A5073589806- Laser-induced spectroscopy and plasma
- Astro and Planetary Science
- Mass Spectrometry Techniques and Applications
- Ion-surface interactions and analysis
- Planetary Science and Exploration
- Analytical chemistry methods development
- Isotope Analysis in Ecology
- Laser Material Processing Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Semiconductor materials and devices
- Space Satellite Systems and Control
- Geological and Geochemical Analysis
- Spacecraft Design and Technology
- Paleontology and Stratigraphy of Fossils
- Molecular Biology Techniques and Applications
- Spacecraft Dynamics and Control
- Space Science and Extraterrestrial Life
- Nuclear Physics and Applications
- Metabolomics and Mass Spectrometry Studies
- Satellite Communication Systems
- Recycling and Waste Management Techniques
- Electrohydrodynamics and Fluid Dynamics
- Particle Detector Development and Performance
- Historical Astronomy and Related Studies
- Metallurgical Processes and Thermodynamics
University of Bern
2017-2022
International Space Science Institute
2017-2022
École Polytechnique Fédérale de Lausanne
2016-2018
SpaceTech (United States)
2017
The recognition of biosignatures on planetary bodies requires the analysis putative microfossil with a set complementary analytical techniques. This includes localized elemental and isotopic both its surrounding host matrix. If can be performed spatial resolution at micrometer level part-per-million detection sensitivities, valuable information (bio)chemical physical processes that influenced sample material gained. Our miniaturized laser ablation ionization mass spectrometry...
Detecting heavy trace elements with a miniature laser spectrometer on lunar meteorite.
The capabilities of a double-pulse femtosecond laser ablation ionisation source for the integration into miniature time-of-flight LIMS system designed space research are investigated.
In this contribution highly sensitive and quantitative analytical methodologies based on femtosecond Laser Ablation Ionization Mass Spectrometry (fs-LIMS) for the analysis of model systems state-of-the-art Cu interconnects are reviewed discussed. The method development introduces in a first stage 1D chemical depth profiling approach electrodeposited films containing periodically confined organic layers. Optimization measurement conditions these test platforms enabled investigations with...
State-of-the-art laser ablation (LA) depth-profiling techniques (e.g. LA-ICP-MS, LIBS, and LIMS) allow for chemical composition analysis of solid materials with high spatial resolution at micro- nanometer levels. Accurate determination LA-volume is essential to correlate the recorded information specific location inside sample. In this contribution, we demonstrate two novel approaches towards a better quantitative LA craters dimensions micrometer level formed by femtosecond-LA processes on...
Through-silicon-via (TSV) technology enables 3D integration of multiple 2D components in advanced microchip architectures. Key the TSV fabrication is an additive-assisted Cu electroplating process which additives employed may get embedded body. This incorporation negatively influences reliability and durability interconnects. Here, we present a novel approach toward chemical analysis TSVs based on femtosecond laser ablation ionization mass spectrometry (fs-LIMS). The conditions for LIMS...
A new high-performance laser ablation and ionisation (LIMS) mass spectrometer for solid sample analysis with micrometer spatial- up to 10 000 resolution is presented.
Sn solder bumps on Cu pillars and the quantification of incorporated organic impurities are urgent interest to microchip industry.
Abstract Accumulation of spectra is a common approach for improvement the signal‐to‐noise ratio (SNR) in mass spectrometry. However, severe degradation overall spectrum can occur if some individual spectra, affected by peak broadening, are included accumulation process. In this contribution, we discuss potential sources and effects spectral distortions using examples from acquired our miniature laser ablation/ionisation time‐of‐flight spectrometer. We show how recent developments acquisition...
The application of a novel UV fs Laser Ablation Ionization Mass Spectrometry approach for chemical depth profiling low-melting point, high surface roughness SnAg solder bump features is presented. obtained submicrometer resolved three-dimensional compositional data reveal unprecedented information on the distribution individual elements inside matrix. Moreover, determination matrix-matched relative sensitivity coefficients allows first report quantitative assessment alloy composition. These...
State-of-the-art three-dimensional very large-scale integration (3D-VLSI) relies, among other factors, on the purity of high-aspect-ratio Cu interconnects such as through-silicon-vias (TSVs). Accurate spatial chemical analysis electroplated TSV structures has been proven to be challenging due their large aspect ratios and multimaterial composition (Cu Si) with distinct physical properties. Here, we demonstrate that these can accurately analyzed by femtosecond (fs) laser beam ablation...
Laser Ablation Ionisation Mass Spectrometry (LIMS) is an important quantitative method for chemical analysis of solids. Current limits detections (LoDs) LIMS instruments are in the ppm to sub-ppm range (atomic fractions), while other commonly used techniques solid sample reach LoDs at ppb levels or even below. This study presents implementation mass-selective beam blanking Spectrometer – Gran Turismo (LMS-GT) improve instruments' detection limit. LMS-GT a high-performance time-of-flight...
The principles of operation and figures merit a novel, compact (324 mm × Ø 114 mm; volume approximately 1000 cm3 ) reflectron-type time-of-flight mass spectrometer designed for simultaneous multielement isotope gas analysis is presented. system, which consists pulsed electron impact ion source, either to directly analyse samples collected stored in compartment or extracted from solids using CW laser system (fibre-coupled diode laser, <75 W, λ = 808 ± 10 nm). In latter case, pulses are...
Laser ablation ionization mass spectrometry studies on polished surface structures of hard, high melting point multicomponent interconnect using our femtosecond-laser time-of-flight spectrometer have previously been proven capable providing spatially resolved chemical depth profile data at the micro- and nanometer level. Transfer experimental protocols tailored to suit such type samples low materials with roughness, however, is highly challenging, as thermal effects caused by interactions...