This paper is focused on experimental studies of a high power pulsed magnetron discharge stabilized by low current pre-ionization. Time resolved were performed for Cu target optical emission spectroscopy and electrical measurements different pressures Ar buffer gas. Due to the elimination statistical delay time fast rise quasi-stationary state was reached in 6 µs. The characterized an extremely pressure independent density ∼10 A cm−2 stable Cu+ Cu++ emissions. Such dynamics permits cathode...

A 3D Monte Carlo code (OMEGA) was developed to simulate the transport of sputtered atoms in a magnetron discharge operating direct current mode. Collisions between Ti and neutral process gas (Ar) were modelled. Spatially resolved simulated velocity distributions particles parallel as well perpendicular cathode surface for different pressures recorded benchmarked against experimentally obtained profiles using laser-induced fluorescence. New differential (angular energy-dependent) cross...

This paper deals with the diagnostics of a high power pulsed magnetron sputtering device (HPPMS). The HPPMS plasma was spatially and temporally characterized in post-discharge using optical absorption spectroscopy Langmuir probe time resolved measurements. A circular titanium target used, buffer gas argon pressure fixed at 4 Pa. densities (neutrals ions) were measured by resonant technique. We found an ionization degree higher than 0.5. Comparison beetween experimental results simple...

Pulsed systems are extensively used to produce active species such as atoms, radicals, excited states, etc. The tunable diode laser absorption spectroscopy (TD-LAS) is successfully quantify the density of absorbing species, but especially for stationary or slow changing systems. time resolved-direct profile (TR-DAP) measurement method by TD-LAS, with resolution μs proposed here an extension regular use spectroscopy. spectral narrowness diodes, in blue range (∼0.01 pm), combined nanosecond...

A high-power pulsed-magnetron discharge (several kW/cm2) is described. It operates at pulse duration of the order few μs, significantly shorter than in usual similar devices. The breakdown delay was reduced by using a low-current DC preionization. study performed for Cu target Ar and He buffer gases optical emission spectroscopy electrical measurements. Saturation magnetron current reached μs which permits to shorten avoiding arc formation. Unusual high density up 10 A/cm2 induces very fast...

In this paper, we report the influence of various stages preionized high power pulsed magnetron discharge on saturated ion substrate holder current. Our system allows superposition a preionization low current dc with voltage pulses applied directly cathode. This is characterized by very fast and perfectly reproducible rise. For 33?mm copper target, Ar pressure ~1?Pa, in pulse ~1?kV, maximum cathode ~40?A reached 6??s. The dependence was analyzed for varying time duration from 2 up to 8??s...

Space-resolved velocity distributions of titanium atoms sputtered in a direct-current (dc) magnetron discharge working at low pressure (0.4 Pa) were investigated using the laser-diode–induced fluorescence technique. A blue-light laser diode, covering Ti 3d24s2-3d2(3F)4s4p(1P0) transition λ0=398.289 nm, was used to excite neutral and measure their Doppler absorption profile through induced signal. Taking advantage very narrow linewidth, energetic thermalized can be clearly distinguished....

The tuneable diode-laser-induced fluorescence (TD-LIF) technique was used to investigate both velocity and flux distributions of ground-state titanium atoms sputtered from a planar circular magnetron target working at low pressure (0.4 Pa) high (4 Pa). TD-LIF Doppler profiles were measured in front the racetrack: (i) normal (vz) parallel (vr) several distances (z), (ii) for different angles (α) 10 mm target, addressing same local volume. space variation distribution functions deduced with...

Two different blue light laser diodes were used to investigate two types of atoms, namely Ti with resonance transition centred at λ0(Ti) = 398.289 nm and Al λ0(Al) 394.512 nm. Tunable diode-laser induced fluorescence offers local information on groups sputtered particles—non-thermalized thermalized. The anisotropic velocity distribution functions (vdfs) are characterized probing the plasma along directions: parallel target, vr, perpendicular it, vz. Measurements performed in reactors both...

Experimental results showing the agglomeration of large carbonaceous particles in a dusty plasma are reported. Experiments were performed capacitively coupled rf argon plasma. Acetylene was injected to produce dust particles. When sufficient amount nanoparticles is present cathodic sheath, self-excited dust-density waves occur. The latter ones induce motion larger clusters, which vertically oscillate with displacement wave fronts. In some cases, relative velocity high enough overcome Coulomb...

Abstract Tunable diode-laser induced fluorescence technique has been optimized to accurately measure the titanium (Ti)-sputtered atom velocity distribution functions (AVDFs) in a magnetron discharge operating DC mode. The high spatial and spectral resolution achieved reveals some features of transport metal-sputtered atoms their thermalization. two groups thermalized energetic have very well separated compared previous works. Hence, fitting group shows dumping from modified Thompson Gauss...

We present an optical absorption diagnostic technique devoted to the simultaneous determination of titanium density and temperature during sputtering Ti. These measurements were performed in a type ionized physical vapor deposition reactor, consisting magnetron device assisted by two microwave systems for ionization sputtered magnetron. Our goal is optimize this reactor order improve process (film quality, recovery layers, etc.) compared standard systems. In determine both neutral ion...

Views Icon Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Twitter Facebook Reddit LinkedIn Tools Reprints and Permissions Cite Search Site Citation M. Desecures, L. de Poucques, T. Easwarakhanthan, J. Bougdira; Characterization of energetic thermalized sputtered atoms in pulsed plasma using time-resolved tunable diode-laser induced fluorescence. Appl. Phys. Lett. 3 November 2014; 105 (18): 181120. https://doi.org/10.1063/1.4901440 Download citation file:...

Abstract SiC x N y :H thin films are obtained with the microwave plasma assisted chemical vapour deposition (MPACVD) method in gas mixture H 2 /Ar/Hexamethyldisilazane. When very few amounts of nitrogen added to mixture, film composition changes drastically from like SiN films, according X‐rays Photoelectron Spectroscopy and Fourier Transform Infra‐Red (FTIR) analysis. The refractive index ( n ) Tauc's optical gap E g modified over a wide range values (1.75 ≤ 2.15 3.5 eV 5 eV) addition feed...

This paper deals with carbon dust agglomeration in radio frequency acetylene/argon plasma. Two studies, an experimental and a numerical one, were carried out to model formation mechanisms. Firstly, situ transmission spectroscopy of clouds the visible range was performed order observe main features process produced carbonaceous dust. Secondly, simulation tools dedicated understanding achieved experiments developed. A first used for discretization continuous population balance equations that...

In this work we report on the investigation of transport behavior Ti neutral atoms sputtered in a reactive high power impulse magnetron sputtering device used for TiN coating deposition. The time-resolved tunable diode laser induced fluorescence (TR-TDLIF), previously developed to study tungsten atoms, was improved measure atom velocity distribution functions. We find that TR-TDLIF signal has be fitted using three Gaussian distributions, corresponding energetic, thermalized, and...