A5031259364- Piezoelectric Actuators and Control
- Force Microscopy Techniques and Applications
- Advanced Measurement and Metrology Techniques
- Adhesion, Friction, and Surface Interactions
- Advanced Surface Polishing Techniques
- Surface Roughness and Optical Measurements
- Advanced MEMS and NEMS Technologies
- Advanced machining processes and optimization
- Thermodynamic and Exergetic Analyses of Power and Cooling Systems
- Refrigeration and Air Conditioning Technologies
- Tribology and Wear Analysis
- Heat Transfer and Optimization
- Advancements in Materials Engineering
Shanghai Jiao Tong University
2011-2024
State Key Laboratory of Mechanical System and Vibration
2023
An electromagnetic-piezoelectric hybrid actuated nanopositioner for atomic force microscopy (AFM) is proposed. Applying the serial-parallel-kinetic design, parallel <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">xy</i> -stage by normal-stressed electromagnetic actuators to conduct planar scanning in a large scope. The xmlns:xlink="http://www.w3.org/1999/xlink">z</i> -axis serially carried and piezoelectric actuator (PEA) track sample's...
High-bandwidth and long-range nanoprecision motion is crucially required by many advanced instruments robotic systems, which rely on the nanopositioners. However, traditional nanopositioners suffer from their fixed stiffness can only obtain performance, leading to narrow applications. Here, a novel nanopositioner called normal-stressed electromagnetic-driven stiffness-tunable (EDSTN) presented, consists of three parts: A electromagnetic actuator generate actuation force, high-stiffness...
The normal-stressed electromagnetic actuators (NSEAs) have emerged as a promising actuation technology for developing high-performance compliant nano-positioning stages. But less attention was devoted to the modeling of multi degrees-of-freedom (DoF) NSEA-based This paper aims improve accuracy stages’ static and dynamic performances by introducing novel electromagnetic-mechanical method. Unlike previous studies, proposed method considers effects NSEAs’ negative stiffnesses along both its...
Nanopositioning is of great importance in precision engineering and nanotechnology, but the positioning accuracy severely deteriorated by ubiquitous nonlinearities such as hysteresis nonlinearity actuator well nonlinear relation between input output closed-loop control system. This paper focuses on prediction nanopositioning using different machine learning methods. The capability three emergent models including Gaussian process (GP), neural network (NN) Koopman operator (KO) are...