A5115899822- Microfluidic and Bio-sensing Technologies
- Nanowire Synthesis and Applications
- Nanopore and Nanochannel Transport Studies
Technical University of Denmark
2025
Ørsted (Denmark)
2025
Aalborg University
2025
A wafer-scale process for fabricating monolithically suspended nano-perforated membranes (NPMs) with integrated support structures into silicon is developed. Existing fabrication methods are suitable many desired geometries, but face challenges related to mechanical robustness and complexity. We demonstrate a that utilizes the cyclic deposit, remove, etch, multi-step (DREM) directional etching of high-aspect-ratio (HAR) 300 nm in diameter nano-pores 700 pitch. Subsequently, buried cavity...