A5032309582- Advanced MEMS and NEMS Technologies
- Photonic and Optical Devices
- Innovative Energy Harvesting Technologies
- Advanced Surface Polishing Techniques
- Advanced machining processes and optimization
- Semiconductor Lasers and Optical Devices
- Mechanical and Optical Resonators
- Advanced Fiber Optic Sensors
- Tunneling and Rock Mechanics
- Micro and Nano Robotics
- Advanced Machining and Optimization Techniques
- Advanced Thermoelectric Materials and Devices
- Magnetic Bearings and Levitation Dynamics
- Energy Harvesting in Wireless Networks
- High-Temperature Coating Behaviors
- Electrowetting and Microfluidic Technologies
- Cellular Mechanics and Interactions
- Optical Coherence Tomography Applications
- Fluid Dynamics and Heat Transfer
- Advancements in Materials Engineering
- Structural Behavior of Reinforced Concrete
- Tribology and Lubrication Engineering
- Surface Modification and Superhydrophobicity
- Electrostatic Discharge in Electronics
- Piezoelectric Actuators and Control
China Academy of Engineering Physics
2018-2025
Weifang Medical University
2025
Northwestern Polytechnical University
2014-2021
Shenyang Jianzhu University
2021
South China University of Technology
2021
Ministry of Education of the People's Republic of China
2014
Agency for Science, Technology and Research
2008-2011
Institute of Microelectronics
2008-2011
Kitami Institute of Technology
2001
β-galactosidase (β-Gal) has emerged as a pivotal biomarker for the comprehensive investigation of diseases associated with cellular senescence. The development fluorescent sensor is considerable importance precisely detecting activity and spatial distribution β-Gal. In this study, we developed two excited-state-altering responsive sensors (TF1 TF2) ratiometric detection Two TCF dyes, composed tricyanofuran (TCF) naphthol units, feature electron “pull–push” systems are quenched fluorescence...
Extending the analog output function has become an important trend in current MEMS optical switches. The electrothermal actuator is a potential candidate for realizing switch since displacement can be continuously controlled throughout its driving range. However, most existing micromirrors employ out-of-plane motion, which directly driven by actuator, design flexibility limited and temperature effect cannot ignored. In this article, designed based on coupling of mass–spring system, sidewall...
In this paper, we present the design, fabrication and measurement results of a 2D scanning mirror actuated by 1 × 10 piezoelectric Pb(Zr,Ti)O3 (PZT) cantilever actuators integrated on thin silicon beam. A combination bulk micromachining based silicon-on-insulator (SOI) substrate thin-film surface 5 µm thick Si device layer is used to fabricate device. Multi-layers Pt/Ti/PZT/Pt/Ti are deposited as electrode materials. large plate (5 mm mm) PZT array arranged in parallel formed after backside...
Abstract This paper on the reports design, fabrication and position monitoring of a micro electromagnetic linear actuator. The actuator consists stator, slider, guide, sensors affiliated jigs. Actuation is achieved through ampere force between two phase micro-coils (copper) stator permanent magnets (thick NdFeB film) slider. During slider’s movement in guide slot, tunnelling magneto-resistance (TMR) are utilized to sense magnetic field realize monitoring. TMR chosen because it owns...
Understanding the function of nanoscale structure morphology in ice adhesion properties is important deicing applications. The correlation between and nanowire as well corresponding shear fracture mechanism are presented for first time. Ice on nanowires was measured using a tangential ice-detaching instrument that developed in-house. Stress analysis performed COMSOL software. Nanowire surface shifted from Wenzel to Cassie transition wetting states when length increased. Tangential forces...
The fabrication of various micro-patterns on polymer insulating substrates is a current requirement in micro-electromechanical system (MEMS) and packaging sectors. In this paper, we use electrohydrodynamic jet (E-Jet) printing to create multifaceted stable polyethylene terephthalate (PET) substrate. Initially, simulation was performed investigate optimized settings phase field physics for the usage two distinct functional inks. A series experiments conducted, it determined that following...
