A5093545736- Metal and Thin Film Mechanics
- Diamond and Carbon-based Materials Research
- Laser-Plasma Interactions and Diagnostics
- Boron and Carbon Nanomaterials Research
- Ion-surface interactions and analysis
Lawrence Livermore National Laboratory
2023-2024
Sputter deposition of ultrathick (≈20μm) Au–Ta alloy coatings on sphero-cylindrical substrates is key for the fabrication hohlraums magnetically assisted inertial confinement fusion. Here, we study AuTa4 onto rotating substrates. We use high-power impulse magnetron sputtering (HiPIMS) in a constant peak target voltage mode. Results show that erosion state has strong impact dominant crystallographic phase, microstructure, surface morphology, and electrical resistivity films. This due to...
Conventional magnetron sputter deposition of B4C uses Ar as the working gas. Here, we explore with a Ne plasma, which is expected to exhibit larger sputtering yields than Ar. We study properties films deposited different substrate tilt angles source operated in either direct-current (DC) or radio-frequency (RF) mode an plasma. Results show that film are determined by combination ballistics and effects gas on plasma discharge phase scattering depositing species flux. At constant power, rates...