A5037040922- Nuclear Physics and Applications
- Semiconductor materials and devices
- GaN-based semiconductor devices and materials
- Nanowire Synthesis and Applications
- Plasma Diagnostics and Applications
- High-pressure geophysics and materials
- Metal and Thin Film Mechanics
- Advancements in Photolithography Techniques
- Advancements in Semiconductor Devices and Circuit Design
- Radiation Therapy and Dosimetry
- ZnO doping and properties
- Advanced X-ray Imaging Techniques
- Copper Interconnects and Reliability
- Silicon Carbide Semiconductor Technologies
- Advanced Surface Polishing Techniques
- Atomic and Subatomic Physics Research
- Geophysics and Gravity Measurements
- Orbital Angular Momentum in Optics
- Ga2O3 and related materials
- Astro and Planetary Science
- Electronic and Structural Properties of Oxides
- Optical Polarization and Ellipsometry
- Gastroesophageal reflux and treatments
- Nanofabrication and Lithography Techniques
- Near-Field Optical Microscopy
University of Waterloo
2019-2025
Erzincan Binali Yıldırım University
2017-2020
Texas Tech University
2014-2019
Haydarpaşa Numune Eğitim ve Araştırma Hastanesi
2004
E-beam lithography is a powerful tool for generating nanostructures and fabricating nanodevices with fine features approaching few nanometers in size. However, alternative approaches to conventional spin coating development processes are required optimize the procedure on irregular surfaces. In this review, we summarize state of art nanofabrication substrates using e-beam lithography. To overcome these challenges, unconventional methods have been developed. For instance, polymeric...
Methods of preparation and analysis structured waves light, electrons, atoms have been advancing rapidly. Despite the proven power neutrons for material characterization studies fundamental physics, neutron science has not able to fully integrate these techniques because small transverse coherence lengths, relatively poor resolution spatial detectors, low fluence rates. Here, we demonstrate methods that are practical with existing technologies show experimental achievement helical wavefronts...
The Airy wave packet is a solution to the potential-free Schrödinger equation that exhibits remarkable properties such as self-acceleration, nondiffraction, and self-healing. Although beams are now routinely realized with electromagnetic waves electrons, implementation neutrons has remained elusive due small transverse coherence lengths, low fluence rates, absence of neutron lenses. In this Letter, we overcome these challenges through holographic approach present first experimental...
Inductively coupled plasma etching of silicon nanostructures for metalens applications using a continuous, multi-step C4F8/SF6 was investigated to achieve high aspect ratio (HAR) features down tens nanometers with smooth sidewalls. In the process, ion bombardment and free radical transport significantly change among HAR as progresses, posing challenges profile control. With fixed gas ratio, in angle occurs at depth approximately 400 nm, transitioning from positive taper negative one....
Phase-grating moiré interferometers (PGMIs) have emerged as promising candidates for the next generation of neutron interferometry, enabling use a polychromatic beam and manifesting interference patterns that can be directly imaged by existing cameras. However, modeling various PGMI configurations is limited to cumbersome numerical calculations backward propagation models which often do not enable one explore setup parameters. Here we generalize Fresnel scaling theorem introduce <a:math...
Methods to prepare and characterize neutron helical waves carrying orbital angular momentum (OAM) were recently demonstrated at small-angle scattering (SANS) facilities. These methods enable access the degree of freedom which provides new avenues exploration in fundamental science experiments as well material characterization applications. However, it remains a challenge recover phase profiles from SANS measurements. We introduce demonstrate novel interferometry technique for extracting...
High aspect ratio silicon structures have gained significant interest due to their vast applications. Minimal lateral etch under the mask is essential achieve such high structures. Previously, authors reported that chromium oxide better than metallic as a hard for etching in terms of rate and selectivity resist during structure fabrication. Here, it metal also gives less mask. Following fabrication by electron beam lithography lift-off, was etched using nonswitching (i.e., SF6 C4F8 gases...
The Airy wave packet is a solution to the potential-free Schrodinger equation that exhibits remarkable properties such as self-acceleration, non-diffraction, and self-healing. Although beams are now routinely realized with electromagnetic waves electrons, implementation neutrons has remained elusive due small transverse coherence lengths, low fluence rates, absence of neutron lenses. In this work, we overcome these challenges through holographic approach present first experimental...
Inductively coupled plasma reactive ion etching (ICP-RIE) of n-type SiC epitaxial layers grown on (0001¯) 4H-SiC semi-insulating substrates has been investigated using chlorine-based plasma. The etch rate and postetching surface morphology have studied as functions the composition, ICP power, RIE process pressure. authors found that smoothness layer was increased by introducing BCl3 into Cl2/Ar An optimized developed yielding rates ∼220 nm/min very smooth surfaces with root mean square...
Chromium and its oxides have been playing a vital role in the fabrication of micro- nano-scale structures numerous applications for several decades. Controllable, robust anisotropically dry-etched hard masks their optimal etch recipes are required state-of-the-art device techniques. In terms manufacturability repeatability, mechanistic understanding plasma-etching process chromium oxide (Cr <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>...
Among various grating structure fabrication techniques, potassium hydroxide (KOH) wet anisotropic etching of Si(110) wafers offers low cost and impressive aspect ratio over large areas with high etch uniformity. The is ultimately limited by lateral that constantly widens the trenches. In this paper, authors demonstrated a method to double achievable using two-step KOH etching. After first etching, was grown thermal oxide; after removing oxide from trench bottom reactive ion second carried...
Access to the neutron orbital degree of freedom has been enabled by recent actualization methods prepare and characterize helical waves carrying angular momentum (OAM) at small-angle scattering (SANS) facilities. This provides new avenues exploration in fundamental science experiments as well material characterization applications. However, it remains a challenge recover phase profiles from SANS measurements. We introduce demonstrate novel interferometry technique for extracting information...
Nanocone arrays are widely employed for applications such as antireflection structures and field emission devices. Silicon nanocones typically obtained by an etching process, but the profile is hard to attain because anisotropic dry generally gives vertical or only slightly tapered sidewall profiles, isotropic plasma curved sidewalls. In this work, we report fabrication of cone using masked followed maskless techniques. The silicon structure first etched fluorine-based under protection a...
Neutron interferometry has played a distinctive role in fundamental science and characterization of materials. Moiré neutron interferometers are candidate next-generation instruments: they offer microscopy-like magnification the signal, enabling direct camera recording interference patterns across full wavelength spectrum. Here we demonstrate extension phase-grating moiré to two-dimensional geometries. Our fork-dislocation phase gratings reveal singularities pattern, explore orthogonal with...
The development of advanced spintronics materials necessitates novel characterization tools with the ability to analyze nanometer-scale spin textures. Neutrons, their angstrom-sized wavelengths, electric neutrality, and controllable states, are uniquely suited for this task. Recent research has prioritized expanding capabilities “neutron toolbox” effectively characterize emerging materials. This involves holographic tomographic techniques 3D bulk textures, alongside methods creating...
A great deal of work is currently devoted to the development new semiconductor alloys that can expand range material properties and device applications. Although group‐III nitride are attractive materials owing wide tunable direct bandgaps other suitable properties, choices limited only a few binary ternary alloys. This situation due in part limitations conventional deposition methods, such as chemical vapor deposition, requiring high temperature pressure synthesize wider metastable In this...