- Acoustic Wave Resonator Technologies
- Diamond and Carbon-based Materials Research
- Metal and Thin Film Mechanics
- ZnO doping and properties
- Gas Sensing Nanomaterials and Sensors
- GaN-based semiconductor devices and materials
- Mechanical and Optical Resonators
- Carbon Nanotubes in Composites
- Microfluidic and Bio-sensing Technologies
- Semiconductor materials and devices
- Copper Interconnects and Reliability
- Microfluidic and Capillary Electrophoresis Applications
- Ga2O3 and related materials
- Graphene research and applications
- Supercapacitor Materials and Fabrication
- Ultrasonics and Acoustic Wave Propagation
- Ferroelectric and Piezoelectric Materials
- MXene and MAX Phase Materials
- Thin-Film Transistor Technologies
- Analytical Chemistry and Sensors
- Perovskite Materials and Applications
- Advanced MEMS and NEMS Technologies
- Plasma Diagnostics and Applications
- Electrocatalysts for Energy Conversion
- Ion-surface interactions and analysis
Institut d'Électronique et des Technologies du numéRique
2014-2023
Université de Rennes
2014-2019
Centre National de la Recherche Scientifique
2009-2019
Institut Supérieur de l'Électronique et du Numérique
2014-2018
Institut des Matériaux Jean Rouxel
2009-2015
Nantes Université
1999-2015
Université de Lorraine
2002-2007
Despite the remarkable optoelectronic properties of halide perovskites, achieving reproducible field effect transistor (FET) action in polycrystalline films at room temperature has been challenging and represents a fundamental bottleneck for understanding electronic charge transport these materials. In this work, we report perovskite-based FET operation with negligible hysteresis. Extensive measurements device modeling reveal that incorporating high-k dielectrics enables modulation channel...
In this paper, mass spectrometry was used to measure the ion energy distributions of main species during sputtering an aluminum target in a reactive Ar + N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> mixture. Both conventional magnetron (dc) and high-power impulse (HiPIMS) were used. It appears that, HiPIMS, <sup xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> Al ions are significantly more energetic (up 70 eV) than dc (<;40 eV)....
Surface acoustic wave (SAW) devices have been shown to be suitable for many sensor applications. One of these applications is pressure sensor. In this study we investigate the performance SAW sensors formed with ZnO/Si(001) structure. The sensitivities Rayleigh mode as well Sezawa are studied a function normalized thickness (kh = 2pihZnO/lambda). experimental results show an opposite strain effect in ZnO layer and Si substrate. A theoretical approach based on perturbation method has...
In order to generate surface acoustic waves (SAW) and waveguiding layer (WLAW) simultaneously, a multilayer structure of AlN/ZnO/diamond has been proposed. This investigated theoretically (two-dimensional finite element method) experimentally. The nature the excited modes their were identified by modeling confirmed experimentally measuring frequency response device in air contact with liquid. demonstrated can be used realize packageless sensor or resonator, using WLAW alone. A temperature...
The demand for high-frequency low-loss filters generates intensive research on innovative wave guide solutions. In this work, a GHz SAW device based ZnO/Si structure was fabricated using classical UV photolithography. thickness of the piezoelectric thin film optimized and specific interdigital transducer used to generate third fifth harmonic guided waves at 2.5 3.5 GHz, respectively, with an aluminum strip larger than 1 micrometer. Different modes have been measured theoretically identified...
We report the thermal properties of carbon nanowall layers produced by expanding beam radio-frequency plasma. The nanowalls, grown at 600 °C on aluminium nitride thin-film sputtered fused silica, were measured with a pulsed photo-thermal technique. apparent conductivity room temperature was found to increase from 20 80 Wm−1 K−1 while thickness varied 700 4300 nm, respectively. intrinsic nanowalls attained 300 boundary resistance 3.6 × 10−8 Km2 W−1. These results identify as promising...
Hierarchical carbon nanostructures based on ultra-long nanofibers (CNF) decorated with nanotubes (CNT) have been prepared using plasma processes. The nickel/carbon composite nanofibers, used as a support for the growth of CNT, were deposited nanopatterned silicon substrate by hybrid process, combining magnetron sputtering and plasma-enhanced chemical vapor deposition (PECVD). Transmission electron microscopy revealed presence spherical nanoparticles randomly dispersed within nanofibers....