About
Contact & Profiles
A5101970781
Research Areas
- Industrial Vision Systems and Defect Detection
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Image Processing Techniques and Applications
Anhui University of Science and Technology
2024
10.1016/j.vlsi.2024.102150
article
EN
Integration
2024-01-09
Lithography hotspot (LHS) detection is crucial for achieving manufacturability design in integrated circuits (ICs) and ensuring the final yield of ICs chips. Recognizing challenges posed by conventional deep learning-based methods lithographic meeting demands advanced IC manufacturing accuracy, this study introduces an LHS approach. This approach leverages multi-scale feature fusion to identify defects layout hotspots accurately. method incorporates convolutional block attention module into...
10.1117/1.jmm.23.1.013202
article
EN
Journal of Micro/Nanopatterning Materials and Metrology
2024-02-10
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