Acousto-optic modulation based on an AlScN microring resonator for microwave-to-optical conversion

• DOI: 10.48550/arxiv.2411.15701
• Publication Date: 2024-11-23
• Authors: Kewei Bian; Yushuai Liu; Rong Wang; Yuan Dong; Qize Zhong; Yang Qiu; Xingyan Zhao; Tao Wu; Shaonan Zheng; Ting Hu
• Keywords: Modulation (music)

Acoustic-optic (AO) modulation is critical for microwave and optical signal processing, computing networking. Challenges remain to integrate AO devices on-chip using fabrication process compatible with complementary metal-oxide-semiconductor (CMOS) technology. This work presents the demonstration of an modulator exploiting a microring resonator (MRR) based on thin-film aluminum scandium nitride (AlScN) photonic platform. Leveraging high piezoelectric properties AlScN, MRR employed interdigital transducer (IDT) inside couple signals into acoustic resonant modes, enabling efficient by-directional in MRR. The fabricated exhibits loaded quality factor (Q) 1.8*e4 at L-band TE00 mode. A low effective half-wave voltage Vpi 1.21 V achieved, corresponding VpiL 0.0242 Vcm, along optomechanical single-photon coupling strength g0 0.43 kHz between 2.11 GHz mode device shows potential applications photonics.