Tobacco mosaic virus (TMV) has the potential to be an ideal candidate for a building block of next-generation micro/nano/bio systems. The TMV virion is high-aspect ratio rigid nanotube that robust and compatible with some conventional microfabrication processes. can chemically genetically modified enhance its physical properties tailor them specific applications. This review covers use nanostructures in wide range been utilized production nanowires, nanostructured thin films, biomimetic...

We report performance results on a MEMS out-of-plane gyroscope suitable for platform stabilization. Angle random walk (ARW) less than 0.006 deg/rt-hr and median bias stabilities over temperature of 0.2 deg/hr have been achieved. Sensor bandwidth as characterized by drive sense mode frequency separation is Hz allowing system level greater 300 Hz. The HG6900 IMU will integrate these sensors serve stabilization applications in 259 cm3 volume.

Performance data is presented from a MEMS-based IMU being developed at Honeywell with the objective of navigation-grade performance for variety applications. Design gyroscope derived that in Honeywell's HG1930 tactical-grade MEMS IMU, widely used product. Fabrication processes similar to are fabricate new vibrating beam accelerometer which measures acceleration via differential frequency change. Turn-on turn-on bias repeatability better than 0.1 deg/hr gyroscopes and 20 micro-g...

An all-solid electrochemical supercapacitor has been developed using a nanostructured nickel and titanium nitride template that is coated with ruthenium oxide by atomic layer deposition (ALD). The electrode morphology was based on high surface area biotemplate of genetically modified Tobacco mosaic virus. automatically self-assembles at room temperature in aqueous solution. Nafion R perfluorosulfonate ionomer dispersion cast the electrodes used as solid proton-conducting electrolyte. A 5.8 F...

A polymer V-shaped electrothermal actuator (ETA) array that is capable of compressing a live biological cell with desired strain was designed, fabricated and characterized. This the core microelectromechanical systems (MEMS) device to measure mechanical compliance cell. actuation mechanism selected because it able operate in an electrolytic solution (cell medium), which needed keep cells alive during testing. The MEMS-based optimized utilizing finite element analysis devices were using...

We report the first successful demonstration of an optical microelectromechanical systems (MEMS) sensing platform for in situ characterization electrochemically induced reversible mechanical changes lithium-ion battery (LIB) electrodes. The consists array flexible membranes with a reflective surface on one side and thin-film LIB electrode other side. deflect due to active material volume change caused by lithium intercalation (expansion) extraction (contraction). This deflection is monitored...

Bacterial biofilms present a societal challenge, as they occur in the majority of infections but are highly resistant to both immune mechanisms and traditional antibiotics. In pursuit better understanding biofilm biology for developing new treatments, there is need streamlined, controlled platforms growth evaluation. We leverage advantages microfluidics develop system which formed sectioned, allowing parallel assays on multiple sections one biofilm. A microfluidic testbed with depth profiles...

Abstract Here we describe the development of a unique m ulti- e lectrode rray (MEA) system capable supporting patterned neural networks in vitro. The significant features this BioMEMS are: (1) precise and exclusive positioning cell bodies to electrode region, (2) definition interconnecting pathways among neurons by using s elf- ssembled onolayers (SAMs), (3) one-to-one stimulation recording from precisely positioned neurons. We present for first time design fabrication an MEA chip neuronal...

A submersible lateral force sensor has been developed as part of an integrated MEMS chip for cell biomechanics experiments with forces below 100 nN. The piezoresistive elements in the are defined by a single mask on SOI wafer without need doping or annealing step, and easily into other MEMS. We examine optimal design this sensor, well characterization results from fabricated devices.

We present a novel approach for the fabrication of lithium-ion microbattery electrodes which deliver high energy and power density. The key enabling technology is use self-assembled <i>Tobacco mosaic</i> virus (TMV) nanoforests as template active battery materials. self-assembling TMV genetically modified biological nanorod with increased metal binding properties enhanced manufacturability. High density achieved due to surface area increase within given footprint by combining...

This work presents the first demonstration of a MEMS optical sensor for in-situ, real-time monitoring both mechanical and chemical structure evolutions in V2O5 lithium-ion battery (LIB) cathode during operation. A reflective membrane forms one side Fabry-Perot (FP) interferometer, while other is coated with exposed to electrolyte half-cell LIB. Using microscope two laser sources, induced deflection corresponding Raman intensity changes are observed lithium cycling. Results good agreement...

Measurement of the Young's modulus bone cells (osteoblasts) is considered to be paramount importance investigate and find a more efficient cure for osteoporosis, an illness that impacting significant portion world's senior population. MEMS technology ideal platform build better testing system with desired qualities. Some microdevices based on have been developed this purpose, but most them are still in initial stages development. In paper, BioMEM mechanical properties biological cell...

A BioMEMS platform has been developed to measure the mechanical compliance of live biological cells.It integrates a Vshaped electrothermal actuator (ETA) array, force sensor, displacement thermal and cell-positioning system in single chip.By compressing cell measuring reaction with biocompatible polymer-based system, can be measured without damaging cell.Here, we present initial characterizations integrated sensors actuators, as well temperature measurements during actuation liquid...