A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform.

0301 basic medicine 0303 health sciences 03 medical and health sciences Science Q FOS: Physical sciences Physics - Applied Physics Applied Physics (physics.app-ph) Article Physics - Optics Optics (physics.optics)
DOI: 10.3929/ethz-b-000618209 Publication Date: 2023-01-01
ABSTRACT
We present a LiNbO3 integrated photonic platform with wafer-scale bonding to a Si3N4 photonic circuit. The platform exhibits <0.1 dB/cm propagation loss and <2.5 dB/facet fiber-chip coupling loss. We demonstrate phase shifters, frequency-agile lasers, optical splitters, and other devices.
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