A5063954694- Atomic and Molecular Physics
- Laser-induced spectroscopy and plasma
- Laser-Matter Interactions and Applications
- Advanced Frequency and Time Standards
- Laser Material Processing Techniques
- Atomic and Subatomic Physics Research
- Laser-Plasma Interactions and Diagnostics
- Cold Atom Physics and Bose-Einstein Condensates
- Nuclear physics research studies
- Ion-surface interactions and analysis
- Mass Spectrometry Techniques and Applications
- Diamond and Carbon-based Materials Research
- Laser Design and Applications
- X-ray Spectroscopy and Fluorescence Analysis
- Radioactive Decay and Measurement Techniques
- Particle accelerators and beam dynamics
- Optical Coatings and Gratings
- Fluid Dynamics and Heat Transfer
- Nuclear Physics and Applications
- Particle physics theoretical and experimental studies
- Scientific Measurement and Uncertainty Evaluation
- Electron and X-Ray Spectroscopy Techniques
- Quantum optics and atomic interactions
- Advanced Chemical Physics Studies
- Photorefractive and Nonlinear Optics
Advanced Research Center for Nanolithography (Netherlands)
2016-2024
Vrije Universiteit Amsterdam
2020-2024
Vitenparken
2024
University of Groningen
2009-2022
University of Twente
2022
Los Alamos National Laboratory
2022
Keldysh Institute of Applied Mathematics
2022
Institute of Spectroscopy
2017
Physikalisch-Technische Bundesanstalt
2015
Max Planck Society
2013-2015
Abstract Laser-produced transient tin plasmas are the sources of extreme ultraviolet (EUV) light at 13.5 nm wavelength for next-generation nanolithography, enabling continued miniaturization features on chips. Generating required EUV sufficient power, reliability, and stability presents a formidable multi-faceted task, combining industrial innovations with attractive scientific questions. This topical review contemporary overview status field, discussing key processes that govern dynamics in...
Control over the motional degrees of freedom atoms, ions, and molecules in a field-free environment enables unrivalled measurement accuracies but has yet to be applied highly charged ions (HCIs), which are particular interest future atomic clock designs searches for physics beyond Standard Model. Here, we report on Coulomb crystallization HCIs (specifically (40)Ar(13+)) produced an electron beam ion trap retrapped cryogenic linear radiofrequency by means sympathetic cooling through...
Abstract Extreme ultraviolet (EUV) lithography is currently entering high-volume manufacturing to enable the continued miniaturization of semiconductor devices. The required EUV light, at 13.5 nm wavelength, produced in a hot and dense laser-driven tin plasma. atomic origins this light are demonstrably poorly understood. Here we calculate detailed opacity spectra using Los Alamos physics suite ATOMIC validate these calculations with experimental comparisons. Our key finding that largely...
Shining a short, intense laser pulse on micrometer-sized droplets of liquid metal creates plasma that is bright source extreme ultraviolet (EUV) light. The authors study in detail the propulsion and deformation such due to ``kick'', unveil underlying mechanisms scaling laws. Optimizing EUV sources for next-generation nanolithography requires deep understanding both droplet-laser coupling droplet fluid-dynamical response, which this work provides.
We measure optical spectra of Nd-like W, Re, Os, Ir, and Pt ions particular interest for studies a possibly varying fine-structure constant. Exploiting characteristic energy scalings we identify the strongest lines, confirm predicted 5s-4f level crossing, benchmark advanced calculations. infer two possible values M2/E3 E1 transitions in Ir^{17+} that have highest sensitivity to variation constant among stable atomic systems. Furthermore, determine energies proposed frequency standards...
Plasmas produced from microdroplets of liquid tin provide light at an extreme ultraviolet (EUV) wavelength 13.5 nm, for state-of-the-art nanolithography that will enable the continuation Moore's law in shrinking transistors. Currently CO${}_{2}$ gas lasers are used to drive such plasma; transitioning modern solid-state would have significant advantages, if efficiency converting laser energy into 13.5-nm radiation were sufficiently competitive. This study quantifies solid-state-laser-driven...
An experimental study of laser-produced plasmas is performed by irradiating a planar tin target laser pulses, 4.8 ns duration, produced from KTP-based 2-µm-wavelength master oscillator power amplifier. Comparative spectroscopic investigations are for driven 1-µm- and pulsed lasers, over wide range intensities spanning 0.5 − 5 × 10 11 W/cm 2 . Similar extreme ultraviolet (EUV) spectra in the 5.5–25.5 nm wavelength underlying plasma ionicities obtained when intensity ratio kept fixed at I 1µm...
Abstract Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In future, solid-state mid-infrared may instead be efficiently pump Such laser systems have promise more compact, better scalable, and higher wall-plug efficiency. this Topical Review, we present recent findings made at Advanced Research Center Nanolithography (ARCNL) on using 1 µ m wavelength tin target...
Storage and cooling of highly charged ions require ultra-high vacuum levels obtainable by means cryogenic methods. We have developed a linear Paul trap operating at 4 K capable very long ion storage times about 30 h. A conservative upper bound the H(2) partial pressure 10(-15) mbar (at K) is obtained from this. External injection possible optimized optical access for lasers provided, while exposure to black body radiation minimized. First results its operation with atomic molecular are...
