Combining piezoelectric MEMS with optical gap-plasmon metasurfaces enables electrically driven dynamic 2D wavefront shaping.

Abstract Dynamic polarization control is crucial for emerging highly integrated photonic systems with diverse metasurfaces being explored its realization, but efficient, fast, and broadband operation remains a cumbersome challenge. While efficient optical (OMSs) involving liquid crystals suffer from inherently slow responses, other OMS realizations are limited either in the operating wavelength range (due to resonances involved) or of birefringence tuning. Capitalizing on our development...

Exceptional points (EPs), unique junctures in non-Hermitian open systems where eigenvalues and eigenstates simultaneously coalesce, have gained notable attention photonics because of their enthralling physical principles properties. Nonetheless, the experimental observation EPs, particularly within optical domain, has proven rather challenging grueling demand for precise comprehensive control over parameter space, further compounded by necessity dynamic tunability. Here, we demonstrate...

Optical metasurfaces (OMSs), planar arrays of meticulously designed meta-atoms, are renowned for remarkable capabilities in manipulating the polarization state light at subwavelength scales. Nevertheless, most OMS-empowered optics remain static, featuring well-defined optical responses determined by their configurations set during fabrication. Here, we demonstrate a MEMS-OMS-based dynamic linear polarizer (DLP) with an electrically controlled extinction ratio, which is tunable fast and...

Histopathology, the study and diagnosis of disease through analysis tissue samples, is an indispensable part modern medicine. However, practice time consuming labor intensive, compelling efforts to improve process develop new approaches. One perspective technique involves mapping changes in polarization state light scattered by tissue, but conventional implementation requires bulky optics slow. We report design, fabrication characterization a compact metasurface polarimeter operating at 640...

Tunable focusing is a desired property in wide range of optical imaging and sensing technologies but has tended to require bulky components that cannot be integrated on-chip have slow actuation speeds. Recently, integration metasurfaces into electrostatic micro-electromechanical system (MEMS) architectures shown potential overcome these challenges offered limited out-of-plane displacement while requiring large voltages. We demonstrate for the first time, best our knowledge, movable...

Tunable metasurfaces promise to enable adaptive optical systems with complex functionalities. Among possible realizations, a recent platform combining microelectromechanical (MEMS) gap-surface plasmon (GSP) offers high modulation efficiency, broadband operation, and fast response. We compare tunable operating in GSP Fabry-Pérot (FP) regions by investigating polarization-independent blazed gratings both numerically experimentally. Peak efficiency is calculated be ∼75% cases (∼40%...

As metasurfaces begin to find industrial applications there is a need develop scalable and cost-effective fabrication techniques which offer sub-100 nm resolution while providing high throughput large area patterning. Here we demonstrate the use of UV-Nanoimprint Lithography Deep Reactive Ion Etching (Bosch Cryogenic) towards this goal. Robust processes are described for silicon rectangular pillars pattern fidelity. To quality structures, metasurface lenses, diffraction limited focusing...

Tunable optical metasurfaces (MSs) have demonstrated exceptional capabilities in actively manipulating light fields. However, most existing tunable MSs are limited to controlling only one functionality. Here, by combining a MEMS mirror with plasmonic bilayer MS (BMS), we develop an electrically driven MEMS-BMS platform enabling complete reflection phase transformation and switching between two encoded functionalities actuating the mirror. This capability stems from different responses of...

We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use standard industrial high-throughput silicon processing techniques: UV nano imprint lithography (UV-NIL) combined with continuous reactive ion etching (RIE) and pulsed Bosch deep (DRIE). As research field metasurfaces moves towards applications, these techniques are relevant as potential replacements commonly used cost-intensive methods utilizing electron beam ithography. show that...

The research field of metasurfaces has attracted considerable attention in recent years due to its high potential achieve flat, ultrathin optical devices performance. Metasurfaces, consisting artificial patterns subwavelength dimensions, often require fabrication techniques with aspect ratios (HARs). Bosch and Cryogenic methods are the best etching candidates industrial relevance towards these nanostructures. In this paper, we present Silicon (Si) metalenses by UV-Nanoimprint Lithography...

The advancement in material platforms exhibiting strong and robust electro-optic effects is crucial for further progress developing highly efficient miniaturized optoelectronic components with low power consumption modern optical communication systems. In this work, we investigate thin-film lead zirconate titanate (PZT) substrates grown by a chemical solution deposition technique as potential platform on-chip plasmonic modulators. A high modulation depth (>40 %) achieved 15 μm-long...

