About
Contact & Profiles
A5014438157
Research Areas
- Semiconductor materials and devices
- Silicon Nanostructures and Photoluminescence
- Electron and X-Ray Spectroscopy Techniques
- Thin-Film Transistor Technologies
- Advancements in Semiconductor Devices and Circuit Design
- ZnO doping and properties
Luoyang Institute of Science and Technology
2023
The growth of a low-temperature polycrystalline silicon (LTPS) thin film on flexible polyethylene terephthalate (PET) substrate under the assistance helium plasma has been examined in detail this study. By utilizing enhanced chemical vapor deposition method, LTPS films are directly deposited PET at relatively low temperature (80 °C), and variations morphology, structure, electrical property samples with He flow systematically characterized by performing series tests. results show that purely...
10.1116/6.0003174
article
EN
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
2023-12-29
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