A5065016417- Acoustic Wave Resonator Technologies
- Mechanical and Optical Resonators
- Ferroelectric and Piezoelectric Materials
- Gas Sensing Nanomaterials and Sensors
- RFID technology advancements
- Analytical Chemistry and Sensors
- Advanced Fiber Optic Sensors
Centre National de la Recherche Scientifique
2021-2024
Institut Jean Lamour
2023-2024
Université de Lorraine
2021-2024
Wireless surface acoustic wave (SAW) reflective delay line (R-DL) technology is very powerful to carry out remote measurements of various parameters under harsh environments, while enabling the identification a given sensor among several them. However, R-DL currently limited 350 °C for long-term applications, likely because aluminum electrodes oxidation and/or congruent lithium niobate (LiNbO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML"...
This work deals with the potential of Al/AlN/Sapphire surface acoustic wave (SAW) structure as wireless sensor operating in 2.45 GHz ISM band for high-temperature applications up to 500 °C.A first design was used make SAW resonators by e-beam lithography and characterize them between room temperature °C a wired configuration.Frequency variation showed good stability, repeatability, linearity, sensitivity measured coefficient frequency (TCF) -47 ppm/°C.The figure merit, defined product...
Thanks to its large electromechanical coupling, lithium niobate LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> ferroelectric material enables the achievement of surface acoustic wave sensors in reflective delay line configuration. The latter is particularly interesting for many applications as response sensor like a binary code time domain, thus providing identification functionality sensor. Consequently, 2.45 GHz LiNbO3-based SAW...
For harsh industrial environments, surface acoustic wave (SAW) sensors are attractive because they fully passive, can sense many physical and chemical parameters be remotely queried. In a delay line (DL) configuration, an ID code added in the time domain signal, hence name SAW-RFID or SAW-Tag. this communication, we showcase recent original examples of SAW RFID for environment temperature strain sensing, based on innovative electrodes substrates.
High temperature SAW sensors have attracted the attention because they are fully passive, batteryless and, when coupled to an antenna, wireless.They can be queried remotely using a backscattering based interrogation and particularly useful in harsh / rotating environments, where other sensing techniques limitations.