times body length per second. base structure six legs TPP direct laser writing single fabrication step, allowing for rapid...
This work reports on the first demonstration of Lamb-wave resonators based single-crystalline Scandium (Sc)-doped Aluminum Nitride (AlN) films operating at 8-10 GHz. Sc-AlN and AlN are grown Silicon substrates using molecular beam epitaxy (MBE). The electrodes defined electron lithography with sub-micron feature sizes to maximize electromechanical coupling coefficient (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup...
Molecular beam epitaxy is used for growth of structures with ScAlN radio frequency filter applications. The nitride layers are grown directly on Si substrates surface acoustic wave resonators, Lamb and an epitaxial Mo Er 2 O 3 buffer layer film bulk resonators (FBARs). crystal structure the defined by Sc concentration. It can vary from wurtzite to hexagonal. Good quality results in low sheet resistance which very close that material. Enhanced electroacoustic performance achieved fabricated...
Systematically designing local interaction rules to achieve collective behaviors in robot swarms is a challenging endeavor, especially micro robots, where size restrictions imply severe sensing, communication, and computation limitations. In such swarms, performing useful functions often preconditioned on the formation of high-density aggregations which can facilitate signaling information sharing. this article, we present systematic approach control aggregation by leveraging physical...
Surface acoustic wave (SAW) resonators based on single crystalline aluminum nitride (AlN) and scandium (ScAlN) grown by molecular beam epitaxy (MBE) demonstrated substantial improvement in performance compared to the state-of-art devices with sputtered piezoelectric layers silicon substrates. High coupling coefficient (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) up 5.0% 7.8%...
This paper presents a novel steering mechanism, which leads to frequency-controlled locomotion demonstrated for the first time in micro bristle robots. The miniaturized robots are 3D-printed, 12 mm × 8 6 size, with feature sizes down 400 µm. can be steered by utilizing distinct resonance behaviors of asymmetrical sets. left and right sets bristles have different diameters, thus stiffnesses resonant frequencies. unique response each side vertical vibrations single on-board piezoelectric...
Tiny surveillance robots need to efficiently compute a perception front-end workload, consisting of neural network inference stack, and localization back-end workload implementing set state-space equations. Miniaturization low-power actuation make bristle [1] attractive locomotion platforms, but size limits lead stringent energy constraints. The edge accelerator needs low leakage for long retentive stretches efficient matrix active bursts. We present 0.84TOPS/W, 110μW retentive-sleep-capable...
Here we discuss the design, development, and system engineering of SWIM (Sensing With Independent Micro-swimmwers) system, which consists decimeter-scale, swimming micro-robots (micro-swimmers) equipped with ocean composition sensors, propelled by miniature actuators, wire-lessly communicating through water ultrasound waves – envisioned to explore ice-ocean interface an Ocean World like Europa or Enceladus. The micro-swimmers are designed a delta-wing form-factor for efficient packing dozens...
This work presents micro-scale bristle robots, with the size of 233 μm × 113 75 μm, having five bristles on top and bottom sides robot body. The are tilted 60° from horizontal surface. presented micro bristle-bots fabricated using two-photon lithography direct laser write, followed by nickel (Ni) deposition as magnetic material. A single electromagnet lying underneath substrate is used to actuate robots. field applies a torque layer body and, combined ON/OFF switching field, induces rocking...
Earth and Space Science Open Archive This is a preprint has not been peer reviewed. ESSOAr venue for early communication or feedback before review. Data may be preliminary.Learn more about preprints preprintOpen AccessYou are viewing the latest version by default [v1]SWIM -- Sensing with Independent Micro-swimmersAuthorsEthanSchaleriDAzadehAnsariSamuelHowellHyeongLeeMilesSmithAdarshRajguruLuisTosiZhijianHaoiDJeaKimSee all authors Ethan SchaleriDCorresponding Author• Submitting AuthorNASA Jet...
The recent advancements in nanoscale 3D printing and microfabrication techniques have reinvigorated research on microrobots. However, precise motion control of the microrobots biological environments using compact actuation setups remains challenging to date. This work presents a novel mechanism contact design that enables bidirectional steering via biasing neutral position microrobot. Equipped with rockers substrate, microrobot, hence microrocker bot, is capable well-controlled forward...