The V-shaped electrothermal actuator has gained significant popularity as it was demonstrated to be a compact, stable and high rectilinear displacement device. However, existing actuators usually require the driven voltage several tens of volts realize large displacements, imposing restrictions on actuator's integration in miniature mobile mechatronic systems. paper presents metal-silicon with low voltage, power consumption displacement. electro-thermal conversion heat conduction mechanism...
A microelectromechanical systems (MEMS) low-g inertial switch is typically used for linearly increased/decreased acceleration signal sensing. In this paper, we introduce a novel design concept of MEMS based on direct contact sensing method to eliminate the bouncing effect output signal. The was designed with threshold value 12 g and composed by proof mass, suspended six Z-shaped flexure beams. fabrication carried out silicon-on-insulator (SOI) wafer standard silicon micromachining. Two glass...
Purpose The face-centered cubic structured single-phase FeCoNiCrMn high-entropy alloys (HEAs) were prepared to study the friction and wear behavior of HEAs under MoS 2 -oil lubrication. Design/methodology/approach subjected ball-on-disc reciprocating sliding against GCr15 ball. L 25 (5 6 ) orthogonal tests designed for velocity V rel (4.167-20.833 mm/s), load F N (10-50 N), temperature T (RT-140 °C) time t (5-20 min). Based on test results, multivariate repeated measures ANOVA was performed,...
For the purpose of applying electro-contact discharge dressing (ECDD) to a bronze-bonded diamond grinding wheel with fine grain size, single-pulse electric experiments and ECDD utilizing conductive resin bonded GC abrasive cup-wheel as single electrode are carried out. From results experiments, it is found that an occurs when approaches bronze bond at distance 3 5 μm. This means minimum size applicable limited 6 10 The utilization water-soluble coolant causes leakage current between so dry...
Abstract A 3mm diameter endoscopic probe for Optical Coherence Tomography (OCT) has been developed. It consists of a 1 mm micromirror, silicon optical bench (SiOB), gradient refractive index (GRIN) lens and single mode fiber. The is enclosed within biocompatible, transparent waterproof polycarbonate tube in vivo diagnostic applications. two-axis scanning micromirror driven by electrothermal actuators with voltage less than 2 V mechanical deflection up to 11∘. By integrating the MEMS...
Abstract This paper presents a bi-stable mechanism, which mainly consists of suspended mass, spacer and bottom plate. Electromagnetic actuation is used for switching between two states (i.e. ‘On/Off’ state). The achieved via permanent magnet (PM) on the mass micro-coils embedded in Different from spiral coil central core conventional design, this integrate Cu Ni together as whole, acting both ferromagnetic core. integration simplifies fabrication into one-mask process. Furthermore,...
A new concept of MEMS based thermoelectric power generator (TPG) is investigated in this study. By using solder wafer bonding technology, we can bond three pieces wafers to form vacuum packaged TPG. According the finite element method and analytical modeling results, output per area device derived as 68.6 muW/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> for temperature difference 6degC between two ends thermocouple junctions. It...
A new concept of MEMS based thermoelectric power generator (TPG) is investigated in this study. By using solder wafer bonding technology, we can bond three pieces wafers to form vacuum packaged TPG. According the finite element method and analytical modeling results, output per area device derived as 68.6 muW/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> for temperature difference 6degC between two ends thermocouple junctions. It...
A MEMS low-g inertial switch is typically used for linearly increased/decreased acceleration signal sensing. In this paper, we introduce a novel design concept of based on direct contact sensing method to eliminate the bouncing effect output signal. The was designed with threshold value 12 g and composed by proof mass, suspended six Z-shaped flexure beams. fabrication carried out SOI wafer standard silicon micromachining. Two glass wafers were encapsulate establish connection between movable...