A5056836901- Acoustic Wave Resonator Technologies
- Mechanical and Optical Resonators
- Photonic and Optical Devices
- Advanced MEMS and NEMS Technologies
- Optical and Acousto-Optic Technologies
- GaN-based semiconductor devices and materials
- Photorefractive and Nonlinear Optics
- Topological Materials and Phenomena
- Sensor Technology and Measurement Systems
- Acoustic Wave Phenomena Research
- Winter Sports Injuries and Performance
- Underwater Acoustics Research
- Metamaterials and Metasurfaces Applications
- Optical Systems and Laser Technology
- Ultrasonics and Acoustic Wave Propagation
- Advanced Sensor and Control Systems
- Advanced Sensor Technologies Research
- Ferroelectric and Piezoelectric Materials
ShanghaiTech University
2021-2025
University of Chinese Academy of Sciences
2021-2024
Shanghai Institute of Microsystem and Information Technology
2021-2024
Chinese Academy of Sciences
2024
Acousto-optic (AO) modulation technology holds significant promise for applications in microwave and optical signal processing. Thin-film scandium-doped aluminum nitride (AlScN), with excellent piezoelectric properties a wide transparency window, is promising candidate achieving on-chip AO fabrication process compatible complementary metal-oxide-semiconductor (CMOS) technology. This study presents, to the best of our knowledge, first demonstration modulators surface acoustic wave generation...
In the past few decades, silicon photonics with complementary metal-oxide-semiconductor (CMOS) process compatibility has been well developed and successfully applied to commercial products. Due demand for high-fidelity high-speed optical interconnect, high-resolution sensing, information processing, hybrid integrating more existing materials improve performance or introduce novel functionalities post-CMOS technology becomes essential. Aluminum nitride (AlN) is a popular piezoelectric...
In this work, we present the development of high figure-of-merit (FOM) symmetric Lamb wave (S0) mode resonators using 36Y-cut single crystal lithium niobate (LiNbO3) thin films. This study enhances quality factor (Qs) through optimization anchor dimensions and in-plane rotated angle (α). A periodic relationship between Qs α was observed, which is attributed to anisotropic viscosity coefficient (η) S0 in LiNbO3. method acoustic delay lines (ADLs) for evaluating η related intrinsic loss...
This work explores the infrared (IR) detection capabilities of 750 nm thick Z-cut lithium niobate (LN) thin film resonator at asymmetric modes various orders: first, third, fifth, and seventh order (A1, A3, A5, A7), with resonant frequencies 2.35, 6.68, 11.09, 15.49 GHz. Under radiation 0.575 mW, responses about admittance minima frequency drift corresponding to these have been experimentally validated. Notably, A1 mode exhibits most significant dip response 2.62 dB, while A7 demonstrates a...
This article presents lithium niobate (LiNbO3) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators 36Y-cut LiNbO3 thin film. The spurious-free resonator achieves an electromechanical coupling coefficient (kt2) 42.67% quality factor (Qr) 254 at wave-propagating orientation 0° in plane.
Scandium-doped aluminum nitride (AlScN) with an asymmetric hexagonal wurtzite structure exhibits enhanced second-order nonlinear and piezoelectric properties compared to (AlN), while maintaining a relatively large bandgap. It provides promising platform for photonic integration facilitates the seamless of passive active functional devices. Here, we present design, fabrication, characterization AlScN EO micro-ring modulators, introducing functionalities chip-scale platform. These...
<title>Abstract</title> Anti-spring mechanisms are widely used for improving the noise performance of MEMS accelerometers due to their stiffness softening effect. However, existing typically require large bias force and displacement achiev¬ing softening, leading device dimensions. Here, we propose a novel anti-spring mechanism composed two pre-shaped curved beams connected in parallel configuration, which can achieve without requiring displacement. The effect is verified through theoretical...
The paper demonstrates the design, analysis and of shear horizontal fundamental mode (SH0) resonator based on 36Y-cut Lithium Niobate (LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> ) thin film. A spurious-free SH0 response with a k xmlns:xlink="http://www.w3.org/1999/xlink">t</inf> <sup xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> approximately 20.7% has been achieved at wave propagating orientation 0° in plane. Such high...
This Letter introduces an on-chip topological phononic crystal (PnC) acoustic waveguide employing lithium niobate thin films. Utilizing a C3v symmetry-breaking mechanism, the PnC is achieved, operating at frequencies exceeding 430 MHz. A SH0 mode transceiver designed, enabling highly efficient wave transmission and reception. The fabricated demonstrates propagation loss of 11.3 dB/mm edge mode. An beam splitter utilizing has been demonstrated, showing configurability waveguide. These results...
Acoustic-optic (AO) modulation is critical for microwave and optical signal processing, computing networking. Challenges remain to integrate AO devices on-chip using fabrication process compatible with complementary metal-oxide-semiconductor (CMOS) technology. This work presents the demonstration of an modulator exploiting a microring resonator (MRR) based on thin-film aluminum scandium nitride (AlScN) photonic platform. Leveraging high piezoelectric properties AlScN, MRR employed...
The paper demonstrates the design and analysis of high-order asymmetric (A) symmetric (S) resonators with structure Z-cut Lithium Niobate (LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> ) thin film silicon oxide (SiO xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> layer. This can enable high frequency more than 3.5 GHz A mode S mode. It also achieve electromechanical coupling coefficient (kt <sup...
In this work, high performance first-order shear horizontal (SH1) resonators with three electrode configurations based on Lithium niobate (LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> ) thin film have been designed. The optimal Euler angle of LiNbO and device structure are analyzed by numerical calculation finite element analysis (FEA). A electromechanical coupling factor <tex...