This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 µm wavelength. The are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint lithography cryogenic deep reactive-ion etching techniques. designed makes use geometrical phase principle consists rectangular pillars target dimensions height h = 1200 nm, width w 230 length l 354 nm periodicity p 835 nm. simulated efficiency lens is 60%, while master...

A controlled and reliable nanostructured metallic substrate is a prerequisite for developing effective surface-enhanced Raman scattering (SERS) spectroscopy techniques. In this study, we present novel SERS platform fabricated using ultra-violet nanoimprint lithography (UV-NIL) to produce large-area, ordered arrays. By UV-NIL imprinted patterns in resist, were able overcome the main limitations most common platforms, such as nonuniformity, nonreproducibility, low throughput, high cost. We...

Compared to conventional lasers limited generating static modes, mode-switchable equipped with adjustable optics significantly enhance the flexibility and versatility of coherent light sources. However, most current approaches achieving depend on conventional, i.e., inherently bulky slow, optical components. Here, we demonstrate fiber empowered by electrically actuated intracavity microelectromechanical system (MEMS)–based metasurface (MEMS-OMS) enabling mode switching between fundamental...

SuperKEKB is an asymmetric energy electron positrion collider currently under commissioning in Japan. It aims to achieve a record high luminosity of $8\ifmmode\times\else\texttimes\fi{}{10}^{35}\text{ }\text{ }{\mathrm{cm}}^{\ensuremath{-}2}\text{ }{\mathrm{s}}^{\ensuremath{-}1}$, for which accurate control ${\ensuremath{\beta}}_{y}^{*}$ needed. The advanced final focus system also relevant studies related future linear colliders, similarly need very small beam sizes. To work SuperKEKB, the...

We present two ultra-compact optical components realized by piezoelectric MEMS actuation of metasurfaces: (i) a dynamic waveplate allowing for full birefringence control, and (ii) novel tunable lens. Integrating metasurfaces with thin-film Piezoelectric lead Zirconate Titanate (PZT) allows large mechanical displacements (10-70μm) (i.e. capable strong modulations) or fast (⪆ 1kHz), both at low voltage (⪅ 30V) ultra-low power (50-100nW 23V). These are enabling within wide range medical...

Polarization analysis is essential in fields like engineering and biomedical research. Traditional polarimeters use a quarter-wave plate linear polarizer but are slow because they rely on mechanically rotating parts. Our team has developed metasurface-based polarimeter that measures polarization quickly one shot, without moving parts, using visible light at 640 nm. It combines optical, mechanical, electrical elements precisely calibrated for accuracy. Accompanied by advanced software, it...

Conventional histopathological methods, being time-consuming and resource-intensive, leave room for improvement with label-free optical techniques. In this study, our novel metasurface-based polarimeter has been verified imaging of unstained histological tissue blocks benchmarked against industrially calibrated polarization measurement systems. The system is based on a specifically designed metamaterial grating enabling movement/rotation-free characterization the light state, ensuring...

We introduce a dynamic fiber laser with an intracavity electrically-driven MEMS metasurface for efficient and rapid switching between complex vortex simple Gaussian beam modes at 1030 nm wavelength.

Abstract Dynamic polarization control is crucial for emerging highly integrated photonic systems with diverse metasurfaces being explored its realization, but efficient, fast, and broadband operation remains a cumbersome challenge. While efficient optical (OMSs) involving liquid crystals suffer from inherently slow responses, other OMS realizations are limited either in the operating wavelength range (due to resonances involved) or of birefringence tuning. Capitalizing on our development...

Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale, thus opening fascinating perspectives next generation ultracompact optical devices and systems. However, to date, most well-established OMSs are static, featuring well-defined responses determined by OMS configurations set during their fabrication. Dynamic investigated so far using controlled constituent materials or geometrical parameters often exhibit specific...

Abstract Dynamic polarization control is crucial for emerging highly integrated photonic systems with diverse metasurfaces being explored its realization 1–6 , but efficient, fast, and broadband operation remains a cumbersome challenge. While efficient optical (OMSs) involving liquid crystals suffer from inherently slow responses1, other OMS realizations are limited either in the operating wavelength range (due to resonances involved) 2,3 or of birefringence tuning 4–6 . Capitalizing on our...