Double patterning with 193nm optical lithography is inevitable for technology scaling before EUV ready. In general, there are two major double techniques (DPT): Litho-Etch-Litho-Etch (LELE) and sidewall spacer technology, a Self-Aligned Patterning technique (SADP). So far LELE much more mature than SADP in terms of process development design flow implementation. However, has stronger potential due to its smaller rules on tip-tip tip-side as well intrinsic self-align property. this paper, we...

Control performance of a multivariable closed-loop control system greatly depends on the quality process model used in controller design. Thus, it is highly desirable that discrepancy between and plant can be measured. In this study, novel methodology proposed for model-plant mismatch diagnosis based an internal framework. The outputs are first whitened, external disturbance identified. A residual measuring put forward identified model. Three indices defined to monitor qualities overall...

This study introduces an innovative method for reconstructing pharmaceutical service competency frameworks. The approach integrates artificial intelligence technologies with localization practices specific to the Chinese context. Employing a mixed-methods sequential exploratory design, we analyzed six major international frameworks using natural language processing and machine learning techniques extract 4,782 unique statements, which were subsequently classified 91.4% accuracy into relevant...

Abstract Multimode is the characteristic of industrial manufacturing processes due to different production strategies and environments. For multimode process monitoring, it a challenge identify steady modes transition modes. In this paper, k nearest neighbours (KNN)‐based density peaks clustering (DPC) method applied First, local each sample, which obtained with KNN constraint its minimum distance higher points are calculated as two indicators DPC algorithm find cluster centres training...

Robotic assembly tasks involve complex and low-clearance insertion trajectories with varying contact forces at different stages. While the nominal motion trajectory can be easily obtained from human demonstrations through kinesthetic teaching, teleoperation, simulation, among other methods, force profile is harder to obtain especially when a real robot unavailable. It difficult realistic in simulation even physics engines. Such simulated profiles tend unsuitable for actual robotic due...

Complex contact-rich insertion is a ubiquitous robotic manipulation skill and usually involves nonlinear low-clearance trajectories as well varying force requirements. A hybrid trajectory learning framework can be utilized to generate high-quality by imitation find suitable control policies efficiently reinforcement learning. However, with the mentioned approach, many human demonstrations are necessary learn several tasks even when those require topologically similar trajectories. Therefore,...

Accurate estimation of the vehicle state is quite significant for efficacy advanced active safety systems. To improve vehicles, this paper focuses on state, in which a robust cubature Kalman algorithm proposed to estimate yaw rate, sideslip angle, and speed. A three-degree-of-freedom (TDOF) dynamics model first established. Based developed model, filter used state. Finally, both simulation experimental tests are carried out demonstrate effectiveness method. The test results indicate that...

In this paper, multi-objective flexible job shop scheduling problem (MOFJSP) was studied with the objects to minimize makespan, total workload and critical workload. A variable neighborhood evolutionary algorithm (VNEA) proposed obtain a set of Pareto optimal solutions. First, two novel crowded operators in terms decision space object were proposed, they respectively used mating selection environmental selection. Then, well-designed structures local search, which consider characteristics can...

In this paper, a new fault monitoring method based on adaptive partitioning non-negative matrix factorization (APNMF) is presented for non-Gaussian processes. Non-negative (NMF) dimension reduction technique, which can effectively deal with Gaussian and data. However, the NMF model of traditional time-invariant cannot provide warning slowly changing industrial process. Therefore, paper proposes an partition algorithm non-fixed sub-block models. First, process variables under different...

In batch manufacturing process, the product quality data are often gained after several runs owing to existence of metrology delay. The delay will affect stability, performance and reliability process. this paper, processes with exponentially weighted moving average/double EWMA (EWMA/DEWMA) controller represented by data-based autoregressive average exogenous inputs (ARMAX) models instead mechanical models. A parameter-resetting recursive extended least square (PRELS) algorithm is proposed...

We present our framework that efficiently synchronizes dancing motion of a virtual character according to music input. Two modules have been developed achieve this. A server analyzes audio input on the fly and extracts information such as tempo, time signature, beat time. client chooses displays clips information, by time-warping synchronizing start with As preprocessing step, we construct database using captured dancer. PCA-based method is presented easily identify transiting parts from each clip.

In view of the problem that traditional tracker does not adapt to large displacement or abrupt motion well, optimization method attracts more and attention for a robust tracker. Considering population based has high feasibility avoiding local optimal, swarm is introduced visual tracking. These methods convert tracking search optimal solution in global. To show their merits, this paper reviews evaluates three relatively classical optimization-based algorithms. algorithms are ant lion...

An Improved discrete particle swarm optimization (DPSO)-based algorithm for the traveling salesman problem (TSP) is proposed. In order to overcome of premature convergence, a novel depressor proposed and diversity measure control also introduced which can be used switch between attractor depressor. The has been applied set benchmark problems compared with existing algorithms solving TSP using intelligence. results show that it prevent convergence high degree, but still keeps rapid like basic DPSO.

As an attempt to solve Permutation Optimisation Problems (POP) by using CLONALG (Clonal Selection Algorithm), a well-established artificial immune system, Traveling Salesman Problem (TSP) is studied as example in this paper.Operators of CLONALG, especially the hypermutation operators are analyzed and modified make adapt POP.Furthermore, local search technique employed speed up mature repertoire receptor-editing operator also avoid premature antibody population.Finally, several benchmark...