A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform.

• DOI: 10.3929/ethz-b-000618209
• Publication Date: 2023-01-01
• Authors: Mikhail Churaev; Rui Ning Wang; Annina Riedhauser; Viacheslav Snigirev; Terence Blésin; Charles Möhl; Miles H. Anderson; Anat Siddharth; Youri Popoff; Ute Drechsler; Daniele Caimi; Simon Hönl; Johann Riemensberger; Junqiu Liu; Paul Seidler; Tobias J. Kippenberg
• Keywords: 0301 basic medicine; Science; Q; FOS: Physical sciences; modulator; Physics - Applied Physics; Applied Physics (physics.app-ph); Article; 03 medical and health sciences; broad-band; generation; circuits; conversion; Physics - Optics; Optics (physics.optics)

We present a LiNbO3 integrated photonic platform with wafer-scale bonding to a Si3N4 photonic circuit. The platform exhibits <0.1 dB/cm propagation loss and <2.5 dB/facet fiber-chip coupling loss. We demonstrate phase shifters, frequency-agile lasers, optical splitters, and other devices.