A5055064742- Mechanical and Optical Resonators
- Advanced MEMS and NEMS Technologies
- Photonic and Optical Devices
- Microfluidic and Bio-sensing Technologies
- Electrohydrodynamics and Fluid Dynamics
- Microfluidic and Capillary Electrophoresis Applications
- Acoustic Wave Resonator Technologies
- Fluid Dynamics and Heat Transfer
University of Electronic Science and Technology of China
2022-2024
Shenzhen University
2023-2024
Micro-gyroscopes based on the Coriolis principle are widely employed in inertial navigation, motion control, and vibration analysis applications. Conventional micro-gyroscopes often exhibit limitations, including elevated noise levels suboptimal performance metrics. Conversely, advent of cavity optomechanical system technology heralds an innovative approach to micro-gyroscope development. This method enhances device’s capabilities, offering sensitivity, augmented precision, superior...
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The principle of optical-mechanical coupling system in cavity optomechanical is analyzed, and the design a micro-accelerometer with uniaxial straight beam differential structure presented this paper for vibration detection wide frequency band. consists movable mass, four beams connected to top layer SOI wafer, two fixed masses air slot loading line defect nano photonic crystal cavity. chip designed fabricated, experimental test platforms atmosphere vacuum are built respectively. stability,...
Conventional surface acoustic wave (SAW) atomizers require a direct water supply on the surface, which can be complex and cumbersome. This paper presents novel SAW atomizer that uses lateral wetting to achieve atomization without supply. The device works by simply pressing piece of wetted strip against bottom an excited piezoelectric transducer. liquid then flows along side unmodified edge, where it is atomized into well-converging mist in stable sustainable manner. We identified this...
In this paper, a new linear accelerometer based on the optomechanical system of silicon photonic crystal cavity is designed. The structure has large mass mechanical oscillator, which effectively reduces thermal noise system. And used for detection, advantages high sensitivity and detection precision. Firstly, affects accuracy analyzed numerical expression given. Then design described in detail characteristics sensitive are by finite element method. A with thickness 500 nm, optical Q value...
Gyroscope is a kind of very important inertial sensor, which widely used in automobile, aerospace, navigation, strategic guidance and other fields. The traditional micro-gyroscope generally has some disadvantages such as high noise low performance, but the cavity optomechanical system technology provides new scheme for realization with sensitivity, precision resolution. In this work, we present method high-precision rotation angle detection based on microscale hemispherical resonator...