A5036528320- Acoustic Wave Resonator Technologies
- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Advanced Sensor and Energy Harvesting Materials
- Ultrasonics and Acoustic Wave Propagation
- Innovative Energy Harvesting Technologies
Wuhan University
2021-2024
Wuhan University of Technology
2021-2023
This paper presents a ScAlN/AlN-based MEMS piezoelectric accelerometer using the trapezoidal with corners (TWC) shaped cantilevers. The composite Sc <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.2</sub> Al xmlns:xlink="http://www.w3.org/1999/xlink">0.8</sub> N/AlN film is deposited on silicon-on-insulator (SOI) substrate to improve sensitivity of accelerometer. theoretical and FEM model established analyze relationship between cantilever...
In this work, we report a method to enlarge the trapezoidal cantilever-based harvester power by using high-performance Sc <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.2</sub> Al xmlns:xlink="http://www.w3.org/1999/xlink">0.8</sub> N/aluminum nitride (AlN) composite film and introducing symmetrical corners both sides of beam. Energy harvesters with variable beam structure piezoelectric are designed evaluated simulations experiments. The...
This work presents a bimorph piezoelectric microelectromechanical system microphone (b-PMM) with high receiving sensitivity and signal-to-noise ratio (SNR) based on an array of circular diaphragms in size 0.375 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times$</tex-math> </inline-formula> 3 mm notation="LaTeX">$^{\text{3}}$</tex-math> . The b-PMM is fabricated using Sc...
This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists six trapezoidal cantilever beams shorter fixed sides. Meanwhile, larger sides is also designed for comparison. theoretical and finite element models are established to analyze the effect beam's effective stiffness output voltage natural frequency. As decreases, frequency decreases while signal increases. proposed has higher sensitivity than...
With increasing requirements for massive sound acquisition, piezoelectric MEMS microphones (PMMs) have attracted widespread attention due to the advantages of low power consumption, fast response, waterproof and dustproof. This work presents a PMM with sector-connected cantilevers, where anchors are located at center circular operating area 0.5-mm2. According theoretical analysis finite element simulations, proposed exhibits higher sensitivity compared conventional cantilever diaphragms...
In this paper, a bimorph piezoelectric MEMS microphone with tractive structure is proposed. The presents an octagon eight cantilever beams, all connected to small in the center of device. adopts electrical connection series-parallel combination without problem leading signals pads. proposed simulated using Finite Element Method (FEM). Compared fixed boundaries and unimorph structures, it generates higher stress larger high-stress area during operation. resonant frequency −3 dB roll-off are...
Applying a DC bias can effectively tune the performance of piezoelectric ultrasonic micromachined transducer (PMUT) to meet requirements in multiple application scenarios. However, effect on various parameters PMUT has not been systematically analyzed and verified. In this work, theoretical model scandium-doped aluminum nitride (ScAlN) based under different biases is obtained by extracting new effective coefficients coupling into vibration functions. The measurement results show that...
With the rapid development of microelectromechanical systems (MEMS), microphones need to be more miniaturized and integrated. This paper presents an AIN-based high sensitivity piezoelectric MEMS microphone (PMM) fabricated on a cavity silicon-on-insulator (CSOI) platform. The consists six trapezoidal cantilevers, where fixed end beam is located in center hexagonal working area. Through theoretical analysis finite element method (FEM) simulation, we have demonstrated that proposed structure...