In this paper, we describe a process for fabricating high-voltage n-channel double-diffused metal-oxide-semiconductor insulated gate bipolar transistors (IGBTs) on free-standing 4H silicon carbide (SiC) epilayers. process, all critical layers are epitaxially grown in continuous sequence. The substrate is then removed, and device fabrication takes place the carbon face of epilayer having total thickness about 180 ¿m. For drift layer with doping values capable blocking 20 kV, IGBT carries...

An ultra-small disk resonator consisting of a suspended silicon with submicron bending radius sitting on an SiO2 pedestal is demonstrated experimentally. asymmetrical rib waveguide integrated as the access for resonator, which used to realize optical sensor improved sensitivity due enhanced evanescent field interaction analyte. The present also has large measurement range because ultra-large free-spectral submicron-disk resonator. As example, 0.8 μm designed, fabricated, and characterized....

The real-time generation of editable mesh animations in XR applications has been a focal point research the field. However, easily controlling generated meshes remains significant challenge. Existing methods often suffer from slow speeds and suboptimal results, failing to accurately simulate target objects' complex details shapes, which does not meet user expectations. Additionally, final typically require manual adjustments, it is difficult generate multiple models simultaneously. To...

Abstract The power absorption mechanisms of charged particles during the ignition pulsed dual radio-frequency (12.5 MHz / 2.5 MHz) capacitively coupled argon plasmas at different gas pressures are investigated by multi-fold experimental diagnostics and particle-in-cell/Monte Carlo collision (PIC/MCC) simulations. All results, including evolution macroscopic plasma electrical parameters, spatiotemporal distribution electron-impact excitation rate process well reproduced PIC/MCC It is found...

ABSTRACT With the increasing awareness of greenhouse gas emissions, transportation with alternative fuel, especially vehicle electrification has attracted attention from more and researchers, planners practitioners. However, feasibility using electric vehicles for public transit is hard to assess as buses vary significantly in terms costs performance. Implementation small medium communities even complex, such are often sensitive service due factors tighter budget constraints, higher...

Abstract The ignition process of a pulse-modulated capacitively coupled plasma with trenched-electrode driven at 12.5 MHz is investigated via electrical and optical diagnostics. characteristics are derived by analyzing the waveforms measured voltage current probe. Time resolved emission spectroscopy utilized to determine evolution intensity (OEI) Ar atoms 750.4 nm spatio-temporal distribution electron-impact excitation rate some selected RF periods since beginning each pulse. It found that...

Abstract The electron power absorption mechanisms in electronegative capacitively coupled plasmas CF 4 are investigated using particle-in-cell/Monte Carlo collisions simulations at a pressure of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:mrow> <mml:mi>p</mml:mi> <mml:mo>=</mml:mo> </mml:mrow> </mml:math> 60 Pa, driving frequency <mml:mi>f</mml:mi> 13.56 MHz for voltage amplitudes the interval <mml:msub> <mml:mi>ϕ</mml:mi> <mml:mn>0</mml:mn> </mml:msub>...

Abstract Neutral radicals generated by electron impact dissociation of the background gas play important roles in etching and deposition processes low pressure capacitively coupled plasmas (CCPs). The rate energy efficiency producing a given radical depend on space- time-dependent distribution function (EEDF) plasma, as well dependent cross sections electron-neutral collisions that result generation radical. For case CCP operated CF 4 gas, we computationally demonstrate generating neutral...

The effects of gas pressure and voltage amplitude on the ignition process a pulse capacitively coupled RF argon discharge are experimentally investigated. electron density is measured by hairpin probe, spatiotemporal distribution impact excitation dynamics determined phase resolved optical emission spectroscopy, electrical parameters obtained analyzing current waveforms. In this work, plasma ignited with few initial electrons, so behaves like breakdown. Based breakdown curve, pressures...

Abstract The ignition process of a pulse modulated capacitively coupled argon discharge driven simultaneously by two radio frequency voltages [12.5 MHz (high frequency) and 2.5 (low frequency, LF)] is investigated multifold experimental diagnostics particle in cell / Monte Carlo collision simulations. In particular, (i) the effects LF voltage amplitude measured at end pulse-on period, <?CDATA $V_\mathrm{{L,end}}$?> <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll">...

Abstract Based on experiments and simulations, various plasma parameters are found to undergo a hysteresis as function of the driving voltage amplitude in capacitively coupled CF 4 discharges. Phase Resolved Optical Emission Spectroscopy reveals that discharge operates hybrid combination drift-ambipolar α -mode at low voltage. In this mode, electric field mean electron energy high electronegative bulk region. As cross section for attachment is appreciable only energies, mode results strong...

Abstract The effects of a negative direct-current (dc) voltage on the striated structures and electrical parameters have been studied by multi-fold experimental diagnostics particle-in-cell/Monte Carlo collision (PIC/MCC) simulations in dc superposed rf (radio-frequency, 8 MHz) capacitive discharge CF 4 . electron density, spatio-temporal distribution electron-impact excitation rate measured hairpin probe, phase resolved optical emission spectroscopy <?CDATA...

Abstract Insights into the spatio-temporally resolved electron power absorption dynamics in capacitively coupled radio-frequency plasmas are essential for understanding fundamentals of their operation and as a basis knowledge-based plasma process development. Similar to γ -mode, an ionization maximum is observed at sheath edge around time voltage electronegative oxygen discharges pressure 300 Pa. Based on Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations, we demonstrate that this...

Abstract A magnetized capacitively coupled oxygen plasma was studied synergistically using phase resolved optical emission spectroscopy and particle‐based kinetic simulation. Discharge mode transitions from ambipolar into drift finally α induced by increasing the magnetic field were observed at different driving frequencies electrode gaps. The simulation results demonstrate that discharge operating in same exhibits a similar degree of electronegativity. By frequency or gap, transition tends...

Abstract The Electrical Asymmetry Effect (EAE) provides control of the mean ion energy at electrodes multi-frequency capacitively coupled radio frequency plasmas (CCP) by tuning DC self-bias via adjusting relative phase(s) between consecutive driving harmonics. Depending on electron power absorption mode, this phase affects flux in different ways. While it separate and α -mode, limitations were found γ - Drift-Ambipolar modes. In work, based experiments as well kinetic simulations, EAE is...

To achieve a green and sustainable public transit system, most agencies plan to completely replace current diesel hybrid buses with battery-powered electric (EBs) in the decades ahead. Based on performances of EBs practical operations, this study develops fleet replacement model using multi-type determine an optimal cost-effective manner, considering associated diesel–electric rates in-vehicle crowd costs for passengers. Multi-type include small fast charging technique, large slow...