We experimentally re-evaluate the fine structure of Sn$^{11+...14+}$ ions. These ions are essential in bright extreme-ultraviolet (EUV) plasma-light sources for next-generation nanolithography, but their complex electronic is an open challenge both theory and experiment. combine optical spectroscopy magnetic dipole $M1$ transitions, a wavelength range covering 260\,nm to 780\,nm, with charge-state selective ionization electron beam ion trap. Our measurements confirm predictive power \emph{ab...
We demonstrate the efficient generation of extreme ultraviolet (EUV) light from laser-produced plasma (LPP) driven by 2 μm wavelength laser as an alternative for 10 CO2 gas LPP currently employed in EUV lithography machines high-volume manufacturing semiconductor devices. High conversion efficiencies into “in-band” photons up to 5.0% are achieved homogeneously heating that is laser-generated preshaped tin microdroplet targets. Scaling pulse duration, spot size, and intensity yields a high...
We analyze the complex level structure of ions with many-valence-electron open-[Kr] $4{d}^{m}$ subshells ($m=7--4$) ab initio calculations based on configuration-interaction many-body perturbation theory (CI+MBPT). Charge-state-resolved optical and extreme ultraviolet (EUV) spectra ${\mathrm{Sn}}^{7+}--{\mathrm{Sn}}^{10+}$ were obtained using an electron beam ion trap. Semiempirical spectral fits carried out orthogonal parameters technique cowan code lead to 90 identifications...
The measurement of the propulsion metallic microdroplets exposed to nanosecond laser pulses provides an elegant method for probing ablation pressure in a dense laser-produced plasma. We present measurements velocity over three decades driving Nd:YAG pulse energy and observe near-perfect power law dependence. Simulations performed with RALEF-2D radiation-hydrodynamic code are shown be good agreement above specific threshold energy. simulations highlight importance radiative losses which...
We study the fragmentation of a liquid drop that is hit by laser pulse. The expands into thin sheet breaks radial expulsion ligaments from its rim and nucleation growth holes on sheet. By combining experimental data two systems with vastly different time- length scales we show how early-time laser-matter interaction affects late-time fragmentation. identify Rayleigh--Taylor instabilities origins as prime cause derive scaling laws for characteristic breakup time wavenumber. final web results...
We present the results of a joint experimental and theoretical study plasma expansion arising from Nd:YAG laser ablation (laser wavelength λ = 1.064 μm) tin microdroplets in context extreme ultraviolet lithography. Measurements ion energy distribution reveal near-plateau for kinetic energies range 0.03–1 keV peak near 2 followed by sharp fall-off above keV. Charge-state resolved measurements attribute this to existence peaks centered Sn3+–Sn8+ distributions. To better understand physical...
We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by laser wavelengths in λ = 1.064 − 10.6 μ m range and intensities I 0.5 5 × 10 11 W cm−2 for m. Detailed numerical simulations laser-irradiated spherical tin microdroplet targets reveal a strong laser-wavelength dependence on absorptivity conversion efficiency generating in-band EUV radiation. For irradiation, increase radiation with increasing intensity is offset only minor reduction efficiency....
Atomic magnetometry was performed at Earth's magnetic field over a free-space distance of ten meters. Two laser beams aimed distant alkali-vapor cell excited and detected the 87Rb resonance, allowing within to be interrogated remotely. Operated as driven oscillator, magnetometer measured geomagnetic with ≲3.5 pT precision in ∼2 s data acquisition; this likely limited by ambient fluctuations. The sensor also operated self-oscillating mode 5.3 pT/Hz noise floor. Further optimization will yield...
Experimental scaling relations of the optical depth are presented for emission spectra a tin-droplet-based, 1-μm-laser-produced plasma source extreme-ultraviolet (EUV) light. The observed changes in complex spectral over wide range droplet diameters (16–65 μm) and laser pulse durations (5–25 ns) accurately captured relation featuring as single, pertinent parameter. scans were performed at constant intensity 1.4 × 1011 W/cm2, which maximizes 2% bandwidth around 13.5 nm relative to total...
Extreme-ultraviolet (EUV) spectra of ${\mathrm{Sn}}^{13+}\ensuremath{-}{\mathrm{Sn}}^{15+}$ ions have been measured in an electron-beam ion trap (EBIT). A matrix inversion method is employed to unravel convoluted from a mixture charge states typically present EBIT. The benchmarked against the spectral features resonance transitions ${\mathrm{Sn}}^{13+}$ and ${\mathrm{Sn}}^{14+}$ ions. Three new EUV lines confirm its previously established level structure. This relevant for nanolithography...
The emission properties of tin plasmas, produced by the irradiation preformed liquid targets several-ns-long 2-$\mu$m-wavelength laser pulses, are studied in extreme ultraviolet (EUV) regime. In a two-pulse scheme, pre-pulse is first used to deform microdroplets into thin, extended disks before main (2$\mu$m) pulse creates EUV-emitting plasma. Irradiating 30- 300-$\mu$m-diameter with 2-$\mu$m we find that efficiency creating EUV light around 13.5nm follows fraction overlaps target. Next,...
We experimentally and numerically investigate the early-time hydrodynamic response of tin microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic microscopy to record laser-induced dynamics liquid droplets determine propulsion speed $(U)$ initial radial expansion rate $({\stackrel{\ifmmode \dot{}\else \.{}\fi{}}{R}}_{0})$. The ratio these two quantities is key parameter be optimized for applications in nanolithography, where laser-impacted serve as targets...