A5085179299- Laser-Matter Interactions and Applications
- Laser-induced spectroscopy and plasma
- Laser-Plasma Interactions and Diagnostics
- Atomic and Molecular Physics
- Advanced Fiber Laser Technologies
- Mass Spectrometry Techniques and Applications
- Laser Material Processing Techniques
- Laser Design and Applications
- Diamond and Carbon-based Materials Research
- Planetary Science and Exploration
- Solid State Laser Technologies
Advanced Research Center for Nanolithography (Netherlands)
2018-2024
Vrije Universiteit Amsterdam
2021-2023
Abstract We present a new experimental setup for high-order harmonic generation in laser-produced plasmas, allowing the of coherent VUV and EUV light, as well characterisation plasmas by studying emitted harmonics. have successfully generated harmonics Al, Ni, Ag, In, Sn plasmas. Large differences spectra signal yields been observed these different targets. Harmonics up to order 25, corresponding wavelength 62.4 nm photon energy 19.9 eV, measured with tin Scanning laser parameters delay...
We present high-order harmonic generation (HHG) in laser-produced aluminium and tin plasmas driven by a two-color field with orthogonal polarization, leading to the of both odd even harmonics. shape effective drive sub-cycle resolution controlling phase between fundamental wave its second harmonic. The influences electron trajectories various harmonics generated these plasmas. Here we focus on intermediate orders, energies around ionization potential target atoms. Clear oscillatory signals...
Abstract In this work, the expansion dynamics of liquid tin micro-droplets irradiated by femtosecond laser pulses were investigated. The effects pulse duration, energy, and polarization on ablation, cavitation, spallation studied using durations ranging from 220 fs to 10 ps, with energies 1 5 mJ, for an initial radius 15 23 $$\upmu$$ <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML"><mml:mi>μ</mml:mi></mml:math> m. Using linearly polarized pulses, cylindrically asymmetric shock waves...
The effect of a pair picosecond pulses on the ionization and deformation liquid tin microdroplet is studied for range incident pulse parameters. Faraday cups are used to measure ion kinetic energy distributions, together with high-resolution shadowgraphy monitor target expansion. It found that introduction relatively weak first results in an order-of-magnitude reduction number ions energies above 1 keV, strong shift distribution towards lower energies, while expansion dynamics droplet can be...
We present an optical parametric chirped pulse amplifier (OPCPA) delivering 10.5 mJ pulses with durations down to 220 fs, at 100 Hz repetition rate, centered 1550 nm. The system is pumped by a picosecond Nd:YAG 1064 nm based on quasi-continuous-wave diode pumping and seeded femtosecond mode-locked Er fiber laser This choice of wavelengths enables the use well-established technology components for both pump signal beams, resulting in straightforward robust design ability further power scaling...
In a world where miniaturization leads technology advancement, extreme ultraviolet (EUV) light is becoming the tool for leading companies to increase number of transistors on chip. EUV generated via laser-produced plasma (LPP), that currently driven by 10.6 µ m CO 2 lasers, due their high demonstrated conversion efficiency (CE) from laser power EUV. terms technology, solid-state lasers based Nd:YAG, operating around 1 µm wavelength have significant advantages in efficiency, stability and...
Next-generation nanolithography devices make use of extreme ultraviolet (EUV) radiation, emitted by a laser-produced plasma (LPP) in tin, to print nanometer-sized features on semiconductor wafers. The EUV emission characteristics such LPPs depend strongly the properties, which are conditioned laser pulse that generates plasma. Therefore, it is useful understand how different parameters affect spatial and temporal properties formed High-order harmonic generation (HHG) LPP an auxiliary...
We are developing a pump-probe experiment in which high harmonics generated tin plasma and analysed spectrometer to investigate the spatial temporal distribution of different charge states plasma.
We present a 1.55 µm OPCPA system delivering 10.5 mJ, 220 fs pulses at 100 Hz repetition rate. It is pumped by picosecond Nd:YAG amplifier and seeded femtosecond mode-locked Er fiber laser.
TI-REX is a self-seeded nanosecond (5-20ns) parametric amplifier with wide wavelength tunability (1.4-4.4µm) and high-resolution (0.25ns) temporal shaping capability. It enables systematic studies on laser produced plasmas the wavelength-dependence of extreme-ultraviolet generation efficiency.
We present a pump-probe experiment in which high-order harmonics are generated laser-produced plasma as bright EUV photon source and tool for characterization.
State-of-the-art nanolithography machines use extreme ultraviolet (EUV) light, emitted by a laser-produced plasma (LPP) in tin, to print ever smaller structures on silicon wafers. The EUV emission characteristics of this LPP depend strongly the properties, which are conditioned laser pulse that generates plasma. Therefore, it is useful understand how different parameters affect spatial and temporal properties formed For purpose, we aim investigate produced plasmas from various materials...