A5003037505- Iterative Learning Control Systems
- Piezoelectric Actuators and Control
- Advanced machining processes and optimization
- Advanced Surface Polishing Techniques
- Dysphagia Assessment and Management
- Advanced Measurement and Metrology Techniques
- Control Systems in Engineering
- Industrial Vision Systems and Defect Detection
- Dynamics and Control of Mechanical Systems
- Mineral Processing and Grinding
- Evolutionary Algorithms and Applications
- Head and Neck Cancer Studies
- Sensorless Control of Electric Motors
- Epigenetics and DNA Methylation
- Advanced Multi-Objective Optimization Algorithms
- Acute Myeloid Leukemia Research
- Fault Detection and Control Systems
- Head and Neck Surgical Oncology
- Magnetic Properties and Applications
- Metaheuristic Optimization Algorithms Research
- Immune Cell Function and Interaction
- Structural Health Monitoring Techniques
- Electric Motor Design and Analysis
Shanghai Fudan Microelectronics (China)
2018-2025
Fudan University
2018-2025
Huashan Hospital
2022
State Key Laboratory of ASIC and System
2020
Harbin Institute of Technology
2016
The feedforward control is becoming increasingly important in ultra-precision stages. However, the conventional model-based methods cannot achieve expected performance new-generation stages since it hard to obtain accurate plant model due complicated stage dynamical properties. To tackle this problem, article develops a model-free data-driven adaptive iterative learning approach that designed frequency-domain. Explicitly, proposed method utilizes frequency-response data learn and update...
Permanent magnet linear motors (PMLMs) are gaining increasing interest in ultra‐precision and long stroke motion stage, such as reticle wafer stage of scanner for semiconductor lithography. However, the performances PMLM greatly affected by inherent force ripple. A number compensation methods have been studied to solve its influence system precision. aiming at some application, characteristics limit design controller. In this paper, a new strategy based on inverse model iterative learning...
The feedforward control can effectively improve the servo performance in applications with high requirements of velocity and acceleration. iterative tuning method (IFFT) enables possibility both removing need for prior knowledge system plant model-based improving extrapolation capability varying tasks learning control. However, most IFFT methods require to set number basis functions advance, which is inconvenient design. To tackle this problem, an adaptive data-driven based on a fast...
Both the high positioning accuracy and moving speed are critical performance pursued in motion control of precision stage, especially semiconductor industry. To satisfy these requirements simultaneously, a novel strategy is proposed this paper, which combines iterative learning fractional-order PID together. Based on kinematical analysis decoupling model, framework constructed. The ILC-fractional-order controller used for position loop, while classical chosen current loop loop. Considering...
The factors that affect hypomethylating agents (HMAs) sensitivity in myelodysplastic syndrome (MDS) are complex and multifaceted. They include DNA methylation, gene expression, mutation, etc. However, the underlying mechanisms still not clearly illustrated. In present work, ABAT expression was associated with HMAs sensitivity. It found interference increased of HL-60 THP-1 cells to treatment, while overexpression decreased its RNA-sequencing analysis showed knockdown activated both...
The cogging force arising due to the strong attraction forces between iron core and permanent magnets, is a common inherent property of linear motors, which significantly affects control performance. Therefore, significant research efforts have been devoted compensation force. In this paper, an identification approach based on radial basis function neural network (RBFNN) proposed obtain accurate model A self-adaptive hybrid self-learning teaching-learning-based optimization (SHSLTLBO) method...
For the lightweight ultraprecision motion stages, suppression of vibration caused by flexible modes is increasing importance in modern manufacturing industry. The overactuation scheme attracts more interest since it capable both effectively suppressing and significantly improving performance. However, nonsquare systems, where number actuators larger than rigid modes, generally lead to a nonunique decoupling for control system, which actually intractable. In this article, novel dynamic...